JPH0233260U - - Google Patents

Info

Publication number
JPH0233260U
JPH0233260U JP11292288U JP11292288U JPH0233260U JP H0233260 U JPH0233260 U JP H0233260U JP 11292288 U JP11292288 U JP 11292288U JP 11292288 U JP11292288 U JP 11292288U JP H0233260 U JPH0233260 U JP H0233260U
Authority
JP
Japan
Prior art keywords
main pipe
flow rate
gas supply
adjusting
branched
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11292288U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11292288U priority Critical patent/JPH0233260U/ja
Publication of JPH0233260U publication Critical patent/JPH0233260U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP11292288U 1988-08-29 1988-08-29 Pending JPH0233260U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11292288U JPH0233260U (OSRAM) 1988-08-29 1988-08-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11292288U JPH0233260U (OSRAM) 1988-08-29 1988-08-29

Publications (1)

Publication Number Publication Date
JPH0233260U true JPH0233260U (OSRAM) 1990-03-01

Family

ID=31352303

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11292288U Pending JPH0233260U (OSRAM) 1988-08-29 1988-08-29

Country Status (1)

Country Link
JP (1) JPH0233260U (OSRAM)

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