JPH0231123U - - Google Patents

Info

Publication number
JPH0231123U
JPH0231123U JP10875788U JP10875788U JPH0231123U JP H0231123 U JPH0231123 U JP H0231123U JP 10875788 U JP10875788 U JP 10875788U JP 10875788 U JP10875788 U JP 10875788U JP H0231123 U JPH0231123 U JP H0231123U
Authority
JP
Japan
Prior art keywords
tray
equipment
wafer
holder
sandwich
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10875788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10875788U priority Critical patent/JPH0231123U/ja
Publication of JPH0231123U publication Critical patent/JPH0231123U/ja
Pending legal-status Critical Current

Links

JP10875788U 1988-08-19 1988-08-19 Pending JPH0231123U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10875788U JPH0231123U (enrdf_load_stackoverflow) 1988-08-19 1988-08-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10875788U JPH0231123U (enrdf_load_stackoverflow) 1988-08-19 1988-08-19

Publications (1)

Publication Number Publication Date
JPH0231123U true JPH0231123U (enrdf_load_stackoverflow) 1990-02-27

Family

ID=31344392

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10875788U Pending JPH0231123U (enrdf_load_stackoverflow) 1988-08-19 1988-08-19

Country Status (1)

Country Link
JP (1) JPH0231123U (enrdf_load_stackoverflow)

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