JPH02312005A - Production of thin-film magnetic head - Google Patents
Production of thin-film magnetic headInfo
- Publication number
- JPH02312005A JPH02312005A JP13335589A JP13335589A JPH02312005A JP H02312005 A JPH02312005 A JP H02312005A JP 13335589 A JP13335589 A JP 13335589A JP 13335589 A JP13335589 A JP 13335589A JP H02312005 A JPH02312005 A JP H02312005A
- Authority
- JP
- Japan
- Prior art keywords
- film
- heat treatment
- thin
- magnetic
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 36
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000010408 film Substances 0.000 claims abstract description 53
- 238000010438 heat treatment Methods 0.000 claims abstract description 21
- 230000001681 protective effect Effects 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 6
- 235000002017 Zea mays subsp mays Nutrition 0.000 abstract description 25
- 241000482268 Zea mays subsp. mays Species 0.000 abstract description 25
- 239000004020 conductor Substances 0.000 abstract description 8
- 230000000694 effects Effects 0.000 abstract description 5
- 230000015572 biosynthetic process Effects 0.000 abstract description 3
- 230000003247 decreasing effect Effects 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 7
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- 230000005381 magnetic domain Effects 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- 238000001514 detection method Methods 0.000 description 3
- 238000009413 insulation Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 230000005389 magnetism Effects 0.000 description 2
- 238000003763 carbonization Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229920003986 novolac Polymers 0.000 description 1
- 229910000889 permalloy Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Landscapes
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、面内記録再生用または垂直記録再生用の薄膜
磁気ヘッドの製造方法に関し、薄膜磁気回路を形成した
後、保護膜形成前に、２７０〜４００℃の温度条件で熱
処理を行なうことにより、ポツプコーンノイズまたはイ
クセスノイズを劇的に減少させ得る薄１Ｉｌｌｉｉｌ気
ヘッドが得られるようにしたものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to a method for manufacturing a thin film magnetic head for in-plane recording/reproduction or perpendicular recording/reproduction. By performing heat treatment at a temperature of 270 to 400[deg.] C., a thin 1Illiil air head that can dramatically reduce popcorn noise or excess noise can be obtained.
〈従来の技術〉
薄膜磁気ヘッドとしては、面内記録再生用と垂直記録再
生用の２種類の方式のものが知られている。第１図は特
開昭５５−８４０１９号公報等により知られた面内記録
再生用薄膜磁気ヘッドの要部の斜視図、第２図は同じく
要部の断面図である。１は基体、２は下部の磁性膜、３
はアルミナ等でなるギャップ膜、４は上部の磁性膜、５
は導体コイル膜、６１〜６３はノボラック樹脂等の有機
絶縁樹脂で構成された絶縁膜、フ、８は引出リード部、
９は絶縁膜、１０はアルミナ等の保護膜である。<Prior Art> Two types of thin film magnetic heads are known: one for in-plane recording and reproduction and one for perpendicular recording and reproduction. FIG. 1 is a perspective view of a main part of a thin film magnetic head for longitudinal recording/reproduction known from Japanese Patent Application Laid-Open No. 55-84019, etc., and FIG. 2 is a sectional view of the same main part. 1 is the base, 2 is the lower magnetic film, 3
4 is a gap film made of alumina or the like, 4 is an upper magnetic film, 5 is a gap film made of alumina, etc.
is a conductor coil film, 61 to 63 are insulating films made of organic insulating resin such as novolac resin, F, 8 are drawer lead parts,
9 is an insulating film, and 10 is a protective film made of alumina or the like.
基体１は、ＡＩ、Ｏ，・ＴＩＣ等のセラミック構造体１
０１の上に＾１２０５等の絶縁ｌｌ！１０２を被着させ
た構造となっている。この種の薄膜磁気ヘッドは、ウェ
ハー上に多数の薄膜磁気ヘッド素子を形成した後に、切
断して、各薄膜磁気ヘッド素子を取世オ製造工程を経る
から、基体１はウェハーとなるのが一般的である。The base 1 is a ceramic structure 1 such as AI, O, ・TIC, etc.
Insulation like ^1205 on top of 01! It has a structure in which 102 is coated. In this type of thin-film magnetic head, a large number of thin-film magnetic head elements are formed on a wafer and then cut and each thin-film magnetic head element is removed through a manufacturing process, so the substrate 1 is generally a wafer. It is true.
磁性膜２及び磁性膜４の先端部はアルミナ等でなるギャ
ップ膜３を隔てて対向するポール部２１．４１となって
おり、このポール部２１．４１において読み書きを行な
う。The tips of the magnetic films 2 and 4 form pole parts 21.41 facing each other across the gap film 3 made of alumina or the like, and reading and writing are performed at these pole parts 21.41.
導体コイル膜５は、磁性ｌＩ！２．４及びギャップ膜３
と共に薄膜磁気回路を構成している。この導体コイル膜
５は、Ｃｕ／Ｔｉのスパッタ膜でなる下地導体膜５Ａの
上にＣｕメッキでなる導体１ｉ５Ｂを積層して設けた構
造となっており、磁性膜２．４のヨーク部２２．４２の
結合部のまわりに渦巻状に形成されている。The conductor coil film 5 has magnetic lI! 2.4 and gap film 3
Together, they constitute a thin film magnetic circuit. The conductor coil film 5 has a structure in which a conductor 1i5B made of Cu plating is laminated on a base conductor film 5A made of a Cu/Ti sputtered film, and the yoke portion 22 of the magnetic film 2.4. It is formed in a spiral shape around the joint portion of 42.
保護１ｌ１１１０は、磁性膜２．４、ギャップ膜３、導
体コイル膜５及び眉間絶縁膜６１〜６３によって構成さ
れる薄膜磁気ヘッド素子を保護するために設けられたも
ので、アルミナ等のスパッタ膜として形成される。第１
図の斜視図は、この保護膜１０を設ける前の状態を示し
ている。The protection 1l1110 is provided to protect the thin film magnetic head element composed of the magnetic film 2.4, the gap film 3, the conductor coil film 5, and the glabella insulating films 61 to 63, and is a sputtered film of alumina or the like. It is formed. 1st
The perspective view in the figure shows the state before this protective film 10 is provided.
〈発明が解決しようとする課題〉
ところが、従来の薄膜磁気ヘッドにおいては、書込信号
を与えた後に、例えば１０μｓ〜２０μＳ程度の時間を
おいて、読出動作を行なった場合、読出信号に、通常の
ホワイトノイズよりも、著しく高いピーク値を持つポツ
プコーンノイズが発生する。第３図はホワイトノイズ中
のポツプコーンノイズを示すオシロスコープ波形図で、
横軸に単位目盛当り０．５μｓで表される時間目盛を取
り、縦軸に単位目盛当り３０μＶで表される電圧目盛を
取っである。波形図の下には、書込動作と読出動作との
タイムチャートを、時間軸を合せて表示しである。書込
動作を停止した後、七〇時に読出動作を開始した場合、
七〇時を基準にして、１．５μｓ〜２．５μｓを経過し
たときに、ホワイトノイズＰｗのレベルよりも著しくピ
ーク値の高いパルス状のノイズＰＰが生じている。この
ようなノイズＰＰは当業者間ではポツプコーンノイズと
呼ばれている。<Problems to be Solved by the Invention> However, in conventional thin-film magnetic heads, when a read operation is performed after a time period of about 10 μs to 20 μS after a write signal is applied, the read signal is normally popcorn noise with a significantly higher peak value than white noise. Figure 3 is an oscilloscope waveform diagram showing popcorn noise in white noise.
The horizontal axis represents a time scale of 0.5 μs per unit division, and the vertical axis represents a voltage scale of 30 μV per unit division. Below the waveform diagram, a time chart of the write operation and read operation is displayed with the time axes aligned. If you start the read operation at 70:00 after stopping the write operation,
When 1.5 μs to 2.5 μs have passed from 70 o'clock as a reference, pulse-like noise PP whose peak value is significantly higher than the level of white noise Pw is generated. Such noise PP is called popcorn noise among those skilled in the art.
ポツプコーンノイズＰＰの発生メカニズムは、必ずしも
明確ではないけれども、書込動作状態から静止状態にＢ
る際の磁性膜２．４における磁区形成の遅れがその主要
な原因ではないかと推測される。磁性ｌ！！２．４は磁
気的異方性を有しており、書込動作時に、第４図に示す
ように、磁化困難軸方向Ｈ８を向いている磁区が、静止
状態では、第５図に示すように、磁化困難軸方向ＨＨか
ら９０度回転した磁化容易軸方向ＨＥに向きを変える。Although the mechanism by which popcorn noise PP occurs is not necessarily clear, the
It is presumed that the main cause of this is a delay in the formation of magnetic domains in the magnetic film 2.4 during the process. Magnetism! ! 2.4 has magnetic anisotropy, and during a write operation, as shown in FIG. 4, the magnetic domain that is oriented in the hard magnetization axis direction H8, in a stationary state, as shown in FIG. 5. Then, the direction is changed from the hard magnetization axis direction HH to the easy magnetization axis direction HE rotated by 90 degrees.
ポツプコーンノイズＰＰは、磁性＠２．４の磁区の方向
が磁化困難軸方向ＨＨから容易軸方向Ｈ，に回転すると
きの時間的な遅れに起因して発生するというものである
。The popcorn noise PP is generated due to a time delay when the direction of the magnetic domain of magnetism @2.4 rotates from the hard axis direction HH to the easy axis direction H.
ポツプコーンノイズＰＰは、ピーク値ｖ０−２が大きな
ものでは１００μｖ０−２にも達し、正常な読出信号と
の区別ができず、磁気ディスクドライブでは読出しエラ
ーとなる。このことは、薄膜磁気ヘッドの実用性を否定
することにもなりかねない極めて重要な問題である。し
かしながら、現状では、その有効な解決手段がない０例
えば、書込動作後、読出動作を行なうまでの時間（ポス
ト。The popcorn noise PP has a large peak value v0-2, reaching as high as 100 μv0-2, and cannot be distinguished from a normal read signal, resulting in a read error in a magnetic disk drive. This is an extremely important problem that may negate the practicality of thin film magnetic heads. However, at present, there is no effective solution to this problem.For example, the time required to perform a read operation after a write operation (post time).
ライト、リカバリ、タイム）を長くとる等の手段が考え
られるが、その適用に当っては、磁気ディスクドライブ
装置のシステム変更が不可欠であり、実際には不可能に
近い。しかも、ポスト、ライト、リカバリ、タイムを長
くとることは、高密度記録の要請に反する。Although it is possible to consider measures such as increasing write, recovery, and write times, it is necessary to change the system of the magnetic disk drive device, which is almost impossible in practice. Moreover, taking long post, write, and recovery times goes against the requirements of high-density recording.
そこで、本発明の課題は、上述する従来の問題点を解決
し、ポツプコーンノイズを劇的に減少させ得る薄膜磁気
ヘッドの製造方法を提供することである。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing a thin film magnetic head that can solve the above-mentioned conventional problems and dramatically reduce popcorn noise.
く課題を解決するための手段〉
上述する課題を解決するため、本発明は、第１図及び第
２図に示した如く、基体１上に磁性膜２．４及び導体コ
イル膜５を含む薄ｌＮｌｌ１ｉｌ気回路２〜６を形成し
た後、薄膜磁気回路２〜６を覆う保護膜１０を形成する
前に、２７０℃〜４００℃の温度条件で熱処理を行なう
ことを特徴とする。Means for Solving the Problems> In order to solve the above problems, the present invention provides a thin film including a magnetic film 2.4 and a conductive coil film 5 on a base body 1, as shown in FIGS. 1 and 2. After the magnetic circuits 2 to 6 are formed and before the protective film 10 covering the thin film magnetic circuits 2 to 6 is formed, heat treatment is performed at a temperature of 270°C to 400°C.
く作用〉
薄膜磁気回路２〜６を形成した後、薄膜磁気回路を覆う
保護膜ｌＯを形成する前に、２フＯ℃〜４００℃の温度
条件で熱処理を行なうと、その理由は明確ではないが、
ポツプコーンノイズが著しく減少することが分った。Effects> After forming the thin film magnetic circuits 2 to 6 and before forming the protective film 1O covering the thin film magnetic circuits, if heat treatment is performed at a temperature of 20°C to 400°C, the reason is not clear. but,
It was found that popcorn noise was significantly reduced.
２７０℃以下の温度では、ポツプコーンノイズ減少に顕
著な作用が得られない。４００℃以上の温度では、パー
マロイ膜として形成される磁性膜２．４の特性が劣化す
る。従りて、２７０℃〜４００℃の温度範囲が適してい
る。At temperatures below 270° C., no significant effect on popcorn noise reduction can be obtained. At temperatures above 400° C., the characteristics of the magnetic film 2.4 formed as a permalloy film deteriorate. Therefore, a temperature range of 270°C to 400°C is suitable.
保護膜１０を形成した後に熱処理すると、保護膜１０と
磁性膜４との間の熱的ストレス、界面剥離等の問題を生
じる。この問題点を回避するため、上述の熱処理は保護
ｌｌ１１０を形成する前に行なう。If heat treatment is performed after forming the protective film 10, problems such as thermal stress and interface peeling between the protective film 10 and the magnetic film 4 will occur. To avoid this problem, the heat treatment described above is performed before forming the protection 110.
熱処理時間は温度条件によって異なる。上述の温度２７
０℃〜４００℃の範囲では、１０分〜１２０分の処理時
間が通している。熱処理時間が長過ぎると、絶縁膜６１
〜６３の膜減り等の問題を生じる。１例として、３２０
℃の温度では、６０分程度の熱処理時間が適し、９０分
を越えると膜減りが進み不適当である。Heat treatment time varies depending on temperature conditions. Temperature 27 mentioned above
In the range of 0°C to 400°C, the processing time is 10 minutes to 120 minutes. If the heat treatment time is too long, the insulation film 61
Problems such as thinning of the film of ~63 occur. As an example, 320
At a temperature of .degree. C., a heat treatment time of about 60 minutes is suitable; if the heat treatment time exceeds 90 minutes, film thinning progresses, making it unsuitable.
上述の熱処理は真空度１０−２〜１０−’Ｔｏｒｒ程度
の真空中で行なうのが望ましい。真空中雰囲気処理は、
絶縁９６１〜６３の炭化防止のためである。The above-mentioned heat treatment is preferably carried out in a vacuum with a degree of vacuum of about 10-2 to 10-' Torr. Vacuum atmosphere treatment is
This is to prevent carbonization of the insulations 961-63.
〈実施例〉
第１図に示した如く、ウェハーである基板１の上に薄膜
磁気回路２〜６を形成した後、保護膜１０を設ける前の
状態で、３２０℃の温度で６０分の熱処理を行なった。<Example> As shown in FIG. 1, after forming thin film magnetic circuits 2 to 6 on a substrate 1, which is a wafer, and before providing a protective film 10, heat treatment was performed at a temperature of 320° C. for 60 minutes. I did this.
上述の熱処理は真空度１０″′３〜１０−’Ｔｏｒｒ程
度の真空中で行なった。この後、保護＠１０をスパッタ
成膜して、第２図に示すような構造を有する薄ｌｌ１ｌ
ｉｆｌ気ヘッドを得た。The above heat treatment was carried out in a vacuum at a vacuum degree of 10'''3 to 10' Torr.After this, a protective film was formed by sputtering to form a thin film having a structure as shown in FIG.
Ifl got a head.
得られた薄膜磁気ヘッドは、導体コイル膜５のターン数
が３２ターンで、抵抗値は３０Ωである。In the obtained thin film magnetic head, the number of turns of the conductive coil film 5 was 32, and the resistance value was 30Ω.
第６図は上述の磁気ヘッドの熱処理の前後におけるポツ
プコーンノイズ数をグラフ化して示す図である０図示す
るように、熱処理前に１０００個以上もあったポツプコ
ーンノイズが、熱処理後は殆ど零になっており、劇的に
減少している。第６図中、Ｑ印はポツプコーンノイズ検
出のためのノイズしきい値電圧を４０μＶＯ−ｐに設定
した場合を示し、Δ印は５０μｖｏ−ｐに設定した場合
のポツプコーンノイズ数である。ポツプコーンノイズ減
少効果は、ウェハー上の薄膜磁気ヘッドでも、ウェハー
にピース加工を施した後の個々の薄膜磁気ヘッドでも同
様であった。FIG. 6 is a graph showing the number of popcorn noises before and after the heat treatment of the magnetic head described above. It is almost zero and has decreased dramatically. In Figure 6, the Q mark indicates the case where the noise threshold voltage for popcorn noise detection is set to 40μVO-p, and the Δ mark indicates the popcorn noise number when it is set to 50μVO-p. . The popcorn noise reduction effect was the same for thin-film magnetic heads on wafers and for individual thin-film magnetic heads after piece processing was performed on wafers.
次に、第６図のデータを得るために設定された条件につ
いて説明する。Next, conditions set to obtain the data shown in FIG. 6 will be explained.
第７図は第６図のデータを得るための書込及び読出動作
のタイムチャートである。書込動作は、書込電流４０ｍ
Ａ。−２、書込時間１ｍＳとした。書込動作終了後、１
０μｓのポスト、ライト、リカバリ、タイムを取り、読
出動作を行なった。読出時間は１６１１Ｓである。上述
を１サイクルとして２分間の試験を行なった。ホワイト
ノイズのレベルを３０μＶ、、と仮定し、ポツプコーン
ノイズ検出のためのノイズしきい値電圧を４０μｖ０−
２．５０μＶＯ＋ｐにそれぞれ設定して試験を行なった
。FIG. 7 is a time chart of write and read operations for obtaining the data shown in FIG. For write operation, write current is 40m
A. -2, writing time was 1 mS. After the write operation is completed, 1
A read operation was performed with a post, write, recovery, and time of 0 μs. The read time is 1611S. A 2 minute test was conducted with the above as one cycle. Assuming that the white noise level is 30μV, the noise threshold voltage for popcorn noise detection is 40μV0-
The test was conducted with each setting set to 2.50 μVO+p.
第８図は第６図のデータを得るために供された測定回路
のブロック図である０図において、１１は薄膜磁気ヘッ
ド、１２．１３は増幅器、１４はフィルタ、１５はオペ
アンプ、１６は比較器、１７は論理ゲート、１８は゛読
出／書込の切替制御器、１９はゲート制御器、２０はゲ
ート、タイマー、２１は論理ゲート、２２はポツプコー
ンカウンタである。FIG. 8 is a block diagram of the measurement circuit used to obtain the data shown in FIG. 6. In FIG. 17 is a logic gate, 18 is a read/write switching controller, 19 is a gate controller, 20 is a gate and timer, 21 is a logic gate, and 22 is a popcorn counter.
切替制御器１８から増幅器１２に与えられる切替信号に
より、第７図に示すタイムチャートに従って読出／書込
の切替えを行なう、読出動作において、薄膜磁気ヘッド
１１から出力される信号を増幅器１２．１３で増幅し、
フィルタ１４により必要な周波数成分を抽出し、オペア
ンプ１５を通して比較器１６に入力する。比較器１６は
、オペアンプ１５より供給される信号を、ツェナーダイ
オード２３によって設定されたポツプコーンノイズ検出
のためのノイズしきい値と比較し、前者が後者よりも大
きいときに、論理１の出力を生じる。この論理１の比較
出力を、論理ゲート１７を通してポツプコーンノイズ、
カウンタ２２に与えて１数する。ポツプコーンノイズ、
カウンタ２２における計数タイミングは、ゲート制御器
１９及びゲートタイマ２０から論理ゲート２１を通して
与えられるタイミング信号によって定められる。In a read operation in which reading/writing is switched according to the time chart shown in FIG. 7 by a switching signal given to the amplifier 12 from the switching controller 18, the signal output from the thin film magnetic head 11 is sent to the amplifier 12.13. amplify,
A necessary frequency component is extracted by a filter 14 and inputted to a comparator 16 through an operational amplifier 15. Comparator 16 compares the signal provided by operational amplifier 15 with a noise threshold for popcorn noise detection set by Zener diode 23, and outputs a logic 1 when the former is greater than the latter. occurs. This logic 1 comparison output is passed through logic gate 17 to popcorn noise.
It is given to the counter 22 to increment by one. popcorn noise,
The counting timing in the counter 22 is determined by a timing signal applied from the gate controller 19 and gate timer 20 through the logic gate 21.
〈発明の効果〉
以上述べたように、本発明に係る薄膜磁気ヘッドの製造
方法は、基体上に磁性膜及び導体コイル膜を含む薄膜磁
気回路を形成した後、前記薄膜磁気回路を覆う保護膜を
形成する前に、２７０℃〜４００℃の温度条件で熱処理
を行なうようにしたから、ポツプコーンノイズを殆ど生
じることのない薄膜磁気ヘッドを得ることができる。<Effects of the Invention> As described above, in the method for manufacturing a thin film magnetic head according to the present invention, after forming a thin film magnetic circuit including a magnetic film and a conductive coil film on a substrate, a protective film covering the thin film magnetic circuit is formed. Since the heat treatment is performed at a temperature of 270 DEG C. to 400 DEG C. before forming the thin film magnetic head, a thin film magnetic head that hardly generates popcorn noise can be obtained.
第１図は薄膜磁気ヘッドの要部の斜視図、第２図は薄膜
磁気ヘッドの要部の断面図、第３図はホワイトノイズ中
のポツプコーンノイズを示すオシロスコープ波形図、第
４図は書込動作時の磁区の構造を示す図、第５図は読出
動作時の磁区の構造を示す図、第６図は薄膜磁気ヘッド
の熱処理の前後におけるポツプコーンノイズ数をグラフ
化して示す図、第７図は第６図のデータを得るための書
込及び読出動作のタイムチャート、第８図は第６図のデ
ータを得るために供された測定回路のブロック図である
。
１・・・基体 ２．４・・・磁性膜５・・・導体コ
イル膜
１０・・・保護膜
特許出願人 ティーディーケイ株式会社第３図
第６図Figure 1 is a perspective view of the main parts of the thin film magnetic head, Figure 2 is a sectional view of the main parts of the thin film magnetic head, Figure 3 is an oscilloscope waveform diagram showing popcorn noise in white noise, and Figure 4 is FIG. 5 is a diagram showing the structure of magnetic domains during a write operation. FIG. 5 is a diagram showing the structure of magnetic domains during a read operation. FIG. 6 is a graph showing the number of popcorn noises before and after heat treatment of a thin film magnetic head. , FIG. 7 is a time chart of write and read operations for obtaining the data shown in FIG. 6, and FIG. 8 is a block diagram of a measuring circuit provided for obtaining the data shown in FIG. 6. 1...Substrate 2.4...Magnetic film 5...Conductor coil film 10...Protective film Patent applicant TDC Co., Ltd. Figure 3 Figure 6
Claims (2)
回路を形成した後、前記薄膜磁気回路を覆う保護膜を形
成する前に、２７０℃〜４００℃の温度条件で熱処理を
行なうことを特徴とする薄膜磁気ヘッドの製造方法。(1) After forming a thin film magnetic circuit including a magnetic film and a conductive coil film on a substrate, heat treatment is performed at a temperature of 270°C to 400°C before forming a protective film covering the thin film magnetic circuit. A method for manufacturing a characteristic thin-film magnetic head.
特徴とする特許請求の範囲第１項に記載の薄膜磁気ヘッ
ドの製造方法。(2) The method for manufacturing a thin film magnetic head according to claim 1, wherein the heat treatment is performed for 10 minutes to 120 minutes.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1133355A JPH063644B2 (en) | 1989-05-27 | 1989-05-27 | Pulse noise prevention method for thin film magnetic head |
| US07/715,012 US5236735A (en) | 1989-05-27 | 1991-06-13 | Method of producing a thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1133355A JPH063644B2 (en) | 1989-05-27 | 1989-05-27 | Pulse noise prevention method for thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02312005A true JPH02312005A (en) | 1990-12-27 |
| JPH063644B2 JPH063644B2 (en) | 1994-01-12 |
Family
ID=15102782
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1133355A Expired - Lifetime JPH063644B2 (en) | 1989-05-27 | 1989-05-27 | Pulse noise prevention method for thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH063644B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05266423A (en) * | 1990-10-12 | 1993-10-15 | Fujitsu Ltd | Thin-film magnetic head |
| US6571729B2 (en) * | 1999-07-28 | 2003-06-03 | Anelva Corporation | Apparatus for depositing a thin film on a data recording disk |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2698681B1 (en) * | 2011-04-12 | 2023-03-29 | Renesas Electronics Corporation | Voltage generating circuit |
| KR102313156B1 (en) * | 2020-06-25 | 2021-10-14 | 전훈 | Head of knitting machine for string |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS609098A (en) * | 1983-06-28 | 1985-01-18 | 三菱電機株式会社 | Multilamp discharge lamp firing device |
| JPH0283809A (en) * | 1988-09-21 | 1990-03-23 | Hitachi Ltd | Production of thin-film magnetic head |
-
1989
- 1989-05-27 JP JP1133355A patent/JPH063644B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS609098A (en) * | 1983-06-28 | 1985-01-18 | 三菱電機株式会社 | Multilamp discharge lamp firing device |
| JPH0283809A (en) * | 1988-09-21 | 1990-03-23 | Hitachi Ltd | Production of thin-film magnetic head |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH05266423A (en) * | 1990-10-12 | 1993-10-15 | Fujitsu Ltd | Thin-film magnetic head |
| US6571729B2 (en) * | 1999-07-28 | 2003-06-03 | Anelva Corporation | Apparatus for depositing a thin film on a data recording disk |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH063644B2 (en) | 1994-01-12 |
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