JPS6170929U - - Google Patents
Info
- Publication number
- JPS6170929U JPS6170929U JP15677384U JP15677384U JPS6170929U JP S6170929 U JPS6170929 U JP S6170929U JP 15677384 U JP15677384 U JP 15677384U JP 15677384 U JP15677384 U JP 15677384U JP S6170929 U JPS6170929 U JP S6170929U
- Authority
- JP
- Japan
- Prior art keywords
- gas
- semiconductor wafer
- supply head
- gas supply
- inclination
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677384U JPS6170929U (cs) | 1984-10-16 | 1984-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15677384U JPS6170929U (cs) | 1984-10-16 | 1984-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6170929U true JPS6170929U (cs) | 1986-05-15 |
Family
ID=30714779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15677384U Pending JPS6170929U (cs) | 1984-10-16 | 1984-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6170929U (cs) |
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1984
- 1984-10-16 JP JP15677384U patent/JPS6170929U/ja active Pending