JPH0235984U - - Google Patents
Info
- Publication number
- JPH0235984U JPH0235984U JP11125188U JP11125188U JPH0235984U JP H0235984 U JPH0235984 U JP H0235984U JP 11125188 U JP11125188 U JP 11125188U JP 11125188 U JP11125188 U JP 11125188U JP H0235984 U JPH0235984 U JP H0235984U
- Authority
- JP
- Japan
- Prior art keywords
- cycle
- cryopump
- refrigerator
- buttful
- attached
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005057 refrigeration Methods 0.000 claims 2
- 230000007423 decrease Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案クライオポンプの第１実施例に
おけるバツフル部分の側面図、第２図は第１図の
平面図、第３図は第２実施例におけるシールド開
口部近傍の側断面図、第４図は第３図のＡ−Ａ断
面図、第５図は他の実施例における第３図と同様
な図面、第６図は従来のクライオポンプの全体側
断面図、第７図は第６図のクライオポンプのバツ
フル部分の側面図、第８図は第７図の平面図、第
９図はバツフルに入射するガス、水蒸気がバツフ
ル面に与えるエネルギ量を示す図、第１０図はシ
ールド内壁に入射するガス、水蒸気が内壁に与え
るエネルギ量を示す図である。
９……シールド、１８……真空空間部、２１…
…バツフル、２２……支持部、２４……フイン状
板。
Fig. 1 is a side view of the buff-full portion in the first embodiment of the cryopump of the present invention, Fig. 2 is a plan view of Fig. 1, and Fig. 3 is a side sectional view near the shield opening in the second embodiment. 4 is a sectional view taken along the line AA in FIG. 3, FIG. 5 is a drawing similar to FIG. 3 in another embodiment, FIG. 6 is an overall side sectional view of a conventional cryopump, and FIG. Fig. 8 is a plan view of Fig. 7, Fig. 9 is a diagram showing the amount of energy that gas and water vapor entering the buffle give to the buffal surface, and Fig. 10 is the inner wall of the shield. FIG. 3 is a diagram showing the amount of energy given to the inner wall by gas and water vapor incident on the inner wall. 9... Shield, 18... Vacuum space section, 21...
. . . Full, 22 . . . Support portion, 24 . . . Fin-like plate.
Claims (1)
ホンサイクル、ソルベイサイクル等の冷凍サイク
ルを使用した冷凍機を寒冷発生源とするクライオ
ポンプにおいて、前記冷凍機の第一段ヒートステ
ーシヨンに取付けられたシールドの開口部に設け
られるバツフルを上方に向つて漸次小径となる環
状の径の異なる複数のバツフル部材を同心状に配
設して構成すると共に、前記バツフルの支持部材
をバツフルの上部に熱的に結合してバツフルを装
着したことを特徴とするクライオポンプ。 ２ スターリングサイクル、ギフオード・マクマ
ホンサイクル、ソルベイサイクル等の冷凍サイク
ルを使用した冷凍機を寒冷発生源とするクライオ
ポンプにおいて、前記冷凍機の第一段ヒートステ
ーシヨンに取付けられたシールドの開口部付近の
内面に、軸方向もしくは円周方向に複数個のフイ
ン状部材を設置したことを特徴とするクライオポ
ンプ。[Claims for Utility Model Registration] 1. In a cryopump whose cold generation source is a refrigerator using a refrigeration cycle such as a Stirling cycle, a Gifford-McMahon cycle, or a Solvay cycle, the cryopump is attached to the first stage heat station of the refrigerator. A plurality of annular buttful members having different diameters are concentrically disposed so that the diameter gradually decreases upward, and a support member for the buttful is heated to the upper part of the buttful. A cryopump that is characterized by being attached to a double-sided pump. 2 In a cryopump whose cold generation source is a refrigerator using a refrigeration cycle such as a Stirling cycle, Gifford-McMahon cycle, Solvay cycle, etc., the inner surface near the opening of the shield attached to the first stage heat station of the refrigerator. A cryopump characterized in that a plurality of fin-like members are installed in the axial direction or the circumferential direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11125188U JPH0544548Y2 (en) | 1988-08-26 | 1988-08-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11125188U JPH0544548Y2 (en) | 1988-08-26 | 1988-08-26 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0235984U true JPH0235984U (en) | 1990-03-08 |
| JPH0544548Y2 JPH0544548Y2 (en) | 1993-11-11 |
Family
ID=31349141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11125188U Expired - Lifetime JPH0544548Y2 (en) | 1988-08-26 | 1988-08-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0544548Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021503577A (en) * | 2017-11-17 | 2021-02-12 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | Cryopump with reinforced front array |
-
1988
- 1988-08-26 JP JP11125188U patent/JPH0544548Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2021503577A (en) * | 2017-11-17 | 2021-02-12 | エドワーズ バキューム リミテッド ライアビリティ カンパニー | Cryopump with reinforced front array |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0544548Y2 (en) | 1993-11-11 |
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