JPH0236603U - - Google Patents

Info

Publication number
JPH0236603U
JPH0236603U JP11497888U JP11497888U JPH0236603U JP H0236603 U JPH0236603 U JP H0236603U JP 11497888 U JP11497888 U JP 11497888U JP 11497888 U JP11497888 U JP 11497888U JP H0236603 U JPH0236603 U JP H0236603U
Authority
JP
Japan
Prior art keywords
displacement
minute
thin portion
actuator according
output part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11497888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11497888U priority Critical patent/JPH0236603U/ja
Publication of JPH0236603U publication Critical patent/JPH0236603U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Fluid-Pressure Circuits (AREA)
JP11497888U 1988-09-02 1988-09-02 Pending JPH0236603U (US06373033-20020416-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11497888U JPH0236603U (US06373033-20020416-M00002.png) 1988-09-02 1988-09-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11497888U JPH0236603U (US06373033-20020416-M00002.png) 1988-09-02 1988-09-02

Publications (1)

Publication Number Publication Date
JPH0236603U true JPH0236603U (US06373033-20020416-M00002.png) 1990-03-09

Family

ID=31356216

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11497888U Pending JPH0236603U (US06373033-20020416-M00002.png) 1988-09-02 1988-09-02

Country Status (1)

Country Link
JP (1) JPH0236603U (US06373033-20020416-M00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010196844A (ja) * 2009-02-26 2010-09-09 Psc Kk 微小変位出力装置
JP2014199106A (ja) * 2013-03-29 2014-10-23 住友重機械工業株式会社 微動アクチュエータ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197806A (ja) * 1984-12-10 1986-09-02 ベルトルト　ダイムラ− 長さを弾性的に可変とした伸長シリンダ−
JPS61252906A (ja) * 1985-04-30 1986-11-10 Canon Inc ダイヤフラム構造体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61197806A (ja) * 1984-12-10 1986-09-02 ベルトルト　ダイムラ− 長さを弾性的に可変とした伸長シリンダ−
JPS61252906A (ja) * 1985-04-30 1986-11-10 Canon Inc ダイヤフラム構造体

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010196844A (ja) * 2009-02-26 2010-09-09 Psc Kk 微小変位出力装置
JP2014199106A (ja) * 2013-03-29 2014-10-23 住友重機械工業株式会社 微動アクチュエータ

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