JPH0229260Y2 - - Google Patents
Info
- Publication number
- JPH0229260Y2 JPH0229260Y2 JP19839985U JP19839985U JPH0229260Y2 JP H0229260 Y2 JPH0229260 Y2 JP H0229260Y2 JP 19839985 U JP19839985 U JP 19839985U JP 19839985 U JP19839985 U JP 19839985U JP H0229260 Y2 JPH0229260 Y2 JP H0229260Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- vacuum pump
- valve
- exhaust valve
- exhaust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims 1
- 230000007257 malfunction Effects 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19839985U JPH0229260Y2 (US07652168-20100126-C00068.png) | 1985-12-25 | 1985-12-25 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19839985U JPH0229260Y2 (US07652168-20100126-C00068.png) | 1985-12-25 | 1985-12-25 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62176488U JPS62176488U (US07652168-20100126-C00068.png) | 1987-11-09 |
JPH0229260Y2 true JPH0229260Y2 (US07652168-20100126-C00068.png) | 1990-08-06 |
Family
ID=31159050
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19839985U Expired JPH0229260Y2 (US07652168-20100126-C00068.png) | 1985-12-25 | 1985-12-25 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0229260Y2 (US07652168-20100126-C00068.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5216433B2 (ja) * | 2007-06-26 | 2013-06-19 | 株式会社ミツトヨ | 真空排気装置および真空排気方法 |
-
1985
- 1985-12-25 JP JP19839985U patent/JPH0229260Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS62176488U (US07652168-20100126-C00068.png) | 1987-11-09 |
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