JPH0233020U - - Google Patents
Info
- Publication number
- JPH0233020U JPH0233020U JP1988110630U JP11063088U JPH0233020U JP H0233020 U JPH0233020 U JP H0233020U JP 1988110630 U JP1988110630 U JP 1988110630U JP 11063088 U JP11063088 U JP 11063088U JP H0233020 U JPH0233020 U JP H0233020U
- Authority
- JP
- Japan
- Prior art keywords
- right conical
- convex lens
- mirror
- convex
- convex mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000003287 optical effect Effects 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 3
Description
第1図は本考案に係る環状集光装置の一実施例
を示す概略的な断面図、第2図は同じく作用説明
図、第3図は同じく第1図の状態から環状焦点の
半径を変えたときの概略的な断面図、第4図ない
し第6図はレーザ加工の説明図、第7図は従来の
環状集光装置の一例を示す説明図である。
1…導光管、2…両凸レンズ、3…直円錐状凸
面鏡、3a,4a…反射面、3b…頂部、4…直
円錐台状凹面鏡、5…下端底壁、6…透光体、7
…保持部材、8…水平面(光軸と直交する平面)
、9…レーザ光、10a,10b,10c…加工
物、11…円孔、12…円盤、13…小径円盤、
14…大径環状体、15,16…環状体、F,F
2…環状焦点、F1…後側焦点、L…円柱状の平
行光束、l1…円錐状の集束光、l2…円盤状の
集束光、l3…円筒状の集束光。
FIG. 1 is a schematic cross-sectional view showing an embodiment of the annular light condensing device according to the present invention, FIG. 2 is an explanatory diagram of the same operation, and FIG. 4 to 6 are explanatory diagrams of laser processing, and FIG. 7 is an explanatory diagram showing an example of a conventional annular light condensing device. DESCRIPTION OF SYMBOLS 1...Light guide tube, 2...Biconvex lens, 3...Right conical convex mirror, 3a, 4a...Reflecting surface, 3b...Top part, 4...Right circular cone shaped concave mirror, 5...Lower end bottom wall, 6...Translucent body, 7
...Holding member, 8...Horizontal plane (plane perpendicular to the optical axis)
, 9...Laser beam, 10a, 10b, 10c...Workpiece, 11...Circular hole, 12...Disc, 13...Small diameter disc,
14... Large-diameter annular body, 15, 16... Annular body, F, F
2...Annular focus, F1...Back focus, L...Cylindrical parallel light beam, l1...Conical focused light, l2...Disc shaped focused light, l3...Cylindrical focused light.
Claims (1)
光軸上における後側焦点との間に、前記凸レンズ
からの集束光を外径側へ反射する直円錐状凸面鏡
を配し、この直円錐状凸面鏡と、前記集束光の反
射によつて形成される環状焦点との間に、前記直
円錐状凸面鏡の反射面と対向する反射面をもつ直
円錐台状凹面鏡を、前記凸レンズおよび直円錐状
凸面鏡と同芯的に配し、前記凸レンズおよび直円
錐状凸面鏡が、前記光軸の方向に一体的に移動可
能であることを特徴とする環状集光装置。 A right conical convex mirror that reflects the focused light from the convex lens to the outer diameter side is disposed between a convex lens that converges a cylindrical parallel light beam and a rear focal point on the optical axis of the convex lens, and this right conical convex mirror and an annular focus formed by reflection of the focused light, a truncated right conical concave mirror having a reflective surface opposite to the reflective surface of the right conical convex mirror is connected to the convex lens and the right conical convex mirror. An annular light condensing device characterized in that the convex lens and the right conical convex mirror are arranged concentrically and are movable integrally in the direction of the optical axis.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988110630U JPH0233020U (en) | 1988-08-25 | 1988-08-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988110630U JPH0233020U (en) | 1988-08-25 | 1988-08-25 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0233020U true JPH0233020U (en) | 1990-03-01 |
Family
ID=31347963
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988110630U Pending JPH0233020U (en) | 1988-08-25 | 1988-08-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0233020U (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012529075A (en) * | 2009-06-05 | 2012-11-15 | シーブイアイ メレス グリオト インコーポレイテッド | REFLAXICON apparatus and assembly method thereof |
JP2013008683A (en) * | 2008-11-04 | 2013-01-10 | Asml Netherlands Bv | Radiation source and lithographic apparatus |
JP2013100819A (en) * | 2003-03-19 | 2013-05-23 | Spacedesign Corp | Method and apparatus for converting or otherwise utilizing radiation pressure to generate mechanical job |
-
1988
- 1988-08-25 JP JP1988110630U patent/JPH0233020U/ja active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013100819A (en) * | 2003-03-19 | 2013-05-23 | Spacedesign Corp | Method and apparatus for converting or otherwise utilizing radiation pressure to generate mechanical job |
JP2013008683A (en) * | 2008-11-04 | 2013-01-10 | Asml Netherlands Bv | Radiation source and lithographic apparatus |
JP2012529075A (en) * | 2009-06-05 | 2012-11-15 | シーブイアイ メレス グリオト インコーポレイテッド | REFLAXICON apparatus and assembly method thereof |
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