JPH023465U - - Google Patents

Info

Publication number
JPH023465U
JPH023465U JP8075888U JP8075888U JPH023465U JP H023465 U JPH023465 U JP H023465U JP 8075888 U JP8075888 U JP 8075888U JP 8075888 U JP8075888 U JP 8075888U JP H023465 U JPH023465 U JP H023465U
Authority
JP
Japan
Prior art keywords
drive shaft
parallel link
holder
vertical movement
rotary drive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8075888U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8075888U priority Critical patent/JPH023465U/ja
Publication of JPH023465U publication Critical patent/JPH023465U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP8075888U 1988-06-18 1988-06-18 Pending JPH023465U (US07860544-20101228-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8075888U JPH023465U (US07860544-20101228-C00003.png) 1988-06-18 1988-06-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8075888U JPH023465U (US07860544-20101228-C00003.png) 1988-06-18 1988-06-18

Publications (1)

Publication Number Publication Date
JPH023465U true JPH023465U (US07860544-20101228-C00003.png) 1990-01-10

Family

ID=31305574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8075888U Pending JPH023465U (US07860544-20101228-C00003.png) 1988-06-18 1988-06-18

Country Status (1)

Country Link
JP (1) JPH023465U (US07860544-20101228-C00003.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019218621A (ja) * 2018-06-22 2019-12-26 東京エレクトロン株式会社 基板載置台及び成膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019218621A (ja) * 2018-06-22 2019-12-26 東京エレクトロン株式会社 基板載置台及び成膜装置

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