JPH0235984U - - Google Patents
Info
- Publication number
- JPH0235984U JPH0235984U JP11125188U JP11125188U JPH0235984U JP H0235984 U JPH0235984 U JP H0235984U JP 11125188 U JP11125188 U JP 11125188U JP 11125188 U JP11125188 U JP 11125188U JP H0235984 U JPH0235984 U JP H0235984U
- Authority
- JP
- Japan
- Prior art keywords
- cycle
- cryopump
- refrigerator
- buttful
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005057 refrigeration Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11125188U JPH0544548Y2 (it) | 1988-08-26 | 1988-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11125188U JPH0544548Y2 (it) | 1988-08-26 | 1988-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0235984U true JPH0235984U (it) | 1990-03-08 |
| JPH0544548Y2 JPH0544548Y2 (it) | 1993-11-11 |
Family
ID=31349141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11125188U Expired - Lifetime JPH0544548Y2 (it) | 1988-08-26 | 1988-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544548Y2 (it) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021503577A (ja) * | 2017-11-17 | 2021-02-12 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | 強化された前面アレイを備えるクライオポンプ |
-
1988
- 1988-08-26 JP JP11125188U patent/JPH0544548Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021503577A (ja) * | 2017-11-17 | 2021-02-12 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | 強化された前面アレイを備えるクライオポンプ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0544548Y2 (it) | 1993-11-11 |