JPH0235097Y2 - - Google Patents

Info

Publication number
JPH0235097Y2
JPH0235097Y2 JP16810185U JP16810185U JPH0235097Y2 JP H0235097 Y2 JPH0235097 Y2 JP H0235097Y2 JP 16810185 U JP16810185 U JP 16810185U JP 16810185 U JP16810185 U JP 16810185U JP H0235097 Y2 JPH0235097 Y2 JP H0235097Y2
Authority
JP
Japan
Prior art keywords
switching
solenoid
port
vacuum
valve member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16810185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6277377U (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16810185U priority Critical patent/JPH0235097Y2/ja
Publication of JPS6277377U publication Critical patent/JPS6277377U/ja
Application granted granted Critical
Publication of JPH0235097Y2 publication Critical patent/JPH0235097Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Magnetically Actuated Valves (AREA)
JP16810185U 1985-10-31 1985-10-31 Expired JPH0235097Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16810185U JPH0235097Y2 (de) 1985-10-31 1985-10-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16810185U JPH0235097Y2 (de) 1985-10-31 1985-10-31

Publications (2)

Publication Number Publication Date
JPS6277377U JPS6277377U (de) 1987-05-18
JPH0235097Y2 true JPH0235097Y2 (de) 1990-09-21

Family

ID=31100663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16810185U Expired JPH0235097Y2 (de) 1985-10-31 1985-10-31

Country Status (1)

Country Link
JP (1) JPH0235097Y2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4544529B2 (ja) * 2005-07-29 2010-09-15 セイコーインスツル株式会社 真空チャック
JP4963446B2 (ja) * 2007-07-11 2012-06-27 住友重機械工業株式会社 サーボ弁及びこれを用いたエアアクチュエータ

Also Published As

Publication number Publication date
JPS6277377U (de) 1987-05-18

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