JPH0229361U - - Google Patents

Info

Publication number
JPH0229361U
JPH0229361U JP10596388U JP10596388U JPH0229361U JP H0229361 U JPH0229361 U JP H0229361U JP 10596388 U JP10596388 U JP 10596388U JP 10596388 U JP10596388 U JP 10596388U JP H0229361 U JPH0229361 U JP H0229361U
Authority
JP
Japan
Prior art keywords
diaphragm
valve
valve seat
shape
metal diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10596388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0515660Y2 (US20100056889A1-20100304-C00004.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988105963U priority Critical patent/JPH0515660Y2/ja
Publication of JPH0229361U publication Critical patent/JPH0229361U/ja
Application granted granted Critical
Publication of JPH0515660Y2 publication Critical patent/JPH0515660Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Diaphragms And Bellows (AREA)
  • Lift Valve (AREA)
JP1988105963U 1988-08-12 1988-08-12 Expired - Lifetime JPH0515660Y2 (US20100056889A1-20100304-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988105963U JPH0515660Y2 (US20100056889A1-20100304-C00004.png) 1988-08-12 1988-08-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988105963U JPH0515660Y2 (US20100056889A1-20100304-C00004.png) 1988-08-12 1988-08-12

Publications (2)

Publication Number Publication Date
JPH0229361U true JPH0229361U (US20100056889A1-20100304-C00004.png) 1990-02-26
JPH0515660Y2 JPH0515660Y2 (US20100056889A1-20100304-C00004.png) 1993-04-23

Family

ID=31339049

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988105963U Expired - Lifetime JPH0515660Y2 (US20100056889A1-20100304-C00004.png) 1988-08-12 1988-08-12

Country Status (1)

Country Link
JP (1) JPH0515660Y2 (US20100056889A1-20100304-C00004.png)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729368U (ja) * 1993-11-12 1995-06-02 大野ベロー工業株式会社 ダイヤフラム弁
WO1999009463A1 (fr) * 1997-08-15 1999-02-25 Fujikin Incorporated Regulateur debitmetrique a pression
US10371270B2 (en) 2015-03-25 2019-08-06 Fujikin Incorporated Diaphragm valve
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293468U (US20100056889A1-20100304-C00004.png) * 1985-12-04 1987-06-15

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6293468U (US20100056889A1-20100304-C00004.png) * 1985-12-04 1987-06-15

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0729368U (ja) * 1993-11-12 1995-06-02 大野ベロー工業株式会社 ダイヤフラム弁
WO1999009463A1 (fr) * 1997-08-15 1999-02-25 Fujikin Incorporated Regulateur debitmetrique a pression
US10371270B2 (en) 2015-03-25 2019-08-06 Fujikin Incorporated Diaphragm valve
WO2019193978A1 (ja) * 2018-04-06 2019-10-10 株式会社フジキン バルブ装置および流体制御装置、流体制御方法、半導体製造装置及び半導体製造方法

Also Published As

Publication number Publication date
JPH0515660Y2 (US20100056889A1-20100304-C00004.png) 1993-04-23

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