JPH0243099B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to an environmental testing device for conducting heat resistance tests on electronic equipment components such as semiconductors.

Prior Art Conventionally, as shown in FIG. 9, this type of apparatus includes an environmental test apparatus having an environmental test chamber 4 covered by a casing 1, a door 2, and an operation hole 3. The chamber is divided by a plate 5, and one chamber is equipped with an evaporator 6 for a refrigeration cycle, a heating means 7 such as an electric heater, and a blower 8 for circulating air, and the other chamber is cooled under normal pressure. Are known. Note 9 is the partition plate 5
It is a ventilation hole drilled in the.

In the above configuration, in the conventional environmental test apparatus, the air in the environmental test chamber 4 is transferred to the evaporator 6.
After being cooled by heating means 7 and heated to an appropriate temperature by heating means 7, it is circulated through blower 8.

Problems to be Solved by the Invention However, although such conventional environmental test devices are good when operated as they are, when the test object in the environmental test chamber 4 is operated from the operation hole 3. It was stated that if the environmental test chamber was at atmospheric pressure and the temperature of the outside air was significantly higher than that of the environmental test chamber, the outside air would enter through the operation hole and the temperature inside the environmental test chamber could not be kept constant. There is an inconvenience. Also, when the humidity outside is high,
There is an inconvenience when frost builds up near the operation hole. Furthermore, if the outside air and the temperature inside the environmental test chamber are different, water droplets will condense on the outside surface of the operation hole, and when you put your hand inside the environmental test chamber to operate it, the water droplets will stick to your hands and the test object. There is an inconvenience.

Therefore, in view of the drawbacks of the prior art, the inventors of the present invention have conducted extensive studies on ways to prevent outside air from entering through the operation holes.As a result, if the environmental test chamber is kept under positive pressure, the air inside may blow out from the operation holes. This invention was developed after confirming that it would not get inside.

Means for Solving the Problems That is, the present invention divides an environmental test chamber covered with a casing into an environmental test chamber and a constant temperature air generation chamber by a partition plate, and installs an evaporator of a refrigeration cycle in the constant temperature air generation chamber. In an environmental testing device placed in series with the air heating means and air circulation blower, there is an operation hole provided in a part of the casing to suppress the inflow of outside air, and a communication port placed near the air inlet of the evaporator to introduce outside air. The communication port is formed by a hole provided on the air inlet side of the evaporator of the casing, and a duct having a U-shaped cross section that communicates with the hole, and one end of the duct communicates with the outside. Achieve this purpose.

In addition, in order to correct the inconvenience of water droplets condensing on the surface of the operating hole and causing water droplets to adhere to your hands and the test object when you put your hands inside the environmental test chamber to operate it, the operating hole is equipped with a defrosting means. Ta. Furthermore, ultra-low dew point air supply means was provided in the operation hole to lower the humidity of the outside air entering through the operation hole.

Function As described above, in the environmental test device according to the present invention, the air is cooled while introducing outside air using the evaporator installed in the constant temperature air generation chamber, and then heated to a predetermined temperature by the heating means, and then used for air circulation. A blower is used to blow air into the environmental test chamber. At this time, outside air is introduced and forced circulation is performed using a blower, so the environmental test room naturally becomes under positive pressure. Due to the positive pressure inside the environmental test chamber, a pressure difference occurs across the membrane of the operation hole. For this reason, when operating the test object by manually inserting it through the operation hole, it is difficult for outside air to flow into the environmental test chamber through the operation hole. In addition, since the operation hole is equipped with a defrosting means, even if water droplets do not adhere to the operation hole, there is a risk that water droplets may adhere to your hands or the test object when you put your hand inside the environmental test chamber and operate it. There is no.

Furthermore, since the operation hole is provided with a super-dew point air supply means, the air around the operation hole always has a low dew point, so even if outside air enters the environmental test chamber through the operation hole, frost will not form.

Embodiments The present invention will be described in detail below with reference to embodiments shown in FIGS. 1 to 8.

In FIG. 1, reference numeral 1 denotes a casing that covers an environmental test tank, and the inside of the environmental test tank is divided into an environmental test chamber 4 and a constant temperature air generation chamber via a partition plate 5. In this constant temperature air generation chamber, an evaporator 6 for a refrigeration cycle, an electric heater 7 for air heating means, and a blower 8 for air circulation are arranged substantially in series.

Reference numeral 3 denotes an operation hole equipped with an air shield such as a blind-shaped silicone rubber to communicate between the outside and the inside of the environmental test chamber 4 and to suppress the inflow of outside air. is installed.

In addition, outside air is introduced through a communication port 10 in front of the evaporator 6, which is the entrance to the constant temperature air generation chamber. The communication port 10 is formed by a hole provided in the casing 1 on the air inlet side of the evaporator 6, and a duct made of a partition plate with good heat conductivity so as to have a U-shaped cross section and communicate with the hole. One end of the duct communicates with the outside. Note that 9 is a ventilation hole made in the partition plate 5.

Since the environmental test apparatus is configured as described above, in the apparatus according to the present invention, air flows in while being pre-cooled through the communication port 10 formed by a duct or the like with the outside air in front of the constant temperature air generation chamber. It is cooled together with the internal air by the fins of the evaporator 6 and heated by the electric heater 7. In addition, the air pre-cooled by the duct condenses as it meanderes, so
The air has a low dew point.

This cooling air is then sent into the environmental test chamber 4 through a ventilation hole 9 by a blower 8 installed in the constant temperature air generation chamber.

This sent-out cooling air cools the test object in the environmental test chamber 4 and then flows into the evaporator 6 again. Therefore, the blower 8 in the constant temperature air generation chamber has the function of circulating air and maintaining the inside of the environmental test chamber 4 at positive pressure. Therefore, since the inside of the environmental test chamber 4 is under positive pressure, even if the tester puts his/her hand into the environmental test chamber through the operation hole 3, even if cold air blows out from inside, there will be no leakage from the outside. Do not enter the environmental test chamber 4. Moreover, since an air shielding means is installed, a large amount of air does not flow out from the environmental test chamber, and the chamber can be maintained at a positive pressure.

Next, the embodiment shown in FIG. 2 has a different operation hole structure from that of the environmental test device of the embodiment shown in FIG. It is separated from the operation hole 3a by an air layer.

The environmental test device of the embodiment shown in Fig. 2 has two operation holes.
Because of this, the amount of cooling air blown from the inside to the outside can be reduced, and the rise in temperature inside the environmental test chamber can be suppressed as much as possible.

It can also prevent outside air from entering the environmental test chamber.

In the embodiment shown in FIG. 3, a defrosting means 11 consisting of an electric heater is provided in the operation hole 3 of the embodiment shown in FIG.
is installed.

Therefore, even if there is a temperature difference between the temperature inside the environmental test chamber 4 and the temperature of the outside air, water droplets are unlikely to condense in the operation hole 3, and when operating the environmental test chamber 4 by inserting a hand into it, There is no possibility of water droplets adhering to the test object or the test object.

The embodiment shown in FIG. 4 is equipped with defrosting means 11 consisting of electric heaters in each of the operating holes 3a and 3b of the embodiment shown in FIG.

Therefore, in the environmental test device of this embodiment, water droplets do not adhere to the operation hole, and water droplets do not adhere to the hands or the test object when operating the environmental test chamber by inserting the hand into the chamber. In addition, air leakage in the environmental test chamber 4 and environmental test chamber 4
Less outside air needs to flow inside.

The embodiment shown in FIG. 5 is provided with ultra-low dew point air supply means 12 consisting of compressed air in the operating hole of the embodiment shown in FIG.

Therefore, in the device of this embodiment, since the air supplied from the air compressor has a low dew point, even if outside air flows into the environmental test chamber 4 from the operation hole 3, the inflowing air has a low dew point and therefore cannot be operated. Frost is difficult to adhere to the vicinity of hole 3.

In the embodiment shown in FIG. 6, the operation hole 3 of the embodiment shown in FIG. 3 is provided with ultra-low dew point air supply means 12 consisting of an air compressor.

Therefore, in the device of this embodiment, water droplets are less likely to condense in the operation hole 3, and frost is less likely to adhere to the vicinity of the operation hole 3 due to the low dew point air.

The embodiment shown in FIG. 7 is provided with ultra-low dew point air supply means 12 outside the operation hole 3a of the embodiment shown in FIG.

Therefore, in the device of this embodiment, the operation holes 3a, 3
The air in the environmental test chamber 4 is less likely to leak through b, and frost is less likely to adhere to the vicinity of the operation hole.

The embodiment shown in FIG. 8 is the same as the embodiment shown in FIG. 4, except that an ultra-low dew point air supply means 12 is provided outside the operation hole 3a.

Therefore, in the device of this embodiment, the operation holes 3a, 3
b is difficult for water droplets to adhere to the operating hole, air in the environmental test chamber 4 is difficult to leak through the operating holes 3a and 3b, and the vicinity of the operating hole 3a has a low dew point, so frost is difficult to adhere to the operating hole.

In this embodiment, an electric heater is used as the defrosting means, but the defrosting means is not limited to this.
An infrared ray radiating means, a hot air blowing means, or a film heater may be attached to the operation hole.

In addition, in the environmental test device of this example, outside air is directly introduced from the communication port, but the invention is not limited to this, and an air compressor is attached to the communication port as an extremely low dew point air supply means. It is better to supply the same amount of air.

Furthermore, the evaporator of the environmental test device according to the present invention is not a conventional one, but is an evaporator of a refrigerator having a plurality of refrigerant inlets and outlets, as shown in FIG.
If an evaporator is used in which refrigerant b is placed on the inlet side and outlet side of the gas to be cooled, and the refrigerant outlets 14a and 14b are placed on the inlet side and outlet side of the gas to be cooled, respectively,
Since frost only adheres to the vicinity of the refrigerant inlets 13a and 13b of the evaporator and does not adhere to the vicinity of the refrigerant outlets 14a and 14b, the ventilation path of the evaporator is not blocked by frost.

Effects As described above, the environmental test device according to the present invention is configured to introduce outside air to create a positive pressure inside the environmental test chamber, and to shield the outside air from flowing into the environmental test chamber through the operation hole. Because of this, there is less air inflow. In addition, since air does not easily leak from the operation hole, it is easy to increase the internal pressure in the environmental test chamber.

Therefore, it is suitable for an environmental test device having an operation hole.

Since the communication port for introducing outside air is configured to meander through the duct, the introduced air is pre-cooled and dehumidified, so it can be supplied into the test chamber as air with a low dew point.

Furthermore, when the operation holes are of a double type, the air inside the environmental test chamber is less likely to leak, and the outside air is less likely to flow into the environmental test chamber.

Furthermore, when the operation hole is provided with a defrosting means, water droplets do not condense on the operation hole, so that when operating the environmental test chamber by inserting the hand, water droplets do not adhere to the hands or the test object.

When the operation hole is equipped with an ultra-low dew point air supply means, the area near the operation hole has a low dew point, so even if outside air enters the environmental test chamber through the operation hole, frost will form around the operation hole. do not.

[Brief explanation of the drawing]

1 to 8 are longitudinal cross-sectional views of each embodiment of the environmental test device according to the present invention, FIG. 9 is a vertical cross-sectional view of the environmental test device showing the prior art, and FIG. 10 is the environmental test according to the present invention. FIG. 3 is a cross-sectional view of an evaporator used in the device. 1...Casing, 2...Door, 3...Operation hole, 4...Environmental test chamber, 5...Partition plate, 6...
Evaporator, 7...Heater, 8...Blower, 9...
...Air vent, 10...Communication port, 11...Electric heater, 12...Air compressor, 13a, 13b...Refrigerant inlet, 14a, 14b...Refrigerant outlet.

Claims (1)

[Scope of Claims] 1. The interior of the environmental test chamber covered with a casing is divided into an environmental test chamber and a constant temperature air generation chamber by a partition plate, and an evaporator of a refrigeration cycle, an air heating means, and an air In an environmental test device placed in series with a circulation blower, it consists of an operation hole provided in a part of the casing to suppress the inflow of outside air, and a communication port placed near the air inlet of the evaporator to introduce outside air. An environmental test device characterized in that an opening is formed by a hole provided on the air inlet side of an evaporator of a casing and a duct having a U-shaped cross section communicating with the hole, and one end of the duct communicates with the outside. . 2. The environmental test device according to claim 1, wherein the operating hole provided in a part of the casing and communicating between the outside and the inside is configured to be double or double. 3. The environmental test device according to claim 1 or 2, wherein the operation hole is provided with a defrosting means. 4. The environmental testing device according to any one of claims 1 to 3, characterized in that the operating hole is provided with ultra-low dew point air supply means. 5. The environmental test device according to claim 3 or 4, wherein the ultra-low dew point air supply means provided in the operation hole is an air compressor. 6. The environmental testing device according to any one of claims 1 to 5, characterized in that an ultra-low dew point air supply means is attached to the vent hole for introducing outside air.