JPH02293725A - Plural simultaneous imaging type optical device - Google Patents

Plural simultaneous imaging type optical device

Info

Publication number
JPH02293725A
JPH02293725A JP1113942A JP11394289A JPH02293725A JP H02293725 A JPH02293725 A JP H02293725A JP 1113942 A JP1113942 A JP 1113942A JP 11394289 A JP11394289 A JP 11394289A JP H02293725 A JPH02293725 A JP H02293725A
Authority
JP
Japan
Prior art keywords
light
screen
image
reflected
beam splitter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1113942A
Other languages
Japanese (ja)
Other versions
JPH0468610B2 (en
Inventor
Kazuo Saito
一男 斎藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WAKASA KOGAKU KENKYUSHO KK
Original Assignee
WAKASA KOGAKU KENKYUSHO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WAKASA KOGAKU KENKYUSHO KK filed Critical WAKASA KOGAKU KENKYUSHO KK
Priority to JP1113942A priority Critical patent/JPH02293725A/en
Publication of JPH02293725A publication Critical patent/JPH02293725A/en
Publication of JPH0468610B2 publication Critical patent/JPH0468610B2/ja
Granted legal-status Critical Current

Links

Abstract

PURPOSE:To allow the viewing of both of a partially magnified projection and overall reduced projection with a sufficient light quantity and sharp image quality by condensing the light transmitted through the same sample by a common lens, then bisecting the light by a beam splitter and introducing the split light beams to a macroprojecting system and a reduction image pickup system. CONSTITUTION:The light from the light source 1 is made incident through a heat absorbing plate 2, a cold mirror 3 and a condenser lens 4 on the transmission sample 5, such as photographic negative and the transmitted ray thereof is introduced via the common projecting lens 14 and a mirror 15 to the beam splitter 16, by which the ray is bisected to two luminous fluxes. The 1st luminous flux 17 is macroprojected onto a transmission screen 19 as it is or after the flux is reflected by a 2nd mirror 18. The 2nd luminous flux 20 is reflected by a reflection screen 21 and is then further reflected by a 2nd beam splitter 22. This luminous flux is condensed by an image pickup lens 23 and is subjected to the reduction image pickup by an image sensor 24. The simultaneous viewing of the partially magnified image of, for example, a microfilm and the overall reduced image thereof by associating both the images is possible in this way.

Description

【発明の詳細な説明】 [産業上の利用分野] この発明は、像を光学的に投影するプロジエクタを含む
光学装置に関し、より詳言すれば、同一の試料から同時
に複数の像を結ばせ得る光学装置に関し、更に一層詳言
すれば、同一の試料から同時に複数の、ただし、大きさ
の著し《異なる像をいずれも鮮明な画質で結ばさせ得る
光学装置に関する。
[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to an optical device including a projector that optically projects an image, and more specifically, it is capable of simultaneously forming a plurality of images from the same sample. The present invention relates to an optical device, and more specifically, to an optical device that can simultaneously form a plurality of images of significantly different sizes from the same sample, all with clear image quality.

[従来の技術] 従来周知のプロジェクタは、単一の試料から単の像を結
ぶ光学系からなるものであり、同一の試料から同時に複
数の像を得るプロジエクタは、従来、その必要性が見出
されなかったために、存在しない。
[Prior Art] A conventionally well-known projector consists of an optical system that forms a single image from a single sample, and the need for a projector that simultaneously forms multiple images from the same sample has not been found in the past. It does not exist because it was not done.

しかしながら、理論的には、第2図で示すように、従来
周知の単一投影光学系すなわち光源1、熱吸収板2、コ
ールドミラー3、コンデンザーレンズ4、透過試料5、
拡大投影レンズ6を経てスクリーン7上に結像する光学
系に対し、その途中すなわち透過試料5と投影レンズ6
との間にビムスブリッター8を介挿して、そこから側方
に光束を導き出し、X点に第2の拡大投影レンズ9を設
け、Y点に第2のスクリーン10を設ければ、その第2
のスクリーン10上に第2の拡大投影像が結ばれること
は容易に考えられる。
However, theoretically, as shown in FIG.
For the optical system that forms an image on the screen 7 via the enlarged projection lens 6, there is a transmission sample 5 and the projection lens 6.
If a beam splitter 8 is inserted between the 2
It is easy to imagine that the second enlarged projection image will be formed on the screen 10 of.

〔発明が解決しようとする課題] ところが、上記の手法では、双方の結像の大きさが或る
程度の差異の範囲内に限定され、例えば、第2図で示す
ように、一方の結像の大きさをイメージセンサー12に
入力可能となるように極小にしたい場合に光量不足の点
て問題が生じる。すなわち、拡大投影光学系における集
光レンズ6と縮小投影光学系における集光レンズ11の
ビームスプリッタ−8からの距離的な位置が、拡大縮小
に反比例して、前者が近く、後者が遠く設定され、それ
が原因となって、ビームスプリッター8から遠く設定さ
れた撮像レンズl1に取り入れられる光量がBに限定さ
れ、大部分の光量Aが前配撮像レンズl1の外へ逸散す
る。従って、イメージセンサー12に入射される照明条
件が極端に悪く、画面の周辺部が暗くなり、使用に耐え
ない。
[Problems to be Solved by the Invention] However, in the above method, the sizes of the two images are limited to a certain degree of difference, and for example, as shown in FIG. When it is desired to minimize the size of the image so that it can be input to the image sensor 12, a problem arises in that the amount of light is insufficient. That is, the distance positions of the condenser lens 6 in the enlargement projection optical system and the condenser lens 11 in the reduction projection optical system from the beam splitter 8 are set so that the former is close and the latter is far in inverse proportion to the enlargement/contraction. As a result, the amount of light taken into the imaging lens l1 set far from the beam splitter 8 is limited to B, and most of the amount of light A is dissipated to the outside of the front imaging lens l1. Therefore, the illumination conditions incident on the image sensor 12 are extremely poor, and the periphery of the screen becomes dark, making it unusable.

その弊害を除去する一案として、例えば、光源lの直前
の位置に拡散板13を挿入すれば、イメージセンサー1
2の映像における周辺の光量を若干増加し得るが、今度
は、逆に、その分だけ、スクリーン7上の明るさが低下
するので、これもまた実用的でない。
As an idea to eliminate this problem, for example, if a diffuser plate 13 is inserted in the position immediately in front of the light source l, the image sensor 1
Although it is possible to slightly increase the amount of light at the periphery of the image No. 2, the brightness on the screen 7 decreases by that amount, which is also not practical.

この発明は、上述するように、例えば、微細な被測定物
の形状や寸法等を読取り、検査し、または計測したい場
合に、一旦、その被測定物をカメラで撮影して写真ネガ
すなわち透過試料5を作成し、その微細な被測定物を、
一方のスクリーン7で部分的拡大投影を行なうと同時に
、他方のイメージセンザー12で被測定物全体の縮小投
影を行なって、被測定物の部分的拡大映像を常時その被
測定物全体に対する位置的な関連において杷握した状態
で検討を進めたい場合に、同一の試料から同時に2様の
投影、すなわち、部分的拡大投影と全体的縮小投影の双
方をいずれも充分な光量を有する鮮明な画質で得られる
光学装置を提供することを目的とする。
As described above, when it is desired to read, inspect, or measure the shape or dimensions of a minute object to be measured, the present invention first takes a photograph of the object with a camera and creates a photographic negative, that is, a transmission sample. 5, and the minute object to be measured,
One screen 7 performs a partially enlarged projection, and the other image sensor 12 simultaneously performs a reduced projection of the entire object to be measured. When you want to proceed with a study in a restrained state, you can simultaneously perform two types of projection from the same sample, namely, a partially enlarged projection and a completely reduced projection, both with clear image quality with sufficient light intensity. The object of the present invention is to provide an optical device obtained by the present invention.

[課題を解決するための手段J この発明は、上記の目的を達する手段として、光源から
透過試料、投影レンズを経てスクリーン上に結像する第
1の光束を、前記投影レンズと前記スクリーンとの間に
ミラーとビームスプリッターを介在させて、少くとも2
回反射させる拡大投影光学系を設ける一方、前記ミラー
から前記ビムスブリッターを透過した第2の光束を前記
スクリーンと共役の位置に設置される反射スクリーンで
反射させ、反射したその第2の光束を第2ビムスブリッ
ターを介して少くとも1回反射させた上で撮像レンズを
介し結像部に結像させる縮小撮像光学系を設ける。
[Means for Solving the Problems J] The present invention, as a means for achieving the above-mentioned object, transmits a first light beam from a light source, passes through a transmission sample, a projection lens, and forms an image on a screen, by connecting the projection lens and the screen. At least two beams with a mirror and a beam splitter interposed between them.
An enlarged projection optical system is provided to reflect the beam twice, and the second beam transmitted from the mirror through the BIM blitter is reflected by a reflection screen installed at a position conjugate with the screen, and the reflected second beam is A reduction imaging optical system is provided which causes the beam to be reflected at least once through a second beam splitter and then forms an image on an imaging section through an imaging lens.

〔作  用〕[For production]

拡大投影光学系における第1の光束と、縮小撮像光学系
における第2の光束は、同一の試料とJl:通の投影レ
ンズを経て共通のミラーにより同一方向に反射した後、
ビームスプリッターで2つに分光される。
The first light beam in the enlargement projection optical system and the second light beam in the reduction imaging optical system are reflected in the same direction by a common mirror after passing through the same sample and the projection lens.
The light is split into two by a beam splitter.

2分光した光のうち第1の光束は前記ビームスプリッタ
ーで屈折しスクリーン上に拡大投影される。
The first beam of the two divided beams is refracted by the beam splitter and is enlarged and projected onto the screen.

前記ビームスプリッターを透過した第2の光束は反射ス
クリーンの広い拡散性を利用して反射され、第2のビー
ムスプリッターで反射した後、撮像レンズを経て結像部
に縮小撮像される。
The second light flux that has passed through the beam splitter is reflected by utilizing the wide diffusivity of the reflective screen, and after being reflected by the second beam splitter, the second beam passes through the imaging lens and is imaged in a reduced size at the imaging section.

投影レンズが共通であるため、反射スクリーン上には拡
大投影光学系のスクリーン上と全く同じ同一試料の分像
が投影される。
Since the projection lens is common, the same partial image of the same sample is projected onto the reflection screen as on the screen of the enlarged projection optical system.

縮小撮像光学系に反射スクリーンを使用したので、その
スクリーンの面に対する第2の光束の入射角とその面か
ら反射する反射角に差異が生じて拡散し、指向性が大幅
に弱められた状態で第2の光束が撮像レンズに集光され
結像部に達するから、結像部にはその中心部と周辺部の
明るさに差異がなく、均一な明るさの画像が得られる。
Since a reflective screen is used in the reduction imaging optical system, there is a difference between the angle of incidence of the second light beam on the surface of the screen and the angle of reflection from that surface, causing it to be diffused and the directivity to be significantly weakened. Since the second light beam is focused on the imaging lens and reaches the imaging section, there is no difference in brightness between the center and the periphery of the imaging section, and an image with uniform brightness can be obtained.

〔実 施 例〕〔Example〕

この発明の具体的一実施例を第1図に従って以下に詳述
する。
A specific embodiment of the present invention will be described in detail below with reference to FIG.

まず、拡大投影光学系と縮小撮像光学系の双方に共通す
る光学系から説明すれば、例えば、写真ネガのような透
過試料5に対して、光源lからの光が熱吸収板2、コー
ルドミラー3、コンデンサレンズ4を経由して入射し、
その透過光線が共通の投影レンズ14で集光された後、
共通のミラ15で反射させられ、そのようにして反射し
た共通の光束がビームスブリッタ−16に達する。
First, to explain the optical system that is common to both the enlargement projection optical system and the reduction imaging optical system, for example, light from a light source 1 passes through a heat absorption plate 2, a cold mirror, and a transmission sample 5 such as a photographic negative. 3, enters via condenser lens 4,
After the transmitted light beam is focused by a common projection lens 14,
It is reflected by a common mirror 15, and the thus reflected common light beam reaches a beam splitter 16.

ビームスプリッター16に達した共通の光束はそこで2
つに分光し、一方はそこで反射して第1の光束l7に、
他方はそこを透過して第2の光束20となる。
The common beam reaching the beam splitter 16 is then divided into 2
One is reflected there and becomes the first light beam l7,
The other light beam passes therethrough and becomes a second light beam 20.

第1の光束l7は、そのまま、または第2のミラー18
によって更に反射させられて透過スクリン19上に拡大
投影される。
The first light beam l7 can be sent as is or to the second mirror 18.
The light is further reflected and enlarged and projected onto the transmission screen 19.

前記第2の光束20は反射スクリーン2lによって反射
させられ、反射した第2の光束20が第2のビームスブ
リッタ−22により更に反射させられ、反射した第2の
光束が撮像レンズ23で集光されて結像部例えばイメー
ジセンサー24に縮小撮像される。
The second light beam 20 is reflected by a reflective screen 2l, the reflected second light beam 20 is further reflected by a second beam splitter 22, and the reflected second light beam is condensed by an imaging lens 23. Then, a reduced image is captured by an imaging unit, for example, an image sensor 24.

この発明は、上記の実施例によって制限されるものでな
く、請求項に記載される範囲内におけるあらゆる改変に
及ぶものである。
This invention is not limited to the above embodiments, but extends to all modifications within the scope of the claims.

[発明の効果] 以上詳述したように、この発明は、同一の試料5を透過
する光を共通のレンズ14で集光した後、ビームスプリ
ッタ−16によって2分光し、それによって生じた反射
光すなわち第1の光束17を透過スクリーンl9上に拡
大投影する一方、前記ビームスプリッター16の透過光
すなわち第2の光束20を反射スクリーン2lに当てて
拡散させ指向性を弱めた状態にして第2のビームスプリ
ッター22を経由した後レンズ23で集光し結像部例え
ばイメージセンサー24に縮小撮像させるので、拡大投
影光学系における透過スクリーン19の照度を低下させ
ることなく、縮小撮像光学系における結像部24の照度
をその中心部及び周辺部にわたって均一な明るさが得ら
れる。従って、例えばマイクロフィルムの部分的拡大読
取映像とその全体的縮小モニター映像とを同時に投影乃
至撮像し、双方を関連させて検討することなどに使用し
て便利である。
[Effects of the Invention] As described in detail above, in the present invention, the light transmitted through the same sample 5 is focused by the common lens 14, and then divided into two parts by the beam splitter 16, and the resulting reflected light is That is, while the first light beam 17 is enlarged and projected onto the transmission screen l9, the transmitted light of the beam splitter 16, that is, the second light beam 20, is applied to the reflection screen 2l to be diffused and the directivity is weakened. After passing through the beam splitter 22, the light is condensed by the lens 23 and is reduced to an imaging unit, such as an image sensor 24, so that the image forming unit in the reduction imaging optical system can be reduced without reducing the illuminance of the transmission screen 19 in the enlargement projection optical system. 24, uniform brightness can be obtained over the center and periphery. Therefore, it is convenient to use it, for example, to simultaneously project or capture a partially enlarged read image of a microfilm and its overall reduced monitor image, and to examine the two in relation to each other.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は、この発明による複数同時結像型光学装置の具
体的一実施例を示す説明図、 第2図は、従来周知の拡大投影光学系を基礎にし、それ
から縮小投影光学系を分枝させた理論的に自明な複数同
時結像型光学装置の説明図である。 1・・・・光源、 2・・・・熱吸収板、 3・・・・コールドミラー 4・・・・コンデンサーレンズ、 5・・・・透過試料、 6・・・第1の拡大投影光学系の投影レンズ、7 ・・
・第1の拡大投影光学系のスクリーン、8・・・・ビー
ムスプリッター 9・・・第2の拡大投影光学系の投影レンズ、X・・・
・投影レンズ9の設定位置、 A・・・投影レンズ9によって集光される光量、10・
 ・第2の拡大投影光学系のスクリーン、Y・・・・ス
クリーンIOの設定位置、11・・・・縮小投影光学系
の投影レンズ、B・・・・投影レンズ1lによって集光
される光量、12・・・イメージセンサー(縮小投影光
学系の結像位置) l3・・拡散板、 l4・・・・共通の投影レンズ、 l5・・・・共通のミラ 16・・・・ビームスプリッタ 17・・・・第1の光束、 18・・・・第2のミラ l9・・・スクリーン例えば透過スクリ20・・・・第
2の光束、 21・・・・反射スクリーン、 22・・・・第2のビームスプリッター23・・・・撮
像レンズ、 24・・・・結像部例えばイメージセンザン、
FIG. 1 is an explanatory diagram showing a specific embodiment of a multiple simultaneous imaging type optical device according to the present invention, and FIG. 2 is an explanatory diagram showing a specific embodiment of a multiple simultaneous imaging type optical device according to the present invention. FIG. FIG. 2 is an explanatory diagram of a theoretically obvious multiple simultaneous imaging type optical device. 1...Light source, 2...Heat absorption plate, 3...Cold mirror 4...Condenser lens, 5...Transmission sample, 6...First enlarged projection optical system projection lens, 7...
- Screen of the first enlarged projection optical system, 8... Beam splitter 9... Projection lens of the second enlarged projection optical system, X...
- Setting position of the projection lens 9, A... Amount of light focused by the projection lens 9, 10.
- Screen of the second enlargement projection optical system, Y... Setting position of the screen IO, 11... Projection lens of the reduction projection optical system, B... Amount of light condensed by the projection lens 1l, 12... Image sensor (imaging position of reduction projection optical system) l3... Diffusion plate, l4... Common projection lens, l5... Common mirror 16... Beam splitter 17... ...First light beam, 18...Second mirror l9...Screen, for example, transmission screen 20...Second light beam, 21...Reflection screen, 22...Second light beam Beam splitter 23...imaging lens, 24...imaging unit, for example, image sensor,

Claims (3)

【特許請求の範囲】[Claims] (1)光源から透過試料、投影レンズを経てスクリーン
上に結像する第1の光束を、前記投影レンズと前記スク
リーンとの間にミラーとビームスプリッターを介在させ
て、少くとも2回反射させる拡大投影光学系と、 前記ミラーから前記ビームスプリッターを透過した第2
の光束を、前記スクリーンと共役の位置に設置された反
射スクリーンで反射させ、反射したその第2の光束を第
2のビームスプリッターを介して少くとも1回反射させ
た上で撮像レンズを介し結像部に結像させる縮小撮像光
学系と、を備えた複数同時結像型光学装置。
(1) Enlargement in which a first beam of light, which is formed from a light source, passes through a transmitted sample, a projection lens, and forms an image on a screen, is reflected at least twice by interposing a mirror and a beam splitter between the projection lens and the screen. a projection optical system; and a second beam that passes through the beam splitter from the mirror.
A second beam of light is reflected by a reflective screen installed at a position conjugate to the screen, and the reflected second beam of light is reflected at least once through a second beam splitter and then focused through an imaging lens. A multiple simultaneous imaging type optical device comprising: a reduction imaging optical system that forms an image on an image section;
(2)拡大投影光学系のスクリーンが透過スクリーンで
ある請求項1記載の複数同時結像型光学装置。
(2) The multiple simultaneous imaging type optical device according to claim 1, wherein the screen of the enlarged projection optical system is a transmission screen.
(3)縮小撮像光学系の結像部がイメージセンサーであ
る請求項1記載の複数同時結像型光学装置。
(3) The multiple simultaneous imaging type optical device according to claim 1, wherein the imaging section of the reduction imaging optical system is an image sensor.
JP1113942A 1989-05-06 1989-05-06 Plural simultaneous imaging type optical device Granted JPH02293725A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1113942A JPH02293725A (en) 1989-05-06 1989-05-06 Plural simultaneous imaging type optical device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1113942A JPH02293725A (en) 1989-05-06 1989-05-06 Plural simultaneous imaging type optical device

Publications (2)

Publication Number Publication Date
JPH02293725A true JPH02293725A (en) 1990-12-04
JPH0468610B2 JPH0468610B2 (en) 1992-11-02

Family

ID=14625062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1113942A Granted JPH02293725A (en) 1989-05-06 1989-05-06 Plural simultaneous imaging type optical device

Country Status (1)

Country Link
JP (1) JPH02293725A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09166761A (en) * 1995-12-15 1997-06-24 Semiconductor Energy Lab Co Ltd Display device
JP2000098492A (en) * 1998-09-28 2000-04-07 Sanyo Electric Co Ltd Projection display device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09166761A (en) * 1995-12-15 1997-06-24 Semiconductor Energy Lab Co Ltd Display device
JP2000098492A (en) * 1998-09-28 2000-04-07 Sanyo Electric Co Ltd Projection display device

Also Published As

Publication number Publication date
JPH0468610B2 (en) 1992-11-02

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