JPH024239U - - Google Patents
Info
- Publication number
- JPH024239U JPH024239U JP8268988U JP8268988U JPH024239U JP H024239 U JPH024239 U JP H024239U JP 8268988 U JP8268988 U JP 8268988U JP 8268988 U JP8268988 U JP 8268988U JP H024239 U JPH024239 U JP H024239U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- end point
- data
- dry etching
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 5
- 238000005530 etching Methods 0.000 claims description 5
- 238000001312 dry etching Methods 0.000 claims description 4
- 238000004088 simulation Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8268988U JPH024239U (bg) | 1988-06-22 | 1988-06-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8268988U JPH024239U (bg) | 1988-06-22 | 1988-06-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024239U true JPH024239U (bg) | 1990-01-11 |
Family
ID=31307432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8268988U Pending JPH024239U (bg) | 1988-06-22 | 1988-06-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024239U (bg) |
-
1988
- 1988-06-22 JP JP8268988U patent/JPH024239U/ja active Pending
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