JPH0231151U - - Google Patents
Info
- Publication number
- JPH0231151U JPH0231151U JP10872488U JP10872488U JPH0231151U JP H0231151 U JPH0231151 U JP H0231151U JP 10872488 U JP10872488 U JP 10872488U JP 10872488 U JP10872488 U JP 10872488U JP H0231151 U JPH0231151 U JP H0231151U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor device
- amorphous silicon
- silicon film
- utility
- film formed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 238000004544 sputter deposition Methods 0.000 claims 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical group [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10872488U JPH0231151U (bg) | 1988-08-19 | 1988-08-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10872488U JPH0231151U (bg) | 1988-08-19 | 1988-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231151U true JPH0231151U (bg) | 1990-02-27 |
Family
ID=31344328
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10872488U Pending JPH0231151U (bg) | 1988-08-19 | 1988-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231151U (bg) |
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1988
- 1988-08-19 JP JP10872488U patent/JPH0231151U/ja active Pending