JPH0235437U - - Google Patents
Info
- Publication number
- JPH0235437U JPH0235437U JP11397388U JP11397388U JPH0235437U JP H0235437 U JPH0235437 U JP H0235437U JP 11397388 U JP11397388 U JP 11397388U JP 11397388 U JP11397388 U JP 11397388U JP H0235437 U JPH0235437 U JP H0235437U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- substrate
- processed
- electric field
- field uniformity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397388U JPH0235437U (enExample) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11397388U JPH0235437U (enExample) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0235437U true JPH0235437U (enExample) | 1990-03-07 |
Family
ID=31354297
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11397388U Pending JPH0235437U (enExample) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0235437U (enExample) |
-
1988
- 1988-08-29 JP JP11397388U patent/JPH0235437U/ja active Pending
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