JPH0233428U - - Google Patents
Info
- Publication number
- JPH0233428U JPH0233428U JP11122488U JP11122488U JPH0233428U JP H0233428 U JPH0233428 U JP H0233428U JP 11122488 U JP11122488 U JP 11122488U JP 11122488 U JP11122488 U JP 11122488U JP H0233428 U JPH0233428 U JP H0233428U
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- holding
- section
- guide
- semiconductor wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988111224U JP2543994Y2 (ja) | 1988-08-26 | 1988-08-26 | ウエハ保持治具 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988111224U JP2543994Y2 (ja) | 1988-08-26 | 1988-08-26 | ウエハ保持治具 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0233428U true JPH0233428U (cs) | 1990-03-02 |
JP2543994Y2 JP2543994Y2 (ja) | 1997-08-13 |
Family
ID=31349088
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988111224U Expired - Lifetime JP2543994Y2 (ja) | 1988-08-26 | 1988-08-26 | ウエハ保持治具 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2543994Y2 (cs) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010141221A (ja) * | 2008-12-15 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 酸化膜付きシリコン基板の製造方法 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52139758U (cs) * | 1976-04-16 | 1977-10-22 | ||
JPS55110035A (en) * | 1979-02-16 | 1980-08-25 | Hitachi Ltd | Jig for heat treating wafer |
-
1988
- 1988-08-26 JP JP1988111224U patent/JP2543994Y2/ja not_active Expired - Lifetime
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52139758U (cs) * | 1976-04-16 | 1977-10-22 | ||
JPS55110035A (en) * | 1979-02-16 | 1980-08-25 | Hitachi Ltd | Jig for heat treating wafer |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010141221A (ja) * | 2008-12-15 | 2010-06-24 | Shin-Etsu Chemical Co Ltd | 酸化膜付きシリコン基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2543994Y2 (ja) | 1997-08-13 |
Similar Documents
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |