JPH0229520U - - Google Patents
Info
- Publication number
- JPH0229520U JPH0229520U JP10851788U JP10851788U JPH0229520U JP H0229520 U JPH0229520 U JP H0229520U JP 10851788 U JP10851788 U JP 10851788U JP 10851788 U JP10851788 U JP 10851788U JP H0229520 U JPH0229520 U JP H0229520U
- Authority
- JP
- Japan
- Prior art keywords
- hot plate
- wafer
- oven
- plate oven
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10851788U JPH0229520U (bs) | 1988-08-17 | 1988-08-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10851788U JPH0229520U (bs) | 1988-08-17 | 1988-08-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229520U true JPH0229520U (bs) | 1990-02-26 |
Family
ID=31343927
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10851788U Pending JPH0229520U (bs) | 1988-08-17 | 1988-08-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229520U (bs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128221U (bs) * | 1990-03-30 | 1991-12-24 |
-
1988
- 1988-08-17 JP JP10851788U patent/JPH0229520U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03128221U (bs) * | 1990-03-30 | 1991-12-24 |