JPH02363U - - Google Patents
Info
- Publication number
- JPH02363U JPH02363U JP7533488U JP7533488U JPH02363U JP H02363 U JPH02363 U JP H02363U JP 7533488 U JP7533488 U JP 7533488U JP 7533488 U JP7533488 U JP 7533488U JP H02363 U JPH02363 U JP H02363U
- Authority
- JP
- Japan
- Prior art keywords
- reactor
- buffer
- gas phase
- phase reactor
- slope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000007789 gas Substances 0.000 claims description 4
- 239000012495 reaction gas Substances 0.000 claims description 2
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 claims 1
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7533488U JPH02363U (cs) | 1988-06-08 | 1988-06-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7533488U JPH02363U (cs) | 1988-06-08 | 1988-06-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH02363U true JPH02363U (cs) | 1990-01-05 |
Family
ID=31300405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7533488U Pending JPH02363U (cs) | 1988-06-08 | 1988-06-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH02363U (cs) |
-
1988
- 1988-06-08 JP JP7533488U patent/JPH02363U/ja active Pending