JPH0235447U - - Google Patents
Info
- Publication number
- JPH0235447U JPH0235447U JP11384888U JP11384888U JPH0235447U JP H0235447 U JPH0235447 U JP H0235447U JP 11384888 U JP11384888 U JP 11384888U JP 11384888 U JP11384888 U JP 11384888U JP H0235447 U JPH0235447 U JP H0235447U
- Authority
- JP
- Japan
- Prior art keywords
- drive section
- substrate
- robot
- seal
- processing apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005192 partition Methods 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims description 3
- 238000004381 surface treatment Methods 0.000 claims description 2
- 230000007797 corrosion Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 claims 1
Description
第１図は本考案に係る帯状シール装置の要部斜
視図、第２図はその縦断側面図、第３図は帯状シ
ール装置を備える基板処理装置の斜視図、第４図
は従来例を示す正面図、第５図はその平面図であ
る。
１……基板、２……表面処理部、３……走行駆
動部、４……基板搬送ロボツト、５……ロボツト
アーム、８……走行基台、１０……隔壁、１１…
…走行用長孔、１２……帯状シール、１４……ガ
イドロボツト、Ｒ……迂回路。
Fig. 1 is a perspective view of the main parts of a band-shaped sealing device according to the present invention, Fig. 2 is a vertical side view thereof, Fig. 3 is a perspective view of a substrate processing apparatus equipped with the band-shaped sealing device, and Fig. 4 shows a conventional example. The front view and FIG. 5 are its plan views. DESCRIPTION OF SYMBOLS 1...Substrate, 2...Surface treatment section, 3...Traveling drive unit, 4...Substrate transfer robot, 5...Robot arm, 8...Traveling base, 10...Partition wall, 11...
...Long hole for running, 12...Band-shaped seal, 14...Guide robot, R...Detour.
Claims (1)
動部とを前後に配置して隔壁で仕切り、隔壁にロ
ボツトアームの走行用長孔を形成し、走行用長孔
を駆動部側より耐食性帯状シールで閉止するよう
に構成した基板処理装置の帯状シール装置におい
て、 帯状シールの両端を固定するとともに、当該ロ
ボツトの駆動部側走行基台上に複数のガイドロー
ラを配置して帯状シールの迂回路を後方へ凹ませ
て形成したことを特徴とする基板処理装置の帯状
シール装置。[Scope of Claim for Utility Model Registration] The surface treatment section of the substrate and the traveling drive section of the substrate transfer robot are arranged in front and behind each other and are separated by a partition wall, and a long hole for running the robot arm is formed in the partition wall. In a strip sealing device of a substrate processing apparatus configured to be closed with a corrosion-resistant strip seal from the drive section side, both ends of the strip seal are fixed, and a plurality of guide rollers are arranged on a traveling base on the drive section side of the robot. A belt-shaped seal device for a substrate processing apparatus, characterized in that a detour of the belt-shaped seal is recessed rearward.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11384888U JPH0235447U (en) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11384888U JPH0235447U (en) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235447U true JPH0235447U (en) | 1990-03-07 |
Family
ID=31354055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11384888U Pending JPH0235447U (en) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235447U (en) |
-
1988
- 1988-08-29 JP JP11384888U patent/JPH0235447U/ja active Pending
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