JPH0229520U - - Google Patents

Info

Publication number
JPH0229520U
JPH0229520U JP10851788U JP10851788U JPH0229520U JP H0229520 U JPH0229520 U JP H0229520U JP 10851788 U JP10851788 U JP 10851788U JP 10851788 U JP10851788 U JP 10851788U JP H0229520 U JPH0229520 U JP H0229520U
Authority
JP
Japan
Prior art keywords
hot plate
wafer
oven
plate oven
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10851788U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10851788U priority Critical patent/JPH0229520U/ja
Publication of JPH0229520U publication Critical patent/JPH0229520U/ja
Pending legal-status Critical Current

Links

JP10851788U 1988-08-17 1988-08-17 Pending JPH0229520U (un)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10851788U JPH0229520U (un) 1988-08-17 1988-08-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10851788U JPH0229520U (un) 1988-08-17 1988-08-17

Publications (1)

Publication Number Publication Date
JPH0229520U true JPH0229520U (un) 1990-02-26

Family

ID=31343927

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10851788U Pending JPH0229520U (un) 1988-08-17 1988-08-17

Country Status (1)

Country Link
JP (1) JPH0229520U (un)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128221U (un) * 1990-03-30 1991-12-24

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03128221U (un) * 1990-03-30 1991-12-24

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