JPH0235984U - - Google Patents

Info

Publication number
JPH0235984U
JPH0235984U JP11125188U JP11125188U JPH0235984U JP H0235984 U JPH0235984 U JP H0235984U JP 11125188 U JP11125188 U JP 11125188U JP 11125188 U JP11125188 U JP 11125188U JP H0235984 U JPH0235984 U JP H0235984U
Authority
JP
Japan
Prior art keywords
cycle
cryopump
refrigerator
buttful
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11125188U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0544548Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11125188U priority Critical patent/JPH0544548Y2/ja
Publication of JPH0235984U publication Critical patent/JPH0235984U/ja
Application granted granted Critical
Publication of JPH0544548Y2 publication Critical patent/JPH0544548Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP11125188U 1988-08-26 1988-08-26 Expired - Lifetime JPH0544548Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11125188U JPH0544548Y2 (enrdf_load_stackoverflow) 1988-08-26 1988-08-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11125188U JPH0544548Y2 (enrdf_load_stackoverflow) 1988-08-26 1988-08-26

Publications (2)

Publication Number Publication Date
JPH0235984U true JPH0235984U (enrdf_load_stackoverflow) 1990-03-08
JPH0544548Y2 JPH0544548Y2 (enrdf_load_stackoverflow) 1993-11-11

Family

ID=31349141

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11125188U Expired - Lifetime JPH0544548Y2 (enrdf_load_stackoverflow) 1988-08-26 1988-08-26

Country Status (1)

Country Link
JP (1) JPH0544548Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021503577A (ja) * 2017-11-17 2021-02-12 エドワーズ バキューム リミテッド ライアビリティ カンパニー 強化された前面アレイを備えるクライオポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2021503577A (ja) * 2017-11-17 2021-02-12 エドワーズ バキューム リミテッド ライアビリティ カンパニー 強化された前面アレイを備えるクライオポンプ

Also Published As

Publication number Publication date
JPH0544548Y2 (enrdf_load_stackoverflow) 1993-11-11

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