JPH0230186Y2 - - Google Patents

Info

Publication number
JPH0230186Y2
JPH0230186Y2 JP17797785U JP17797785U JPH0230186Y2 JP H0230186 Y2 JPH0230186 Y2 JP H0230186Y2 JP 17797785 U JP17797785 U JP 17797785U JP 17797785 U JP17797785 U JP 17797785U JP H0230186 Y2 JPH0230186 Y2 JP H0230186Y2
Authority
JP
Japan
Prior art keywords
air supply
supply passage
bearing
plates
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17797785U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6285332U (el
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP17797785U priority Critical patent/JPH0230186Y2/ja
Publication of JPS6285332U publication Critical patent/JPS6285332U/ja
Application granted granted Critical
Publication of JPH0230186Y2 publication Critical patent/JPH0230186Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Machine Tool Units (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP17797785U 1985-11-19 1985-11-19 Expired JPH0230186Y2 (el)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17797785U JPH0230186Y2 (el) 1985-11-19 1985-11-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17797785U JPH0230186Y2 (el) 1985-11-19 1985-11-19

Publications (2)

Publication Number Publication Date
JPS6285332U JPS6285332U (el) 1987-05-30
JPH0230186Y2 true JPH0230186Y2 (el) 1990-08-14

Family

ID=31119677

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17797785U Expired JPH0230186Y2 (el) 1985-11-19 1985-11-19

Country Status (1)

Country Link
JP (1) JPH0230186Y2 (el)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101857272B1 (ko) * 2017-04-26 2018-05-14 덕흥 주식회사 스크류 가공장치의 클램핑 구조

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0661666B2 (ja) * 1987-08-20 1994-08-17 豊田工機株式会社 摺動体の静圧支持装置
JPH0786369B2 (ja) * 1989-02-04 1995-09-20 豊田工機株式会社 角スライド静圧支承装置
GB2456344B (en) * 2008-01-14 2012-04-18 Upm Ltd Aerostatic bearing
JP5082929B2 (ja) * 2008-02-29 2012-11-28 株式会社ニコン 流体軸受、ステージ装置、露光装置、及びデバイス製造方法
JP2010161926A (ja) * 2010-04-21 2010-07-22 Seiko Instruments Inc アクチュエータ及びテーブル装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101857272B1 (ko) * 2017-04-26 2018-05-14 덕흥 주식회사 스크류 가공장치의 클램핑 구조

Also Published As

Publication number Publication date
JPS6285332U (el) 1987-05-30

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