JPS6293367U - - Google Patents
Info
- Publication number
- JPS6293367U JPS6293367U JP18707485U JP18707485U JPS6293367U JP S6293367 U JPS6293367 U JP S6293367U JP 18707485 U JP18707485 U JP 18707485U JP 18707485 U JP18707485 U JP 18707485U JP S6293367 U JPS6293367 U JP S6293367U
- Authority
- JP
- Japan
- Prior art keywords
- cylinder
- gas
- gas inlet
- raw material
- vapor phase
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007789 gas Substances 0.000 claims 8
- 239000007788 liquid Substances 0.000 claims 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000001947 vapour-phase growth Methods 0.000 claims 2
- 238000007664 blowing Methods 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18707485U JPH0414451Y2 (OSRAM) | 1985-12-03 | 1985-12-03 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18707485U JPH0414451Y2 (OSRAM) | 1985-12-03 | 1985-12-03 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293367U true JPS6293367U (OSRAM) | 1987-06-15 |
| JPH0414451Y2 JPH0414451Y2 (OSRAM) | 1992-03-31 |
Family
ID=31137214
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18707485U Expired JPH0414451Y2 (OSRAM) | 1985-12-03 | 1985-12-03 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414451Y2 (OSRAM) |
-
1985
- 1985-12-03 JP JP18707485U patent/JPH0414451Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0414451Y2 (OSRAM) | 1992-03-31 |
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