JPH0234067U - - Google Patents
Info
- Publication number
- JPH0234067U JPH0234067U JP11220088U JP11220088U JPH0234067U JP H0234067 U JPH0234067 U JP H0234067U JP 11220088 U JP11220088 U JP 11220088U JP 11220088 U JP11220088 U JP 11220088U JP H0234067 U JPH0234067 U JP H0234067U
- Authority
- JP
- Japan
- Prior art keywords
- fluorescent screen
- dose detection
- detection function
- electron
- electron dose
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 2
- 238000005375 photometry Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11220088U JPH0234067U (enExample) | 1988-08-29 | 1988-08-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11220088U JPH0234067U (enExample) | 1988-08-29 | 1988-08-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0234067U true JPH0234067U (enExample) | 1990-03-05 |
Family
ID=31350924
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11220088U Pending JPH0234067U (enExample) | 1988-08-29 | 1988-08-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0234067U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083071A (ja) * | 2007-12-25 | 2008-04-10 | Hitachi Ltd | 試料作製装置 |
-
1988
- 1988-08-29 JP JP11220088U patent/JPH0234067U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008083071A (ja) * | 2007-12-25 | 2008-04-10 | Hitachi Ltd | 試料作製装置 |
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