JPH02300666A - Semiconductor measuring instrument - Google Patents

Abstract

PURPOSE:To securely connect a measured element test device and an element to be measured electrically by providing mercury as a contact means which contacts plural leads of the elements to be measured electrically. CONSTITUTION:The plural terminals 6 are connected electrically to the measured element test device, and the plural leads 2 of the element 1 to be measured are inserted into grooves 4 by a measured element moving device to come into contact with the mercury 5 in the grooves 4 electrically. Consequently, the measured element test device and element 1 are connected electrically and securely and the electric characteristics of the element 1 are measured. Further, the leads 2 are inserted cracking cuts of a mercury removal film to come into contact with the mercury 5 in the grooves 4 electrically. When the leads 2 are taken out, the mercury 5 sticking on the leads 2 contacts the mercury removal film and is put back to the grooves 4. The mercury 5 sticking on the leads 2 can be removed through the above operation.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a semiconductor measuring device that measures the electrical characteristics of a device under test by bringing it into contact with a plurality of leads of the device under test. [Prior Art] FIG. 3 is a perspective view of a conventional semiconductor measuring device. In the figure, (8) is an arrangement of a plurality of leads (2) so as to be in electrical contact with a plurality of leads (2) of a device to be measured (1). A plurality of contact terminals are embedded in the insulating block (3) in accordance with the above. (6) is a plurality of terminals in which a plurality of contact terminals (8) embedded in an insulating block (3) are led out perpendicularly to the insulating block surface from the opposite surface of the insulating block (3) from the surface on which the contact terminals exist. 0 Next, the operation of the semiconductor measuring device will be explained. 0 A plurality of terminals (6) of the semiconductor measuring device are electrically connected to a device under test device (not shown), and a plurality of leads (2) of the device under test (1) is brought into electrical contact with a plurality of touch terminals (8) by a device to be measured (not shown). This operation establishes an electrical connection between the device to be measured test device (not shown) and the device to be measured (1), and the electrical characteristics of the device to be measured are measured.

[Problem to be solved by the invention]

Conventional semiconductor measurement equipment was configured as described above, which caused electrical contact failures between the multiple leads of the device under test and the multiple contact terminals that were the contact means of the semiconductor measurement equipment, resulting in a failure in testing the device under test. There was a problem in that the device and the device under test were not electrically connected.

This invention was made in order to solve the above-mentioned problems, and eliminates electrical contact failure between the plurality of leads of the device to be measured and the plurality of contact means of the semiconductor measuring device.
It is an object of the present invention to provide a semiconductor measuring device that can reliably electrically connect a device under test test device and a device under test.

[Means to solve the problem]

A semiconductor measuring device according to the present invention includes a plurality of grooves arranged in an insulating block according to a plurality of lead arrangements of a device to be measured, mercury injected into the plurality of grooves, and electrical conduction with the mercury. It is equipped with a plurality of conductors embedded in an insulator.

[Operation] The semiconductor measuring device according to the present invention includes mercury as a contact means for electrically contacting the plurality of leads of the device to be measured, so that the plurality of leads of the device to be measured and the plurality of contact means of the semiconductor measuring device To ensure electrical connection between an element to be measured test device and an element to be measured by eliminating poor electrical contact between the element and the element to be measured.

〔Example〕

An embodiment of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a semiconductor measuring device according to an embodiment of the present invention. In the figure, (4) is a plurality of grooves into which a plurality of leads (2) of a device to be measured (1) are inserted, and the plurality of grooves (4) are an insulating block (3) made of an insulating material, in which a plurality of leads are inserted. (2), and each groove (4) is injected with mercury (5).

(6) is buried in the insulating block (3) so as to be electrically conductive with the mercury (5) in the groove (4), and is connected to the insulating block surface from the opposite side to the insulating block surface where the groove (4) is present. A plurality of terminals are respectively led out perpendicularly to the terminal.

Fig. 2 (a) is a perspective view showing the mercury removal function. The material pasted with J'JIJ functions as a mercury remover.

Next, the operation of the above embodiment will be explained. A plurality of terminals (6) of the semiconductor measuring device are electrically connected to a device under test test device (not shown), and a plurality of leads (2) of the device under test (1) are connected to a plurality of terminals (6) by a device under test moving device (not shown). The device under test (1) is electrically connected to the device under test (not shown) through the operation and structure of 0 or more elements that are inserted into the groove (4) and electrically contact the mercury (5) in the groove (4). is performed reliably, and the electrical characteristics of the device under test are measured.

FIG. 2(b) is a perspective view when the lead is inserted. Lead (
2) is inserted through a cut in the mercury removal membrane (7) and makes electrical contact with the mercury (5) in the groove (4).
), the mercury (5) adhering to the lead (2) touches the mercury removal membrane (7) and is returned to the groove (4). This action allows the mercury (5) attached to the lead (2) to be removed.

〔Effect of the invention〕

As described above, according to the present invention, a plurality of grooves are arranged in an insulating block according to the plurality of lead arrangements of the device to be measured, and mercury injected into the plurality of grooves is electrically conductive with the mercury. Since the device is equipped with a plurality of conductors embedded in the insulator, there is no electrical contact failure between the plurality of leads of the device under test and the plurality of contact means of the semiconductor measuring device, and the connection between the device under test test device and the device under test is eliminated. This has the effect of ensuring reliable electrical connection with the measuring element.

[Brief explanation of drawings]

FIG. 1 is an exploded perspective view of a semiconductor measuring device according to an embodiment of the present invention, FIG. 2(a) is an exploded perspective view showing a mercury removal function, FIG. FIG. 3 is an exploded perspective view of a conventional semiconductor measuring device. In the figure, (1) is the device under test, (2) is the lead, (
3) is an insulating block, (4) is a groove, (5) is mercury, (6
) indicates the terminal, and (7) indicates the mercury removal membrane. In addition, in the figures, the same reference numerals indicate the same or equivalent parts.

Claims (1)

[Claims] In a semiconductor measuring device that measures the electrical characteristics of a device under test by electrically contacting a plurality of leads of the device under test, a block of an insulator has a plurality of grooves arranged in accordance with the arrangement of the plurality of leads of the device under test. , comprising mercury injected into the plurality of grooves, a plurality of conductors embedded in the insulator to be electrically conductive with the mercury, and a mercury removal film provided at the groove entrance part of the block. Features of semiconductor measurement equipment.