JPH0230836U - - Google Patents
Info
- Publication number
- JPH0230836U JPH0230836U JP10837688U JP10837688U JPH0230836U JP H0230836 U JPH0230836 U JP H0230836U JP 10837688 U JP10837688 U JP 10837688U JP 10837688 U JP10837688 U JP 10837688U JP H0230836 U JPH0230836 U JP H0230836U
- Authority
- JP
- Japan
- Prior art keywords
- performance filter
- ultra
- clean
- clean unit
- ceiling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000007664 blowing Methods 0.000 claims 1
Landscapes
- Ventilation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988108376U JPH0720499Y2 (ja) | 1988-08-18 | 1988-08-18 | クリ−ンル−ム構造 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988108376U JPH0720499Y2 (ja) | 1988-08-18 | 1988-08-18 | クリ−ンル−ム構造 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0230836U true JPH0230836U (da) | 1990-02-27 |
JPH0720499Y2 JPH0720499Y2 (ja) | 1995-05-15 |
Family
ID=31343644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988108376U Expired - Lifetime JPH0720499Y2 (ja) | 1988-08-18 | 1988-08-18 | クリ−ンル−ム構造 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0720499Y2 (da) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004114378A1 (ja) * | 2003-06-19 | 2004-12-29 | Hokkaido Technology Licensing Office Co., Ltd. | クリーンユニット、クリーンユニットシステム、機能ユニット、機能ユニットシステム、材料処理方法、素子製造方法、細胞系育成方法および植物体育成方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62155455A (ja) * | 1985-12-27 | 1987-07-10 | Hitachi Plant Eng & Constr Co Ltd | クリ−ンル−ム |
-
1988
- 1988-08-18 JP JP1988108376U patent/JPH0720499Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62155455A (ja) * | 1985-12-27 | 1987-07-10 | Hitachi Plant Eng & Constr Co Ltd | クリ−ンル−ム |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004114378A1 (ja) * | 2003-06-19 | 2004-12-29 | Hokkaido Technology Licensing Office Co., Ltd. | クリーンユニット、クリーンユニットシステム、機能ユニット、機能ユニットシステム、材料処理方法、素子製造方法、細胞系育成方法および植物体育成方法 |
JPWO2004114378A1 (ja) * | 2003-06-19 | 2006-07-27 | 北海道ティー・エル・オー株式会社 | クリーンユニット、クリーンユニットシステム、機能ユニット、機能ユニットシステム、材料処理方法、素子製造方法、細胞系育成方法および植物体育成方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0720499Y2 (ja) | 1995-05-15 |