JPH0242340A - Instrument for measuring trace impurity in gas - Google Patents
Instrument for measuring trace impurity in gasInfo
- Publication number
- JPH0242340A JPH0242340A JP19201688A JP19201688A JPH0242340A JP H0242340 A JPH0242340 A JP H0242340A JP 19201688 A JP19201688 A JP 19201688A JP 19201688 A JP19201688 A JP 19201688A JP H0242340 A JPH0242340 A JP H0242340A
- Authority
- JP
- Japan
- Prior art keywords
- photodiode
- light
- discharge electrode
- gas
- discharge
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012535 impurity Substances 0.000 title claims abstract description 16
- 230000000087 stabilizing effect Effects 0.000 claims description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 12
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 6
- 239000007789 gas Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000004817 gas chromatography Methods 0.000 description 3
- 230000003595 spectral effect Effects 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 238000012544 monitoring process Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- MGWGWNFMUOTEHG-UHFFFAOYSA-N 4-(3,5-dimethylphenyl)-1,3-thiazol-2-amine Chemical compound CC1=CC(C)=CC(C=2N=C(N)SC=2)=C1 MGWGWNFMUOTEHG-UHFFFAOYSA-N 0.000 description 1
- 229910002089 NOx Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005518 electrochemistry Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000004868 gas analysis Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- JCXJVPUVTGWSNB-UHFFFAOYSA-N nitrogen dioxide Inorganic materials O=[N]=O JCXJVPUVTGWSNB-UHFFFAOYSA-N 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 108091008695 photoreceptors Proteins 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
- G01N21/69—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence specially adapted for fluids, e.g. molten metal
Landscapes
- Health & Medical Sciences (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はガス中微量不純物測定装置に関するものである
。DETAILED DESCRIPTION OF THE INVENTION (Industrial Application Field) The present invention relates to a device for measuring trace impurities in gas.
（従来の技術）
半導体、液化ガス、超伝導体等の製造の分野では、高純
度のガスを必要としている。高純度ガスを用いるような
製造プラントでは、ガス中の不純物濃度を測定し監視す
ることが必要であるが、般的な測定分析方法としてはガ
スクロマトグラフィが用いられている。(Prior Art) High purity gas is required in the fields of manufacturing semiconductors, liquefied gases, superconductors, and the like. In manufacturing plants that use high-purity gases, it is necessary to measure and monitor the impurity concentration in the gas, and gas chromatography is used as a general measurement and analysis method.
（発明が解決しようとする問題点）
ガスクロマトグラフィは高価である上、分析に時間がか
かり、プラント中のモニター用としては極めて使い難い
欠点がある。(Problems to be Solved by the Invention) Gas chromatography is expensive and requires time for analysis, making it extremely difficult to use for monitoring in plants.
酸素、水素のような化学反応を起し易いガスついては電
気化学を応用した計器があるが、窒素、ネオン、アルゴ
ン、二酸化窒素のような化学反応を起こし難いガスにつ
いては計測できない欠点がある。There are meters that apply electrochemistry to measure gases that easily cause chemical reactions, such as oxygen and hydrogen, but they have the disadvantage that they cannot measure gases that are difficult to cause chemical reactions, such as nitrogen, neon, argon, and nitrogen dioxide.
質量分析器も有用とされているが、高価である上、１
ｐｐｍのような微量の不純物の検出には不適当な欠点が
ある。Mass spectrometers are also considered useful, but they are expensive and
It has disadvantages that make it unsuitable for detecting trace amounts of impurities such as ppm.
光を用いた検出器も外国に例があるが、分光器及び光電
子増倍管を用いて高価である上、構造が複雑なものに限
られている。There are also examples of detectors using light in other countries, but they are expensive because they use spectrometers and photomultiplier tubes, and they are limited to those with complex structures.
さらに、極低温装置のように１０ｐｐｍ以下の不純物濃
度で運転することが要求されるプラントの場合、運転に
先立ちガス分析に多大な労力と時間をかけている。また
、運転中に、純度の低下を来した場合、インターロック
をかけることも窒素のような不活性な不純物については
従来技術では極めて難しい。Furthermore, in the case of a plant that is required to operate at an impurity concentration of 10 ppm or less, such as a cryogenic device, a great deal of effort and time is spent on gas analysis prior to operation. Furthermore, in the case of a drop in purity during operation, it is extremely difficult to apply an interlock for inert impurities such as nitrogen using conventional techniques.
（問題点を解決するための手段）
本発明の目的の一つは、空気の主成分であり最も混入し
易い不純物である窒素を的確に捉えることができ、直接
微量不純物濃度を表示できる装置を、安価に製作するこ
とによって、プラントの運転を効率的なものとするにあ
る。(Means for Solving the Problems) One of the objects of the present invention is to provide a device that can accurately capture nitrogen, which is the main component of air and the impurity that is most easily mixed in, and can directly display trace impurity concentrations. The purpose is to make the plant operation more efficient by manufacturing it at a lower cost.
本発明のガス中微量不純物測定装置は、不純物を含有す
る試料中に放電する放電電極と、放電電極に高圧電流を
供給する高圧電源と、放電電極と高圧電源との間に介在
して放電電極に供給する高圧電流を安定化する安定化抵
抗と、放電光中の特定波長の光を選択的に透過する干渉
波フィルターと、選択的に透過した特定波長の光を受光
するフォトダイオードと、フォトダイオードの出力を増
幅して信号出力とする増幅器とを有することを特徴とす
る。The device for measuring trace impurities in gas of the present invention includes a discharge electrode that discharges into a sample containing impurities, a high-voltage power supply that supplies a high-voltage current to the discharge electrode, and a discharge electrode that is interposed between the discharge electrode and the high-voltage power supply. a stabilizing resistor that stabilizes the high-voltage current supplied to the discharge light, an interference wave filter that selectively transmits light of a specific wavelength in the discharge light, a photodiode that receives the selectively transmitted light of a specific wavelength, and a photodiode that receives the selectively transmitted light of a specific wavelength. It is characterized by having an amplifier that amplifies the output of the diode and outputs a signal.
放電電極は例えばタングステン電極である。The discharge electrode is, for example, a tungsten electrode.
本発明はＮ２の４２７．８ ｎｍのように、他から離れ
て低濃度域で強力なスペクトル線が存在することを見出
し、このようなスペクトルを用いる。その結果、回折格
子のような分光器も用いずとも、多層膜干渉フィルター
のような簡便安価なものを用いて特定のスペクトル線を
取り出せる。The present invention has discovered that strong spectral lines such as 427.8 nm of N2 exist in a low concentration range apart from others, and uses such a spectrum. As a result, a specific spectral line can be extracted using a simple and inexpensive device such as a multilayer interference filter, without using a spectroscope such as a diffraction grating.
（作用）
気中放電により生ずる光は主成分ガスのスペクトル及び
不純物のスペクトルを含んでいるが、その発光強度は単
純に成分比とはならない。分子衝突による励起メカニズ
ムが異なる為、あるスペクトル線（ＮＺの場合４２７．
８ ｎｍに顕著）についてはごく微量の分子でも強い強
度を持ち、一定収上の濃度となってもそれ以上強くなら
ない。このことを利用してこの波長の光をフィルターで
取り出せば、フォトダイオードを用いて電気信号に変換
することができる。電気信号の出力は、微量測定の領域
で不純物濃度に比例している。(Function) Although the light generated by the air discharge includes the spectrum of the main component gas and the spectrum of impurities, the emission intensity does not simply correspond to the component ratio. Because the excitation mechanism due to molecular collisions is different, a certain spectral line (427.
8 nm) has a strong intensity even with a very small amount of molecules, and does not become any stronger even when the concentration reaches a certain level. Taking advantage of this fact, if light of this wavelength is extracted with a filter, it can be converted into an electrical signal using a photodiode. The output of the electrical signal is proportional to the impurity concentration in the region of trace measurement.
本発明装置は十分感度がある為、光電子増倍管のように
高価で破損し易い受光器を使わずとも、フォトダイオー
ドを実用に使用できる。Since the device of the present invention has sufficient sensitivity, a photodiode can be used practically without using an expensive and easily damaged photoreceptor such as a photomultiplier tube.
（実施例） 以下、本発明を図面につきさらに詳細に説明する。(Example) In the following, the invention will be explained in more detail with reference to the drawings.
第１図に例示する本発明装置において、タングステン電
極１は高圧電源２から安定化抵抗３を介し安定した電流
を供給され、Ｎ２濃度０．１〜５０ｐｐｍのＨｅガス中
で放電を起した。放電光の中でＮ２の４２７．８ ｎｍ
の波長の光だけを干渉波フィルター４を通して取り出し
、フォトダイオード５で受光した。In the apparatus of the present invention illustrated in FIG. 1, a stable current was supplied to the tungsten electrode 1 from a high-voltage power source 2 through a stabilizing resistor 3, and a discharge was caused in He gas with an N2 concentration of 0.1 to 50 ppm. 427.8 nm of N2 in discharge light
Only the light having a wavelength of is extracted through the interference wave filter 4 and received by the photodiode 5.
フォトダイオード５の出力を増幅器６で増幅して信号出
力とし、Ｎ２濃度計で直接読取り得るように表示した。The output of the photodiode 5 was amplified by an amplifier 6 to produce a signal output, which was displayed so as to be directly readable with an N2 densitometer.
（発明の効果）
かくて本発明によれば、従来窒素等の不活性ガスについ
ては不可能とされていたＯ１１〜５０ｐｐｍのような微
量領域の不純物濃度が直接に電気信号に比例した形で取
り出せ、しかも連続して監視を続けることができる。(Effects of the Invention) Thus, according to the present invention, the impurity concentration in the trace range of O11 to 50 ppm, which was conventionally considered impossible for inert gases such as nitrogen, can be directly extracted in a form proportional to the electric signal. , and can continue monitoring continuously.
本発明装置は、従来のガスクロマトグラフィ等を用いて
一連の操作の結果を分析して濃度を算出する方法に比べ
て、遥かに簡単であり、プラントのインターロック及び
制御に用いることも可能である。The device of the present invention is much simpler than the conventional method of calculating concentration by analyzing the results of a series of operations using gas chromatography, etc., and can also be used for plant interlock and control. .
構成が簡単で可動部分が無い為、メンテナンスも容易で
製作が極めて簡単且つ安価なので、プラント中に多数配
置して使うことができる。Since the structure is simple and there are no moving parts, maintenance is easy, and manufacturing is extremely simple and inexpensive, so a large number of them can be placed and used in a plant.
本発明装置は、例えば微量窒素濃度計、微量水分計、高
感度ＮＯｘ測定器等に極めて有用である。The device of the present invention is extremely useful, for example, as a trace nitrogen concentration meter, a trace moisture meter, a high-sensitivity NOx measuring device, and the like.
【図面の簡単な説明】
第１図は本発明装置の一例を示す線図的縦断面図である
。BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagrammatic longitudinal sectional view showing an example of the apparatus of the present invention.
Claims (1)
電電極に高圧電流を供給する高圧電源と、放電電極と高
圧電源との間に介在して放電電極に供給する高圧電流を
安定化する安定化抵抗と、放電光中の特定波長の光を選
択的に透過する干渉波フィルターと、選択的に透過した
特定波長の光を受光するフォトダイオードと、フォトダ
イオードの出力を増幅して信号出力とする増幅器とを有
することを特徴とするガス中微量不純物測定装置。1. A discharge electrode that discharges into a sample containing impurities, a high-voltage power supply that supplies high-voltage current to the discharge electrode, and a device that is interposed between the discharge electrode and the high-voltage power supply to stabilize the high-voltage current supplied to the discharge electrode. A stabilizing resistor, an interference wave filter that selectively transmits light of a specific wavelength in the discharge light, a photodiode that receives the selectively transmitted light of a specific wavelength, and a signal output by amplifying the output of the photodiode. 1. An apparatus for measuring trace impurities in a gas, comprising an amplifier.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63192016A JP2507886B2 (en) | 1988-08-02 | 1988-08-02 | Instrument for measuring trace impurities in gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63192016A JP2507886B2 (en) | 1988-08-02 | 1988-08-02 | Instrument for measuring trace impurities in gas |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0242340A true JPH0242340A (en) | 1990-02-13 |
| JP2507886B2 JP2507886B2 (en) | 1996-06-19 |
Family
ID=16284200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63192016A Expired - Lifetime JP2507886B2 (en) | 1988-08-02 | 1988-08-02 | Instrument for measuring trace impurities in gas |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2507886B2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01311254A (en) * | 1988-03-31 | 1989-12-15 | Gebr Sulzer Ag | Apparatus for measuring impurities in gas, electrode used in the same and use of the apparatus |
-
1988
- 1988-08-02 JP JP63192016A patent/JP2507886B2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01311254A (en) * | 1988-03-31 | 1989-12-15 | Gebr Sulzer Ag | Apparatus for measuring impurities in gas, electrode used in the same and use of the apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2507886B2 (en) | 1996-06-19 |
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