JPH02294280A - Tubular electrostrictive rotor and motor - Google Patents

Tubular electrostrictive rotor and motor

Info

Publication number
JPH02294280A
JPH02294280A JP1114249A JP11424989A JPH02294280A JP H02294280 A JPH02294280 A JP H02294280A JP 1114249 A JP1114249 A JP 1114249A JP 11424989 A JP11424989 A JP 11424989A JP H02294280 A JPH02294280 A JP H02294280A
Authority
JP
Japan
Prior art keywords
pipe
rotor
electrostrictive
polarized
common electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1114249A
Other languages
Japanese (ja)
Inventor
Akio Kumada
熊田 明生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PIEZO TEC KK
Original Assignee
PIEZO TEC KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by PIEZO TEC KK filed Critical PIEZO TEC KK
Priority to JP1114249A priority Critical patent/JPH02294280A/en
Publication of JPH02294280A publication Critical patent/JPH02294280A/en
Pending legal-status Critical Current

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

PURPOSE:To increase the output of a rotor by a method wherein a piezoelectric ceramic pipe is provided with a common electrode on one circumferential sur face and with 4-phase exciting electrodes, divided into four equal segments, on the other circumferential surface. CONSTITUTION:An ultrasonic motor is provided with a tubular electrostrictive rotor 10. The rotor 10 is constituted of a common electrode 3, provided on the whole surface of the inner circumferential surface of a pipe 1, and belt type individual electrodes 4-7 provided on the outer circumferential surface of the same. 2-phase oscillator 9 is connected between the discrete electrodes 4, 6 and the discrete electrodes 5, 7 and 4-phase AC voltage, whose phases are deviated by 90 deg. respectively is impressed on the electrodes.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は、超音波振動子およびそれを用いた超音波モー
タに係り、特にパイプ状電歪公転子およびそれを用いた
超音波モータに関するものである。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an ultrasonic vibrator and an ultrasonic motor using the same, and particularly relates to a pipe-shaped electrostrictive rotator and an ultrasonic motor using the same. It is.

[従来技術] 強力超音波技術の分野では、たて振動を応用したものが
圧倒的多数で、振動源にはランジュバン振動子が用いら
れている。最近、超音波モータが開発され、強力な楕円
振動が必要となり,種々の楕円振動子が提案されている
[Prior Art] In the field of high-intensity ultrasonic technology, the overwhelming majority of technologies apply vertical vibration, and a Langevin oscillator is used as the vibration source. Recently, ultrasonic motors have been developed, requiring strong elliptical vibration, and various elliptical vibrators have been proposed.

ところで本発明者は,単なる楕円振動によらない超音波
モータ、すなわち「重心回転型超音波モータ』 (特願
昭62−11374号)を提案した.このモータに用い
る超音波振動子は「超音波回転振動子ノ (特願昭62
−11373号)に記載されているように、半円部分が
互いに逆極性となるように厚み方向に分極された圧電振
動子である。
By the way, the present inventor has proposed an ultrasonic motor that does not rely on mere elliptical vibration, that is, a "center of gravity rotation type ultrasonic motor" (Japanese Patent Application No. 11374/1983).The ultrasonic vibrator used in this motor is Rotating oscillator (patent application 1986)
11373), this piezoelectric vibrator is polarized in the thickness direction so that the semicircular portions have opposite polarities.

[発明が解決しようとする課題] 強力な振動を発生させるためには,印加電気量を増大す
るようにアドミツタンスが小さくなく薄板で大面積の構
造にすべきところ、径が共振周波数に関係するので、印
加すべき周波数を決めると振動子の径が決まり、従って
面積が決まってしまい細いパイプ状にすると励振周波数
が高周波数になり過ぎ、効率よく励振できないという難
点を有している.一方、例えば医療用内診鏡、ドリルな
どの分野では、直径3m程度の細いパイプ状モータが有
望されている. 本発明の目的は、このような従来技術の欠点を解消し,
強力な出力が得られるパイプ状電歪公転子およびそれを
用いたモータを提供するにある。
[Problem to be solved by the invention] In order to generate strong vibrations, the structure should be made of a thin plate with a large area and not a small admittance in order to increase the amount of applied electricity, but since the diameter is related to the resonant frequency, However, when the frequency to be applied is determined, the diameter of the vibrator is determined, and therefore the area is determined, and if it is made into a thin pipe shape, the excitation frequency becomes too high, making it difficult to excite efficiently. On the other hand, in fields such as medical endoscopes and drills, thin pipe-shaped motors with a diameter of about 3 m are showing promise. The purpose of the present invention is to eliminate such drawbacks of the prior art,
The object of the present invention is to provide a pipe-shaped electrostrictive rotor that can obtain a strong output, and a motor using the same.

[i9!題を解決するための手段] この目的を達成するため、本発明は、軸方向の長さが円
周方向の長さよりも長い圧電セラミックからなるパイプ
と、 そのパイプの内周面ならびに外周面のいずれか一方の局
面のほぼ全面に設けられた共通電極と、そのパイプの内
周面ならびに外周面のいずれか他方の周面に二等分され
た分極電極とを有し、前記共通電極と分極電極との間へ
の電圧印加により,前記パイプを直径で軸方向に沿って
分割した二つの領域が、パイプの厚さ方向に向って互い
に逆極性に分極されて正領域と負領域とを形成するよう
に構成されていることを特徴とするものである. 前述の目的を達成するため、さらに本発明は,軸方向の
長さが円周方向の長さよりも長い圧電セラミックスから
なるパイプと, そのパイプの内周面ならびに外周面のいずれか一方の周
面のほぼ全面に設けられた共通電極と、そのパイプの内
周面ならびに外周面のいずれか他方の局面に二等分され
た分極電極とを有し、前記共通電極と分極電極との間へ
の電圧印加により、前記パイプを直径で軸方向に沿って
分割した二つの領域が、パイプの厚さ方向に向って互い
に逆極性に分極されて正領域と負領域とを形成させた後
,二分された分極電極を短絡し,一つの単相励振電極と
して用いるか、若しくは分極電極をさらに二分割して四
相励振電極として用いるよう1;構成されたパイプ状電
歪公転子と、この電歪公転子と接触して移動する可動子
とを備えたことを特徴とするものである。
[i9! Means for Solving the Problem] In order to achieve this object, the present invention provides a pipe made of piezoelectric ceramic whose axial length is longer than its circumferential length, and a pipe whose inner and outer circumferential surfaces are It has a common electrode provided on almost the entire surface of one of the pipes, and a polarized electrode divided into two parts on the other of the inner peripheral surface and the outer peripheral surface of the pipe, and the polarized electrode is polarized with the common electrode. By applying a voltage between the pipe and the electrode, two regions obtained by dividing the pipe along the axial direction are polarized to opposite polarities in the thickness direction of the pipe, forming a positive region and a negative region. It is characterized by being configured to: In order to achieve the above-mentioned object, the present invention further provides a pipe made of piezoelectric ceramic whose axial length is longer than its circumferential length, and one of the inner circumferential surface and outer circumferential surface of the pipe. A common electrode is provided on almost the entire surface of the pipe, and a polarized electrode is divided into two parts on either the inner peripheral surface or the outer peripheral surface of the pipe, and a polarized electrode is provided between the common electrode and the polarized electrode. By applying a voltage, the two regions obtained by dividing the pipe along its diameter along the axial direction are polarized to opposite polarities in the thickness direction of the pipe to form a positive region and a negative region, and then are bisected. The polarized electrode is short-circuited and used as one single-phase excitation electrode, or the polarized electrode is further divided into two and used as a four-phase excitation electrode. It is characterized by comprising a movable element that moves in contact with the child.

[作用] 前述の四相励振型では、圧電セラミックからなるパイプ
の一方の局面に共通電極を、他方の周面に四等分された
四相励振電極をそれぞれ設け、共通電極と各個別電極と
の間にπ/2づつ位相の異なる電圧を印加することによ
り、パイプの重心が中心の周りの円周上を公転するモー
ドを励振でき、周波数を調整し、このモードを共振させ
ることができる。一方、単相励振型では,単相励振電極
と共通電極の間に単相共振電圧を印加して公転モードを
共振させることができる。本発明では、この重心が中心
の周りを公転するモードの共振子を電歪公転子と称して
いる. ところでこの電歪公転子の共振周波数はパイプの径に因
らず、パイプの長さに因るのでパイプの長さを長くすれ
ば細いパイプでも低い共振周波数を得ることでき、細長
いパイプ状の電歪公転子ならびにそれを用いた超音波モ
ータを得ることができる。
[Function] In the four-phase excitation type described above, a common electrode is provided on one side of the pipe made of piezoelectric ceramic, and a four-phase excitation electrode divided into four equal parts is provided on the other peripheral surface, and the common electrode and each individual electrode are connected to each other. By applying voltages with different phases by π/2 between the pipes, it is possible to excite a mode in which the center of gravity of the pipe revolves on the circumference around the center, and by adjusting the frequency, it is possible to make this mode resonate. On the other hand, in the single-phase excitation type, a single-phase resonant voltage can be applied between the single-phase excitation electrode and the common electrode to cause the revolution mode to resonate. In the present invention, a resonator in a mode in which the center of gravity revolves around the center is referred to as an electrostrictive resonator. By the way, the resonant frequency of this electrostrictive rotor does not depend on the diameter of the pipe, but on the length of the pipe, so if you increase the length of the pipe, you can obtain a low resonant frequency even with a thin pipe. A strained revolving element and an ultrasonic motor using the same can be obtained.

[実施例] 次に本発明の実施例を図とともに説明する。第1図はパ
イプの斜視図、第2図はそのパイプを用いた電歪公転子
の結線図、第3図は第2図X−X線上の断面図、第4図
(a),(b).(c),(d)は電歪公転子における
圧電変形の状態を示す説明図である. バイプ1はPb (Zr Ti)O,系の圧電セラミッ
クからなり,その軸方向の長さLは円周方向の長さ(π
D)よりも長く設計され、中空穴2を有する。
[Example] Next, an example of the present invention will be described with reference to the drawings. Fig. 1 is a perspective view of the pipe, Fig. 2 is a wiring diagram of an electrostrictive rotor using the pipe, Fig. 3 is a sectional view taken on line X-X of Fig. 2, and Figs. 4 (a), (b). ). (c) and (d) are explanatory diagrams showing the state of piezoelectric deformation in the electrostrictive rotor. The vip 1 is made of Pb (Zr Ti) O type piezoelectric ceramic, and its axial length L is equal to the circumferential length (π
D) is designed longer and has a hollow hole 2.

第2図に示すように、パイプ1の内周面にはそれのほぼ
全面にわたって共通電極3が施こされ,パイプ1の外周
面にはほぼ同じ面積の帯状をした個別電極4,5,6.
7が施こされている。そして同図に示すように共通電極
3はアースされ,個別電極4,6および個別電極5,7
がそれぞれ共通に接続され、それぞれ正および負の直流
高電圧を印加して分極処理を行なった.図中の矢印8は
分極方向を示しており、この分極処理によりパイプ1を
直径方向で軸方向に沿って分割した二つの領域が、バイ
プ1の厚さ方向に向って互いに逆極性に分極されて正領
域と負領域が形成される.そして個別電極4,6と個別
電極5,7との間に二相発振器9が接続され、周波数4
0KHz、電圧50Vの位相が90’づつずれた四相交
流電圧が印加されるようになっている.このようにして
、パイプ状の電歪公転子10が構成されている.第4図
はこの電歪公転子10の圧電変形の状態を示す図で、図
中の実線の電歪公転子10は電圧印加時,点線の電歪公
転子10は電圧を印加していないときの状態を示してい
る。90゜づつ位相の異なる電圧を順次個別電極4〜7
に印加することにより、同図の(a)〜(d)に示すよ
うに重心Gがパイプ1の中心Oの周りを公転する。前述
のように共振周波数を40Kl{zにすれば、公転速度
は240X10’r.p.m.の超高速となる。
As shown in FIG. 2, a common electrode 3 is provided on the inner circumferential surface of the pipe 1 over almost the entire surface thereof, and individual electrodes 4, 5, 6 in the form of strips with approximately the same area are provided on the outer circumferential surface of the pipe 1. ..
7 has been applied. As shown in the figure, the common electrode 3 is grounded, and the individual electrodes 4 and 6 and the individual electrodes 5 and 7
were connected in common, and polarization was performed by applying positive and negative DC high voltages to each. The arrow 8 in the figure indicates the polarization direction, and by this polarization process, the two regions obtained by dividing the pipe 1 in the diametrical direction along the axial direction are polarized with opposite polarities toward each other in the thickness direction of the pipe 1. A positive region and a negative region are formed. A two-phase oscillator 9 is connected between the individual electrodes 4 and 6 and the individual electrodes 5 and 7, and a frequency of 4
A four-phase AC voltage of 0 KHz and 50 V with a phase shift of 90' is applied. In this way, a pipe-shaped electrostrictive rotor 10 is constructed. FIG. 4 is a diagram showing the state of piezoelectric deformation of the electrostrictive rotor 10. In the figure, the electrostrictive rotor 10 shown by a solid line is when a voltage is applied, and the electrostrictive rotor 10 shown by a dotted line is when no voltage is applied. It shows the status of. Voltages with different phases of 90° are sequentially applied to individual electrodes 4 to 7.
, the center of gravity G revolves around the center O of the pipe 1, as shown in (a) to (d) of the figure. If the resonance frequency is set to 40Kl{z as mentioned above, the revolution speed will be 240X10'r. p. m. becomes extremely fast.

第5図は電歪公転子10の変形例を示す図で,この例の
場合パイプ1の内周面に個別電極4〜7が付設され、外
周面に共通電極3が付設されている.個別電極4〜7の
接続の仕方は第2図に示した例と同じであるから,それ
らの説明は省略する.第6図ないし第13図は、前記電
歪公転子10を用いた超音波モータの各実施例を説明す
るための図である。なおこれらの図において、図面の複
雑化を防ぐため、電極等の記載を省略している。
FIG. 5 is a diagram showing a modification of the electrostrictive rotor 10. In this example, individual electrodes 4 to 7 are attached to the inner peripheral surface of the pipe 1, and a common electrode 3 is attached to the outer peripheral surface. Since the method of connecting the individual electrodes 4 to 7 is the same as the example shown in FIG. 2, their explanation will be omitted. 6 to 13 are diagrams for explaining each embodiment of an ultrasonic motor using the electrostrictive rotor 10. FIG. Note that in these figures, descriptions of electrodes and the like are omitted to avoid complicating the drawings.

第6図ならびに第7図は、モータの第1実施例を示す斜
視図ならびに側面図である.この実施例の場合、電歪公
転子10の中空孔に回転シャフト11が挿入されている
.この実施例で第5図に示す構造の電歪公転子lOを用
いる場合は,個別電極4〜7間の導通を避けるために回
転シャフト11は電気絶縁体で形成するか、あるいは外
周面に電気!縁膜を設ける必要がある. 電歪公転子10に所定の共振周波数を有する電圧を印加
することにより,電歪公転子1oは第4図(a)〜(d
)に示すように重心Gが移動するとともに、第6図にお
いて点線で示すように順次軸方向に沿って湾曲する。そ
のため電歪公転子10の中空穴に回転シャフト11を軽
く挿入しても電歪公転子10の前述したような変形によ
り順次部分的に圧接し、回転シャフト11に回転力を付
与して矢印で示すように所定の方向に回転する。
6 and 7 are a perspective view and a side view showing a first embodiment of the motor. In this embodiment, a rotating shaft 11 is inserted into a hollow hole of an electrostrictive rotor 10. In this embodiment, when using the electrostrictive rotator lO having the structure shown in FIG. ! It is necessary to provide a marginal membrane. By applying a voltage having a predetermined resonant frequency to the electrostrictive rotor 10, the electrostrictive rotor 1o moves as shown in FIGS.
) as shown, the center of gravity G moves, and as shown by the dotted line in FIG. 6, it curves sequentially along the axial direction. Therefore, even if the rotary shaft 11 is lightly inserted into the hollow hole of the electrostrictive rotor 10, the deformation of the electrostrictive rotor 10 as described above causes the partial pressure contact, and rotational force is applied to the rotary shaft 11, causing the rotation shaft 11 to move as shown by the arrow. Rotate in a predetermined direction as shown.

第8図ならびに第9図は、超音波モータの第2実施例を
説明するための図である。この実施例の場合、電歪公転
子10に回転筒体12が外嵌され、電歪公転子10の圧
電変形により回転筒体12が回転するようになっている
. 第10図は超音波モータの第3実施例を説明するための
図で、回転自在に軸支された回転シャフト11が電歪公
転子1oが外周面に圧接され、電歪公転子10の圧電変
形により回転シャフト11が所定方向に回転するように
なっている。
FIG. 8 and FIG. 9 are diagrams for explaining a second embodiment of the ultrasonic motor. In the case of this embodiment, the rotating cylinder 12 is fitted onto the electrostrictive rotor 10, and the rotating cylinder 12 is rotated by piezoelectric deformation of the electrostrictive rotor 10. FIG. 10 is a diagram for explaining a third embodiment of the ultrasonic motor, in which a rotating shaft 11 that is rotatably supported is connected to an electrostrictive rotor 10 in pressure contact with the outer peripheral surface of the electrostrictive rotor 10. The deformation causes the rotating shaft 11 to rotate in a predetermined direction.

第11図は超音波モータの第4実施例を説明するための
図で、電歪公転子10の外周面に例えばICカード、磁
気カード、転写紙などの移動体13がローラ14によっ
て圧接されている。そして電歪公転子10の圧電変形に
より,移動体13が所定の方向に移動するようになって
いる。
FIG. 11 is a diagram for explaining a fourth embodiment of the ultrasonic motor, in which a moving body 13 such as an IC card, a magnetic card, or a transfer paper is pressed against the outer peripheral surface of an electrostrictive rotor 10 by a roller 14. There is. The piezoelectric deformation of the electrostrictive rotor 10 causes the movable body 13 to move in a predetermined direction.

第12図は、超音波モータの第5実施例を説明するため
の図である.この実施例の場合、回転円板15が電歪公
転子1oがその一方の端面にバネ16によって軽く弾接
されている。図中の17はボルト、18は基台である. 第13図は、超音波モータの第6実施例を説明するため
の図である。この実施例の場合,内側にV溝19を有す
る2つのローラ20が電歪公転子10の両端にバネ16
によって弾接されている。
FIG. 12 is a diagram for explaining a fifth embodiment of the ultrasonic motor. In this embodiment, the electrostrictive rotor 1o of the rotating disk 15 is lightly elastically contacted by a spring 16 on one end surface thereof. In the figure, 17 is a bolt and 18 is a base. FIG. 13 is a diagram for explaining a sixth embodiment of the ultrasonic motor. In the case of this embodiment, two rollers 20 having V grooves 19 on the inside are provided with springs 16 at both ends of the electrostrictive rotor 10.
is bombarded by.

[効果] 本発明は前述のような構成になっているため、電歪公転
子に基づく出力を大きくとることができ、例えば時計や
胃カメラの恥動部など種々の用途が可能である。
[Effects] Since the present invention has the above-described configuration, it is possible to obtain a large output based on the electrostrictive rotor, and it is possible to use it in various applications such as, for example, a watch or a pubic part of a gastrocamera.

【図面の簡単な説明】[Brief explanation of the drawing]

図面はすべて本発明の実施例を説明するためのもので、
第1図はパイプの斜視図、第2図はそのパイプを用いた
電歪公転子の結線図5第3図は第2図x−xi上の断面
図、第4図(a),(b),(c),(d)は電歪公転
子における圧電変形の状態を示す説明図、第5図は電歪
公転子の変形例を示す一部を断面した平面図である。 第6図ならびに第7図は第1実施例に係る超音波モータ
の斜視図ならびに側面図、第8図ならびに第9図は第2
実施例に係る超音波モータの断面図ならびに斜視図、第
10図、第11図、第12図ならびに第13図は他の実
施例に係る超音波モータの説明図である。 1・・・・・・パイプ,2・・・・・・中空穴、3・・
・・・・共通電極,4,5,6,7・・・・・・個別電
極、8・・・・・・分極方向,9・・・・・・二相発振
器、10・・・・・・電歪公転子、11・・・・・・回
転シャフト、12・・・・・・回転筒体、13・・・・
・・移動体、14.20・・・・・・ローラ、15・・
・・・・回転円板。 第1図 第4図 (a) (b) (C) (d) 第 図 第 図 第 図 第11図 第12図 第 図 第 図 第lθ図 第13図
All drawings are for illustrating embodiments of the present invention.
Fig. 1 is a perspective view of the pipe, Fig. 2 is a wiring diagram of an electrostrictive rotor using the pipe, Fig. 3 is a sectional view on Fig. 2 x-xi, Fig. 4 (a), (b) ), (c), and (d) are explanatory diagrams showing states of piezoelectric deformation in the electrostrictive rotor, and FIG. 5 is a partially sectional plan view showing a modified example of the electrostrictive rotor. 6 and 7 are perspective views and side views of the ultrasonic motor according to the first embodiment, and FIGS. 8 and 9 are the second embodiment.
10, 11, 12, and 13 are explanatory diagrams of ultrasonic motors according to other embodiments. 1...pipe, 2...hollow hole, 3...
...Common electrode, 4,5,6,7...Individual electrode, 8...Polarization direction, 9...Two-phase oscillator, 10...・Electrostrictive rotor, 11...Rotating shaft, 12...Rotating cylinder, 13...
・・Mobile object, 14.20・・・・Roller, 15・・
...Rotating disk. Figure 1 Figure 4 (a) (b) (C) (d) Figure Figure Figure 11 Figure 12 Figure Figure lθ Figure Figure 13

Claims (2)

【特許請求の範囲】[Claims] (1)軸方向の長さが円周方向の長さよりも長い圧電セ
ラミックからなるパイプと、 そのパイプの内周面ならびに外周面のいずれか一方の周
面のほぼ全面に設けられた共通電極と、そのパイプの内
周面ならびに外周面のいずれか他方の周面に二等分され
た分極電極とを有し、前記共通電極と分極電極との間へ
の電圧印加により、前記パイプを直径で軸方向に沿つて
分割した二つの領域が、パイプの厚さ方向に向つて互い
に逆極性に分極されて正領域と負領域とを形成するよう
に構成されていることを特徴とするパイプ状電歪公転子
(1) A pipe made of piezoelectric ceramic whose axial length is longer than its circumferential length, and a common electrode provided on almost the entire surface of either the inner or outer peripheral surface of the pipe. , has a polarized electrode divided into two equal parts on either the inner circumferential surface or the outer circumferential surface of the pipe, and by applying a voltage between the common electrode and the polarized electrode, the pipe is divided in diameter. A pipe-shaped electric current characterized in that the two regions divided along the axial direction are polarized to opposite polarities toward each other in the thickness direction of the pipe to form a positive region and a negative region. Distortion rotor.
(2)軸方向の長さが円周方向の長さよりも長い圧電セ
ラミックスからなるパイプと、 そのパイプの内周面ならびに外周面のいずれか一方の周
面のほぼ全面に設けられた共通電極と、そのパイプの内
周面ならびに外周面のいずれか他方の周面に二等分され
た分極電極とを有し、前記共通電極と分極電極との間へ
の電圧印加により、前記パイプを直径で軸方向に沿つて
分割した二つの領域が、パイプの厚さ方向に向かつて互
いに逆極性に分極されて正領域と負領域とを形成するよ
うに構成されたパイプ状電歪公転子と、この電歪公転子
と接触して移動する可動子とを備えたことを特徴とする
超音波モータ。
(2) A pipe made of piezoelectric ceramics whose axial length is longer than its circumferential length, and a common electrode provided on almost the entire surface of either the inner or outer peripheral surface of the pipe. , has a polarized electrode divided into two equal parts on either the inner circumferential surface or the outer circumferential surface of the pipe, and by applying a voltage between the common electrode and the polarized electrode, the pipe is divided in diameter. A pipe-shaped electrostrictive revolving element configured such that two regions divided along the axial direction are polarized to opposite polarities toward each other in the thickness direction of the pipe to form a positive region and a negative region; An ultrasonic motor comprising an electrostrictive rotor and a movable element that moves in contact with the rotor.
JP1114249A 1989-05-09 1989-05-09 Tubular electrostrictive rotor and motor Pending JPH02294280A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1114249A JPH02294280A (en) 1989-05-09 1989-05-09 Tubular electrostrictive rotor and motor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1114249A JPH02294280A (en) 1989-05-09 1989-05-09 Tubular electrostrictive rotor and motor

Publications (1)

Publication Number Publication Date
JPH02294280A true JPH02294280A (en) 1990-12-05

Family

ID=14633036

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1114249A Pending JPH02294280A (en) 1989-05-09 1989-05-09 Tubular electrostrictive rotor and motor

Country Status (1)

Country Link
JP (1) JPH02294280A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002315368A (en) * 2001-04-09 2002-10-25 Nidec Copal Corp Ultrasonic motor
JP2002357760A (en) * 2001-05-31 2002-12-13 Nidec Copal Corp Lens driving device for camera
JP2003033054A (en) * 2001-07-19 2003-01-31 Nidec Copal Corp Ultrasonic motor device
JP2005143297A (en) * 1996-12-19 2005-06-02 Asmo Co Ltd Ultrasonic motor
WO2006098375A1 (en) * 2005-03-15 2006-09-21 National University Corporation Okayama University Ultrasonic motor
JP2007060888A (en) * 2005-07-26 2007-03-08 Pentax Corp Two-dimensional moving device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277072A (en) * 1985-09-26 1987-04-09 Sony Corp Linear actuator

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277072A (en) * 1985-09-26 1987-04-09 Sony Corp Linear actuator

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005143297A (en) * 1996-12-19 2005-06-02 Asmo Co Ltd Ultrasonic motor
JP2002315368A (en) * 2001-04-09 2002-10-25 Nidec Copal Corp Ultrasonic motor
JP2002357760A (en) * 2001-05-31 2002-12-13 Nidec Copal Corp Lens driving device for camera
JP4667646B2 (en) * 2001-05-31 2011-04-13 日本電産コパル株式会社 Camera lens drive device
JP2003033054A (en) * 2001-07-19 2003-01-31 Nidec Copal Corp Ultrasonic motor device
WO2006098375A1 (en) * 2005-03-15 2006-09-21 National University Corporation Okayama University Ultrasonic motor
JP5039974B2 (en) * 2005-03-15 2012-10-03 国立大学法人 岡山大学 Ultrasonic motor
JP2007060888A (en) * 2005-07-26 2007-03-08 Pentax Corp Two-dimensional moving device

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