JPH0233255U - - Google Patents
Info
- Publication number
- JPH0233255U JPH0233255U JP11043488U JP11043488U JPH0233255U JP H0233255 U JPH0233255 U JP H0233255U JP 11043488 U JP11043488 U JP 11043488U JP 11043488 U JP11043488 U JP 11043488U JP H0233255 U JPH0233255 U JP H0233255U
- Authority
- JP
- Japan
- Prior art keywords
- substrate mounting
- evaporation source
- mounting plate
- substrate
- mounting jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims 6
- 238000000151 deposition Methods 0.000 claims 2
- 230000008020 evaporation Effects 0.000 claims 2
- 238000001704 evaporation Methods 0.000 claims 2
- 230000008021 deposition Effects 0.000 claims 1
- 230000002441 reversible effect Effects 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11043488U JPH0233255U (me) | 1988-08-22 | 1988-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11043488U JPH0233255U (me) | 1988-08-22 | 1988-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0233255U true JPH0233255U (me) | 1990-03-01 |
Family
ID=31347590
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11043488U Pending JPH0233255U (me) | 1988-08-22 | 1988-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0233255U (me) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231318U (me) * | 1975-08-26 | 1977-03-04 |
-
1988
- 1988-08-22 JP JP11043488U patent/JPH0233255U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5231318U (me) * | 1975-08-26 | 1977-03-04 |
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