JPH0231125A - Leakage detector - Google Patents

Leakage detector

Info

Publication number
JPH0231125A
JPH0231125A JP18041688A JP18041688A JPH0231125A JP H0231125 A JPH0231125 A JP H0231125A JP 18041688 A JP18041688 A JP 18041688A JP 18041688 A JP18041688 A JP 18041688A JP H0231125 A JPH0231125 A JP H0231125A
Authority
JP
Japan
Prior art keywords
temperature
circuit
signal
leakage
set value
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18041688A
Other languages
Japanese (ja)
Inventor
Toshinori Murakoshi
村越 俊則
Shigeru Kanamori
金森 茂
Kazuhiro Ishii
石井 和裕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Engineering Corp
Toshiba Corp
Original Assignee
Toshiba Engineering Corp
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Engineering Corp, Toshiba Corp filed Critical Toshiba Engineering Corp
Priority to JP18041688A priority Critical patent/JPH0231125A/en
Publication of JPH0231125A publication Critical patent/JPH0231125A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To detect leakage at an early stage with high accuracy by providing a temp. detector, a max. value selection circuit and a comparing circuit. CONSTITUTION:The atmospheric temps. at the respective places in a machinery chamber 2 are detected as signals (c) to (f) and the highest temp. signal in the machinery chamber 2 is selected by a max. value selection circuit 6 to be compared with a set value 8 by a comparing circuit 7. If a high temp. fluid leaks from a machinery 1, said fluid is detected by temp. detectors 3c to 3f in the vicinity of a location of the leakage and the numerical values of the outputted signals 3c to 3f rise and, when each said values is larger than the preset value 8, the leakage of the high temp. fluid occurs and a signal is outputted from the circuit 7 and a leakage signal 10 is outputted through an OR circuit 18. The signals (c) to (f) are respectively inputted to individual differentiating circuits 14 to 17 and the rates of timewise change are operated to be compared with set values 23 to 26 by comparing circuits 19 to 22 and, when even one of the rates exceeds the set value, it is judged that a leakage occurs at the place where the detectors 3c to 3f are arranged and the leakage is confirmed by a delay circuit 28 for preventing erroneous operation and the leakage signal 10 is outputted from the circuit 18.

Description

【発明の詳細な説明】 [発明の目的] (産業上の利用分野) 本発明は高温蒸気等の高温流体を内包する機器及び配管
類を設置した室内において、機器からの高温流体の漏洩
を検出する漏洩検出装置に関する。
[Detailed description of the invention] [Object of the invention] (Industrial application field) The present invention detects leakage of high-temperature fluid from equipment in a room where equipment and piping containing high-temperature fluid such as high-temperature steam are installed. The present invention relates to a leakage detection device.

(従来の技術) 通常高温蒸気等の高温流体を内包する機器及び配管類を
配設した室内においては、第2図の機器室平面図で示す
ように、機器1を設置した機器室2内の各所に機器1が
内包する高温流体の漏洩検出のために、複数の温度検知
器3a7′117至3fを配置して、機器室2内の雰囲
気温度の測定を行っている。この内温度検知器3aは、
給気空調ダクト4により給気される冷却空気の温度を吐
出口4a付近で測定し、温度検知器3bは、排気空調ダ
クト5により排気される機器1の熱負荷により上昇した
機器室2内の空気温度を排気空調ダクト5の吸気口5a
付近で測定している。またその仙の温度検知器3C乃至
3fは、機器全2内の局所温度を測定している。
(Prior art) In a room where equipment and piping containing high-temperature fluid such as high-temperature steam are normally installed, as shown in the equipment room plan view of FIG. In order to detect leakage of the high temperature fluid contained in the equipment 1, a plurality of temperature detectors 3a7'117 to 3f are arranged at various locations to measure the atmospheric temperature within the equipment room 2. Of these, the temperature sensor 3a is
The temperature of the cooling air supplied by the supply air conditioning duct 4 is measured near the discharge port 4a, and the temperature detector 3b measures the temperature of the cooling air in the equipment room 2 that has increased due to the heat load of the equipment 1 exhausted by the exhaust air conditioning duct 5. The air temperature is discharged from the air intake port 5a of the air conditioning duct 5.
Measurements are being taken nearby. Further, the temperature detectors 3C to 3f measure the local temperature within the entire device 2.

ここで機器1より高温流体の漏洩か発生した場合、流出
した高温流体の熱により機器室2内の雰囲気温度及び給
、排気温度差が上昇するため、これを湿度検知器3a乃
至3fで検出して漏洩発生の判断をしていた。
If high-temperature fluid leaks from equipment 1, the ambient temperature in equipment room 2 and the difference in supply and exhaust temperatures will rise due to the heat of the leaked high-temperature fluid, so this will be detected by humidity detectors 3a to 3f. It was determined that a leak had occurred.

第4図はこの従来の検出装置のロジック回路図で、温度
信号a乃至fは、夫々温度検知器3a乃至3fから出力
される温度信号で、即ち温度信号aは温度検知器3aか
らの温度信号を示している。
FIG. 4 is a logic circuit diagram of this conventional detection device, where temperature signals a to f are temperature signals output from temperature detectors 3a to 3f, respectively, that is, temperature signal a is a temperature signal from temperature detector 3a. It shows.

機器室2内雰囲気の湿度信号C乃至fは最大値選択回路
6に入力され、機器室2内の最高温度信号が選択される
。この信号はさらに比較回路7で予め定めた設定値8と
比較されて、この設定値8より大きい信号が入力された
場合には、高温流体の漏洩が発生したものとしてOR回
路9を経て漏洩信@10を発する。さらにこの漏洩信号
10により必要に応じて、機器1を例えば図示しない高
温流体配管から切離す隔離作業等を実施する。また給気
空調ダクト4の吐出口4a付近の温度信号aと、排気空
調ダクト5の吸気口5aの温度信Rbとの差演算を減算
回路11で行って、漏洩が発生すると吸気口5aの温度
は上昇するが、吐出口4aの温度は給気空調ダクト4か
らの冷却空気を測定しているためほとんと変化がなく、
その結果差温度が上昇する。従って減算回路11の出力
を比較回路12で設定値13と比較し、この差温度が設
定値13を上回った場合にも漏洩発生と判断して、OR
回路9より漏洩信号10を出力していた。
The humidity signals C to f of the atmosphere inside the equipment room 2 are input to the maximum value selection circuit 6, and the highest temperature signal inside the equipment room 2 is selected. This signal is further compared with a predetermined set value 8 in a comparator circuit 7, and if a signal larger than this set value 8 is input, it is assumed that a leak of high temperature fluid has occurred, and a leak signal is sent via an OR circuit 9. Send @10. Further, based on this leakage signal 10, if necessary, isolation work such as separating the device 1 from a high temperature fluid pipe (not shown) is performed. Further, the subtraction circuit 11 calculates the difference between the temperature signal a near the discharge port 4a of the supply air conditioning duct 4 and the temperature signal Rb of the intake port 5a of the exhaust air conditioning duct 5. increases, but the temperature at the discharge port 4a remains almost unchanged because the cooling air from the supply air conditioning duct 4 is being measured.
As a result, the differential temperature increases. Therefore, the output of the subtraction circuit 11 is compared with the set value 13 in the comparator circuit 12, and even if this temperature difference exceeds the set value 13, it is determined that a leak has occurred, and the OR
A leakage signal 10 was output from the circuit 9.

(発明が解決しようとする課題) 従来漏洩検出回路にあける設定値8は機器室2内全般の
通常室温に対して考慮し、また設定値13は空調の通常
運転時における冷却空気温度の変動や空調の故障等によ
っても、直ちに誤って漏洩信号を発しないように裕度を
持った数値とじている。このため万一漏洩が発生した場
合、その場所と程度によっては雰囲気温度が設定値8、
]3に到達するまでに時間を要し、漏洩信@10の出力
に大幅な時間遅れが生じて、早期検出が困難という問題
があった。
(Problem to be Solved by the Invention) The setting value 8 set in the conventional leakage detection circuit takes into account the normal room temperature of the entire equipment room 2, and the setting value 13 takes into consideration fluctuations in cooling air temperature during normal operation of the air conditioner. The values have been set with a margin to ensure that leakage signals will not be emitted immediately in the event of an air conditioner malfunction. Therefore, in the event that a leak occurs, the ambient temperature may be set at 8 or 8 depending on the location and extent of the leak.
]3, and a significant time delay occurs in the output of the leakage signal @10, making early detection difficult.

本発明は、上記に鑑みてなされたもので、その目的とす
るところは従来の温度検知器を用いて、室内温度の上が
のみならず、その各温度信号の変化率から温度検知器の
配置場所や空調運転等の影響を受は難い高精度で、しか
も早期検出ができる信頼性の高い漏洩検出装置を捏供す
ることにおる。
The present invention has been made in view of the above, and its purpose is to use conventional temperature detectors to detect not only the indoor temperature but also the rate of change of each temperature signal to determine the location of the temperature detector. Our objective is to provide a highly accurate leak detection device that is not easily affected by location, air conditioning operation, etc., and that is also capable of early detection and is highly reliable.

[発明の構成] (課題を解決するための手段) 高温流体を内包する機器類を設置した室内の各所及び室
内空調の給気、排気口近くに温度検出手段を配置し、こ
のうち室内各所の温度信号の最大値の選択手段と、この
出力信号と設定値との比較手段と、前記室内各所からの
各温度信号の変化率演算手段と、この出力信号と設定値
との比較手段と、この比較手段の信号による第2のOR
回路と、この出力信号の遅延手段と、前記室内空調の給
気及び排気口近くからの温度信号との差演算手段と、こ
の出力信号の変化率演算手段と、この出力信号と設定値
との比較手段と、この比較手段と前記遅延手段及び前記
室内各所からの温度信号の最大値と設定値との比較手段
の出力信号から漏洩信号を発する第1のOR回路を具備
する。
[Structure of the Invention] (Means for Solving the Problems) Temperature detection means are arranged at various locations in the room where equipment containing high-temperature fluid is installed and near the air supply and exhaust ports of the indoor air conditioner, and means for selecting the maximum value of the temperature signal, means for comparing this output signal with a set value, means for calculating the rate of change of each temperature signal from various parts of the room, means for comparing this output signal with the set value, and Second OR with the signal of the comparison means
a circuit, a means for delaying this output signal, a means for calculating a difference between the temperature signal from near the supply air and exhaust ports of the indoor air conditioner, a means for calculating a rate of change of this output signal, and a means for calculating a change rate between this output signal and a set value. A first OR circuit is provided which generates a leakage signal from the comparison means, the delay means, and the output signal of the comparison means between the maximum value of the temperature signal from various parts of the room and a set value.

(作 用) 機器室内各所の温度上昇と、その各温度の変化率及び機
器室内空調の給気、排気温度差の変化率を設定値と比較
して、機器内包の高温流体の漏洩を検出する。
(Function) Detects leakage of high-temperature fluid contained in the equipment by comparing the temperature rise in various parts of the equipment room, the rate of change of each temperature, and the rate of change of the supply air and exhaust temperature difference of the equipment room air conditioner with the set value. .

(実施例) 本発明の一実施例について図面を参照して説明する。な
お前記した従来技術と同一の構成部分には同一符号を付
して、詳細な説明は省略する。
(Example) An example of the present invention will be described with reference to the drawings. Note that the same components as those in the prior art described above are given the same reference numerals, and detailed explanations will be omitted.

第1図は検出装置のロジック回路図で、第2図の機器室
平面図で示すように機器室2内の各所に温度検出手段で
ある温度検知器3C乃至3fが配置されていて、夫々の
温度信@c、d、e、fは最大値選択手段である最大値
選択回路6及び各信号毎の変化率演算手段である微分回
路14.15.16.17に入力される。前記最大値選
択回路6の出力は比較手段の比較回路7で予め定めた設
定値8と比較して第1のOR回路18に入力される。
FIG. 1 is a logic circuit diagram of the detection device, and as shown in the plan view of the equipment room in FIG. The temperature signals @c, d, e, and f are input to the maximum value selection circuit 6, which is maximum value selection means, and the differentiation circuits 14, 15, 16, and 17, which are change rate calculation means for each signal. The output of the maximum value selection circuit 6 is compared with a predetermined set value 8 in a comparison circuit 7 as a comparison means, and is inputted to a first OR circuit 18.

ざらに前記微分回路14.15.16.17からの各出
力は夫々の比較手段でおる比較回路19.20.21.
22で、各箇所毎の設定値23.24.25.26と比
較されて第2のOR回路27に入力され、その出力は遅
延手段の遅延回路28を経て第1のOR回路18に入力
される。また機器室2内の給気空調ダクト4の吐出口4
a付近に温度検知器3aを、排気空調ダクト5の吸気口
5a付近に温度検知器3bを配置して、空調用冷却空気
の温度と排気温度を検出し、これ等の温度信号a、bを
差演算手段である減算回路11に入力し、差演算の結果
を変化率演算手段である微分回路2つを経由して比較手
段の比較回路12を介して第1のOR回路18に出力す
る。第1のOR回路18からは漏洩信号10が出力され
る構成となっている。
Roughly speaking, each output from the differentiating circuit 14, 15, 16, 17 is connected to a comparing circuit 19, 20, 21, .
22, it is compared with the setting values 23, 24, 25, 26 for each location and input to the second OR circuit 27, and its output is input to the first OR circuit 18 via the delay circuit 28 of the delay means. Ru. Also, the outlet 4 of the air supply air conditioning duct 4 in the equipment room 2
A temperature sensor 3a is placed near a, and a temperature sensor 3b is placed near the intake port 5a of the exhaust air conditioning duct 5 to detect the temperature of the air conditioning cooling air and the exhaust temperature, and these temperature signals a and b are It is input to the subtraction circuit 11 which is a difference calculation means, and the result of the difference calculation is outputted to the first OR circuit 18 via two differentiating circuits which are change rate calculation means and a comparison circuit 12 which is a comparison means. The first OR circuit 18 is configured to output a leakage signal 10.

次に上記構成による作用について述べる。先ず機器室2
内各所の雰囲気温度は温度信号C乃至fとして検出され
、従来と同様に最大値選択回路6において機器室2内の
最高温度信号が選択され、ざらに比較回路7で設定値8
と比較される。若しも機器1より高温流体が漏洩すると
、漏洩箇所に近い温度検知器3C乃至3fがこれを検出
し、出力する温度信号C乃至fの数値が上昇する。この
値が予め定めた設定値8より大きい場合には、高温流体
の漏洩が発生したものとして比較回路7より信号が出力
され、OR回路18を経て漏洩信号10が出力される。
Next, the effects of the above configuration will be described. First, equipment room 2
The ambient temperature at each location within the equipment room 2 is detected as temperature signals C to f, and as in the past, the maximum value selection circuit 6 selects the highest temperature signal within the equipment room 2, and the comparison circuit 7 roughly selects the set value 8.
compared to If high-temperature fluid leaks from the device 1, the temperature detectors 3C to 3f near the leak location detect this, and the numerical values of the output temperature signals C to f increase. If this value is larger than a predetermined set value 8, a signal is output from the comparison circuit 7 indicating that a leak of high temperature fluid has occurred, and a leak signal 10 is output via the OR circuit 18.

また温度信号C乃至fは夫々個別の微分回路14乃至1
7に入力され、ここで時間的な変化率が演算されてその
出力は同じく別個の比較回路19乃至22にて、夫々予
め定めた設定値23乃至26と比較し、この内1つでも
変化率が設定値を上回ると、これは通常の空調の冷却空
気温度の変化や空調の故障による温度変化とは別のもの
で、当該温度検知器3G乃至3fの配置場所において漏
洩が発生し゛たと判断し、念のためにノイズや短時間の
過渡的温度変化によるものでないことを誤動作防止用の
遅延回路28で確認して、第1のOR回路18より漏洩
信号10を出力する。
Further, the temperature signals C to f are transmitted through individual differentiating circuits 14 to 1, respectively.
7, the temporal rate of change is calculated here, and the output is compared with predetermined set values 23 to 26, respectively, in separate comparison circuits 19 to 22. If the temperature exceeds the set value, this is different from a change in the cooling air temperature of a normal air conditioner or a temperature change due to a malfunction of the air conditioner, and it is determined that a leak has occurred at the location where the temperature detectors 3G to 3F are installed. As a precaution, the delay circuit 28 for preventing malfunctions confirms that the leakage signal is not caused by noise or short-term transient temperature changes, and the first OR circuit 18 outputs the leakage signal 10.

なお個別の比較回路19乃至22への設定値23乃至2
6は第3図の横軸に時間、縦軸を温度とした機器室内温
度特性図に示すように、空調停止時の温度曲線30の変
化率より大きく、漏洩発生時の温度曲線31の変化率よ
り小さく選べば、通常運転時の誤漏洩信号の発信を防止
できる。
Note that the set values 23 to 2 for the individual comparison circuits 19 to 22
6 is larger than the rate of change in the temperature curve 30 when the air conditioning is stopped, and is the rate of change in the temperature curve 31 when a leak occurs, as shown in the equipment indoor temperature characteristic diagram in FIG. 3, where the horizontal axis is time and the vertical axis is temperature. By choosing a smaller value, it is possible to prevent erroneous leakage signals from being sent during normal operation.

即ち設定値は、下記の(1)式で示すように定める。That is, the set value is determined as shown in equation (1) below.

△Tl/ΔtくΔT/ΔtくΔT2/Δt・・・・・・
・・・(1) ここで、Δt;単位変化時間、ΔT1 ;空調停止時の
単位時間当りの温度変化、ΔT2 ;漏洩発生時の単位
時間当りの温度変化、ΔT/Δt;各温度検知型温度検
知器設置場所度変化率の設定値とする。
△Tl/Δt ΔT/Δt ΔT2/Δt・・・・・・
...(1) Here, Δt: Unit change time, ΔT1: Temperature change per unit time when air conditioning is stopped, ΔT2: Temperature change per unit time when leakage occurs, ΔT/Δt: Temperature of each temperature detection type This is the setting value for the rate of change in the degree of the detector installation location.

次に空調出入口の温度差の変化率監視は、給気と排気空
調ダクトからの給気の温度信号aと、排気の温度信号す
とを減算回路11に入力して差演算を行ない、さらに微
分回路29で時間に対する変化率を演算する。若し漏洩
が発生した場合には漏洩した高温流体が機器室2に流出
して、この熱のために機器室2内温度が上昇して排気温
度信号すが上昇するが、これに対し給気温度信号aは、
吐出口4aの冷却空気温度を測定しているためほとんど
変化がなく、その結果差温度が上昇する。
Next, to monitor the rate of change in the temperature difference at the air conditioning inlet and outlet, the temperature signal a of the supply air and the exhaust air from the air conditioning duct and the temperature signal S of the exhaust air are input to the subtraction circuit 11 to perform a difference calculation, and then differentiated. A circuit 29 calculates the rate of change with respect to time. If a leak occurs, the leaked high-temperature fluid flows into the equipment room 2, and this heat causes the temperature inside the equipment room 2 to rise and the exhaust temperature signal to rise. The temperature signal a is
Since the temperature of the cooling air at the discharge port 4a is measured, there is almost no change, and as a result, the differential temperature increases.

従って減算回路11の出力を微分回路29により変化率
を求め、比較回路12で設定値13と比較して、この変
化率が設定値13を上回った場合に比較回路12より信
号が出て、第1のOR回路18より漏洩信号10が出力
される。
Therefore, the rate of change of the output of the subtraction circuit 11 is determined by the differentiator 29, and compared with the set value 13 in the comparator circuit 12. If this rate of change exceeds the set value 13, a signal is output from the comparator circuit 12, and the A leakage signal 10 is output from the OR circuit 18 of 1.

いま、漏洩発生前の平均機器室内雰囲気温度をTa、漏
洩発生時の平衡温度をT[、温度上昇時の温度変化平均
時定数をτとすれば、漏洩による温度上昇曲線下は下記
の(2)式で表される。
Now, if the average indoor ambient temperature of the equipment before the leak occurs is Ta, the equilibrium temperature at the time of the leak is T[, and the average time constant of temperature change during temperature rise is τ, then the temperature rise curve due to the leak is as follows (2 ) is expressed by the formula.

T=TL+ (Ta−TL )e”  ・ (2)上記
(2)式を微分すると、 d T/ d t =TL −TA/ r e−”ζ・
(3)式(3)は単調減少関数であり、t=Qにおいて
最も大きな値をとることかわかる。
T=TL+ (Ta−TL)e”・(2) Differentiating the above equation (2), dT/ dt=TL −TA/ r e−”ζ・
(3) It can be seen that equation (3) is a monotonically decreasing function and takes the largest value at t=Q.

即ち漏洩が発生した直後に温度の変化率は以でも大ぎな
値となるため、温度または差温度の監視により漏洩の早
期発見が可能となる。
That is, immediately after a leak occurs, the rate of change in temperature still reaches a large value, so monitoring the temperature or temperature difference makes it possible to detect the leak early.

いま−例として、Ta=25 (’C) 、TL =9
0(’C)、τ=10(分)の数値により従来と本発明
との漏洩検出時間の比較をする。
Now - as an example, Ta = 25 ('C), TL = 9
0 ('C) and τ=10 (minutes) to compare the leakage detection time between the conventional method and the present invention.

先ず従来技術では、漏洩検出信号を発する温度を80(
’C)として、本温度に到達するまでの時間を(2)式
を用いて求めると、t=19(分)となる。
First, in the conventional technology, the temperature at which the leakage detection signal is emitted is set to 80 (
'C), the time required to reach the main temperature using equation (2) is t=19 (minutes).

次に本発明により、(3)式を用いて漏洩発生時の温度
変化率を求めると、漏洩発生直後では6.5(’C/分
)となる。なお温度変化率を前記以下の設定、例えば5
(℃/分)としてあけば、漏洩発生直後においての漏洩
検出が可能となる。
Next, according to the present invention, when the temperature change rate at the time of leakage occurrence is determined using equation (3), it is 6.5 ('C/min) immediately after the leakage occurrence. Note that the temperature change rate is set as below, for example 5.
(°C/min), it becomes possible to detect leaks immediately after they occur.

なお漏洩信号10により、運転員への漏洩警報や当該機
器1を例えば図示しない高温流体配管から隔離弁等を閉
止して切離す隔離作業信号等を発することは従来と同様
、容易に実施できる。
The leakage signal 10 can be used to easily issue a leakage warning to an operator or an isolation work signal to disconnect the device 1 from a high-temperature fluid pipe (not shown) by closing an isolation valve or the like, as in the conventional case.

[発明の効果] 以上本発明によれば、高温流体を内包した機器を設置し
た室内における高温流体の漏洩を、従来と同様に室温上
昇を検知して行うことと併せて、温度変化率及び差温度
変化率を監視して室内空調設備の運転状態等の影響を受
けずに、早期で精度の高い漏洩検出が可能となったので
、検出装置の信頼性と採用プラントの安全信頼性を向上
する効果がある。
[Effects of the Invention] As described above, according to the present invention, leakage of high-temperature fluid in a room in which a device containing high-temperature fluid is installed is detected by detecting a rise in room temperature, as well as detecting the rate of temperature change and the difference in temperature. By monitoring the rate of temperature change and being unaffected by the operational status of indoor air conditioning equipment, it is now possible to detect leaks early and with high precision, improving the reliability of the detection device and the safety and reliability of the plant in which it is used. effective.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例を示す検出装置のロジック回
路図、第2図は機器室平面図、第3図は機器室内温度特
性図、第4図は従来の検出装置のロジック回路図である
。 1・・・機器、      2・・・機器室、3a、3
b、3C13d、3e、3f ・・・温度検知器、 4・・・給気空調ダクト、 4a・・・吐出口、5・・
・排気空調ダクト、 5a・・・吸気口、6・・・最大
@選択回路、 7.12.19.20.21.22・・・比較回路、8
.13.23.24.25.26・・・設定値、10・
・・隔離信号、 11・・・減算回路、 14.15.16.17.29・・・微分回路、aSb
、c、dle、f・・・温度信号。 代理人 弁理士 大 胡 典 夫 /j 第  1  図 第2図
Fig. 1 is a logic circuit diagram of a detection device showing an embodiment of the present invention, Fig. 2 is a plan view of the equipment room, Fig. 3 is a temperature characteristic diagram in the equipment room, and Fig. 4 is a logic circuit diagram of a conventional detection device. It is. 1...Equipment, 2...Equipment room, 3a, 3
b, 3C13d, 3e, 3f...Temperature detector, 4...Air supply air conditioning duct, 4a...Discharge port, 5...
・Exhaust air conditioning duct, 5a...Intake port, 6...Maximum @ selection circuit, 7.12.19.20.21.22...Comparison circuit, 8
.. 13.23.24.25.26...Set value, 10.
...isolation signal, 11...subtraction circuit, 14.15.16.17.29...differentiation circuit, aSb
, c, dle, f...temperature signal. Agent Patent Attorney Norio Ogo/j Figure 1 Figure 2

Claims (1)

【特許請求の範囲】[Claims] 高温蒸気等の高温流体を内包する機器及び配管類を設置
した室内の各所及び室内空調の給気、排気口近くに配置
した温度検出手段と、このうち室内各所の温度検出手段
からの温度信号の最大値選択手段と、この出力信号と設
定値との比較手段と、前記室内各所の温度検出手段から
の各温度信号の変化率演算手段と、この演算手段の出力
信号と設定値との比較手段と、この比較手段の出力信号
により信号を発する第2のOR回路と、この出力信号の
遅延手段と、前記室内空調の給気口及び排気口近くに配
置した温度検出手段からの温度信号の差演算手段と、こ
の差演算手段からの出力信号の変化率演算手段と、この
出力信号と設定値との比較手段と、この比較手段と前記
遅延手段及び前記室内各所の温度信号からの出力信号と
設定値との比較手段の出力信号により漏洩信号を発する
第1のOR回路を具備して、室内雰囲気温度の上昇と変
化率及び空調の給気、排気温度差の変化率から高温流体
の漏洩を検出することを特徴とする漏洩検出装置。
Temperature detection means placed in various parts of the room where equipment and piping containing high-temperature fluid such as high-temperature steam are installed, and near the air supply and exhaust ports of the indoor air conditioner, and temperature signals from the temperature detection means in various parts of the room. Maximum value selection means, means for comparing this output signal with a set value, means for calculating the rate of change of each temperature signal from the temperature detecting means at various locations in the room, and means for comparing the output signal of this calculating means with the set value. , a second OR circuit that emits a signal based on the output signal of this comparison means, a delay means for this output signal, and a temperature signal difference between the temperature detection means arranged near the air supply and exhaust ports of the indoor air conditioner. a calculation means, a change rate calculation means for the output signal from the difference calculation means, a comparison means for the output signal and a set value, and output signals from the comparison means, the delay means, and the temperature signals at various locations in the room; A first OR circuit is provided which generates a leakage signal based on the output signal of the comparing means with a set value, and the leakage of high-temperature fluid is detected based on the rise and rate of change in the indoor atmospheric temperature and the rate of change in the difference in supply and exhaust temperatures of the air conditioner. A leak detection device characterized by detecting a leak.
JP18041688A 1988-07-21 1988-07-21 Leakage detector Pending JPH0231125A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18041688A JPH0231125A (en) 1988-07-21 1988-07-21 Leakage detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18041688A JPH0231125A (en) 1988-07-21 1988-07-21 Leakage detector

Publications (1)

Publication Number Publication Date
JPH0231125A true JPH0231125A (en) 1990-02-01

Family

ID=16082876

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18041688A Pending JPH0231125A (en) 1988-07-21 1988-07-21 Leakage detector

Country Status (1)

Country Link
JP (1) JPH0231125A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9267982B2 (en) 2013-02-11 2016-02-23 Taiwan Semiconductor Manufacturing Company, Ltd. Processing apparatus and ion implantation apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9267982B2 (en) 2013-02-11 2016-02-23 Taiwan Semiconductor Manufacturing Company, Ltd. Processing apparatus and ion implantation apparatus
US9606181B2 (en) 2013-02-11 2017-03-28 Taiwan Semiconductor Manufacturing Company, Ltd. Processing apparatus, ion implantation apparatus and ion implantation method
US9786470B2 (en) 2013-02-11 2017-10-10 Taiwan Semiconductor Manufacturing Company, Ltd. Ion beam generator, ion implantation apparatus including an ion beam generator and method of using an ion beam generator

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