JPH0242427U - - Google Patents

Info

Publication number
JPH0242427U
JPH0242427U JP12197988U JP12197988U JPH0242427U JP H0242427 U JPH0242427 U JP H0242427U JP 12197988 U JP12197988 U JP 12197988U JP 12197988 U JP12197988 U JP 12197988U JP H0242427 U JPH0242427 U JP H0242427U
Authority
JP
Japan
Prior art keywords
cathode
side magnet
high frequency
forms
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12197988U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0614478Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP12197988U priority Critical patent/JPH0614478Y2/ja
Publication of JPH0242427U publication Critical patent/JPH0242427U/ja
Application granted granted Critical
Publication of JPH0614478Y2 publication Critical patent/JPH0614478Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP12197988U 1988-09-16 1988-09-16 薄膜形成装置 Expired - Lifetime JPH0614478Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12197988U JPH0614478Y2 (ja) 1988-09-16 1988-09-16 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12197988U JPH0614478Y2 (ja) 1988-09-16 1988-09-16 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPH0242427U true JPH0242427U (US07166745-20070123-C00016.png) 1990-03-23
JPH0614478Y2 JPH0614478Y2 (ja) 1994-04-13

Family

ID=31369485

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12197988U Expired - Lifetime JPH0614478Y2 (ja) 1988-09-16 1988-09-16 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPH0614478Y2 (US07166745-20070123-C00016.png)

Also Published As

Publication number Publication date
JPH0614478Y2 (ja) 1994-04-13

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