JPH0231056U - - Google Patents
Info
- Publication number
- JPH0231056U JPH0231056U JP10994288U JP10994288U JPH0231056U JP H0231056 U JPH0231056 U JP H0231056U JP 10994288 U JP10994288 U JP 10994288U JP 10994288 U JP10994288 U JP 10994288U JP H0231056 U JPH0231056 U JP H0231056U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- ion implantation
- implantation apparatus
- type
- incidence
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000005468 ion implantation Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims 1
- 150000002500 ions Chemical class 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000010884 ion-beam technique Methods 0.000 description 3
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10994288U JPH0231056U (fr) | 1988-08-22 | 1988-08-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10994288U JPH0231056U (fr) | 1988-08-22 | 1988-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0231056U true JPH0231056U (fr) | 1990-02-27 |
Family
ID=31346646
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10994288U Pending JPH0231056U (fr) | 1988-08-22 | 1988-08-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0231056U (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04282549A (ja) * | 1991-03-11 | 1992-10-07 | G T C:Kk | イオンビームの照射方法 |
-
1988
- 1988-08-22 JP JP10994288U patent/JPH0231056U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04282549A (ja) * | 1991-03-11 | 1992-10-07 | G T C:Kk | イオンビームの照射方法 |
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