JPH0231957U - - Google Patents

Info

Publication number
JPH0231957U
JPH0231957U JP11080088U JP11080088U JPH0231957U JP H0231957 U JPH0231957 U JP H0231957U JP 11080088 U JP11080088 U JP 11080088U JP 11080088 U JP11080088 U JP 11080088U JP H0231957 U JPH0231957 U JP H0231957U
Authority
JP
Japan
Prior art keywords
casing
diaphragm
members
sealing
peripheral edge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11080088U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11080088U priority Critical patent/JPH0231957U/ja
Publication of JPH0231957U publication Critical patent/JPH0231957U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gasket Seals (AREA)
  • Diaphragms And Bellows (AREA)
JP11080088U 1988-08-24 1988-08-24 Pending JPH0231957U (US06858664-20050222-C00036.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11080088U JPH0231957U (US06858664-20050222-C00036.png) 1988-08-24 1988-08-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11080088U JPH0231957U (US06858664-20050222-C00036.png) 1988-08-24 1988-08-24

Publications (1)

Publication Number Publication Date
JPH0231957U true JPH0231957U (US06858664-20050222-C00036.png) 1990-02-28

Family

ID=31348289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11080088U Pending JPH0231957U (US06858664-20050222-C00036.png) 1988-08-24 1988-08-24

Country Status (1)

Country Link
JP (1) JPH0231957U (US06858664-20050222-C00036.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007239918A (ja) * 2006-03-09 2007-09-20 Tokyo Electron Ltd ダイヤフラム弁および基板処理装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418212U (US06858664-20050222-C00036.png) * 1977-07-08 1979-02-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418212U (US06858664-20050222-C00036.png) * 1977-07-08 1979-02-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007239918A (ja) * 2006-03-09 2007-09-20 Tokyo Electron Ltd ダイヤフラム弁および基板処理装置
JP4705490B2 (ja) * 2006-03-09 2011-06-22 東京エレクトロン株式会社 ダイヤフラム弁および基板処理装置

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