JPH0237342U - - Google Patents

Info

Publication number

JPH0237342U

JPH0237342U JP11576988U JP11576988U JPH0237342U JP H0237342 U JPH0237342 U JP H0237342U JP 11576988 U JP11576988 U JP 11576988U JP 11576988 U JP11576988 U JP 11576988U JP H0237342 U JPH0237342 U JP H0237342U

Authority

JP

Japan

Prior art keywords

silicon chip

measurement fluid

orifice

substrate

support base

Prior art date

1988-09-02

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005259 measurement Methods 0.000 claims description 9
• 239000012530 fluid Substances 0.000 claims description 6
• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
• 229910052710 silicon Inorganic materials 0.000 claims description 5
• 239000010703 silicon Substances 0.000 claims description 5
• 239000000758 substrate Substances 0.000 claims description 4
• 238000011144 upstream manufacturing Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000007788 liquid Substances 0.000 description 1
• 210000002445 nipple Anatomy 0.000 description 1

Cited By (1)