JPH0233259U - - Google Patents
Info
- Publication number
- JPH0233259U JPH0233259U JP10956088U JP10956088U JPH0233259U JP H0233259 U JPH0233259 U JP H0233259U JP 10956088 U JP10956088 U JP 10956088U JP 10956088 U JP10956088 U JP 10956088U JP H0233259 U JPH0233259 U JP H0233259U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- introduction pipe
- plate
- gas introduction
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims 4
- 239000012495 reaction gas Substances 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案装置の一実施例を示す説明図で
、第１図ａは全体図、第１図ｂは一部拡大図、第
２図は従来装置を示す説明図で、第２図ａは全体
図、第２図ｂは一部拡大図である。
１……真空容器、２……基板、３……基板保持
台、４……レーザ入射窓、５……ガス導入管、６
……ガス噴出口、７……オリフイス、８……バツ
フル板、８……多孔板、１０……レーザ入射窓、
１１……レーザ出射窓、１２……排気口、１６…
…チヤンバ。
Fig. 1 is an explanatory diagram showing one embodiment of the device of the present invention, Fig. 1a is an overall view, Fig. 1b is a partially enlarged view, Fig. 2 is an explanatory diagram showing a conventional device; 2a is an overall view, and FIG. 2b is a partially enlarged view. DESCRIPTION OF SYMBOLS 1... Vacuum container, 2... Substrate, 3... Substrate holding stand, 4... Laser incidence window, 5... Gas introduction tube, 6
... Gas outlet, 7 ... Orifice, 8 ... Bumpy plate, 8 ... Perforated plate, 10 ... Laser entrance window,
11... Laser emission window, 12... Exhaust port, 16...
...Chiyamba.
Claims (1)
スを噴出させる装置であつて、反応ガスを導入す
る導入管と、同ガス導入管内の噴出端近傍に取り
付けられたオリフイスと、上記ガス導入管先端部
に取り付けられたチヤンバと、同チヤンバ内であ
つて上記ガス導入管の噴出口に臨み配置されたバ
ツフル板と、同バツフル板を挾み上記ガス導入管
の噴出口と対向する上記チヤンバ壁を形成する多
孔板と、同多孔板と上記バツフル板との空間部を
挾む上記チヤンバ対向壁に設けられたレーザ入射
用窓と、同窓を介して上記チヤンバ内にレーザ光
を照射する手段とを有することを特徴とする励起
反応ガス噴出装置。 A device for ejecting an excited reaction gas for forming a thin film on a substrate, which includes an introduction pipe for introducing the reaction gas, an orifice installed near the ejection end of the gas introduction pipe, and a tip of the gas introduction pipe. a chamber attached to the chamber, a buttful plate disposed within the chamber facing the spout of the gas introduction pipe, and a chamber wall facing the spout of the gas introduction pipe with the buttfull plate in between. a perforated plate to be formed, a laser incidence window provided on a wall facing the chamber sandwiching a space between the perforated plate and the buffer plate, and means for irradiating laser light into the chamber through the window. An excited reaction gas ejection device comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10956088U JPH0233259U (en) | 1988-08-23 | 1988-08-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10956088U JPH0233259U (en) | 1988-08-23 | 1988-08-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233259U true JPH0233259U (en) | 1990-03-01 |
Family
ID=31345916
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10956088U Pending JPH0233259U (en) | 1988-08-23 | 1988-08-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233259U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018535914A (en) * | 2015-10-30 | 2018-12-06 | コーニング インコーポレイテッド | 3D-shaped glass article, method and apparatus for manufacturing the same |
-
1988
- 1988-08-23 JP JP10956088U patent/JPH0233259U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2018535914A (en) * | 2015-10-30 | 2018-12-06 | コーニング インコーポレイテッド | 3D-shaped glass article, method and apparatus for manufacturing the same |
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