JPH0234067U - - Google Patents

Info

Publication number

JPH0234067U

JPH0234067U JP11220088U JP11220088U JPH0234067U JP H0234067 U JPH0234067 U JP H0234067U JP 11220088 U JP11220088 U JP 11220088U JP 11220088 U JP11220088 U JP 11220088U JP H0234067 U JPH0234067 U JP H0234067U

Authority

JP

Japan

Prior art keywords

fluorescent screen

dose detection

detection function

electron

electron dose

Prior art date

1988-08-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims 2
• 238000005375 photometry Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3
• 239000012212 insulator Substances 0.000 description 2
• 238000005259 measurement Methods 0.000 description 2
• 238000010894 electron beam technology Methods 0.000 description 1

Cited By (2)