JPH0229150U - - Google Patents
Info
- Publication number
- JPH0229150U JPH0229150U JP10658488U JP10658488U JPH0229150U JP H0229150 U JPH0229150 U JP H0229150U JP 10658488 U JP10658488 U JP 10658488U JP 10658488 U JP10658488 U JP 10658488U JP H0229150 U JPH0229150 U JP H0229150U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- exhaust pipe
- evacuated
- evacuation device
- vacuum evacuation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010586 diagram Methods 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10658488U JPH076608Y2 (ja) | 1988-08-12 | 1988-08-12 | 真空排気装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10658488U JPH076608Y2 (ja) | 1988-08-12 | 1988-08-12 | 真空排気装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0229150U true JPH0229150U (xx) | 1990-02-26 |
JPH076608Y2 JPH076608Y2 (ja) | 1995-02-15 |
Family
ID=31340227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10658488U Expired - Lifetime JPH076608Y2 (ja) | 1988-08-12 | 1988-08-12 | 真空排気装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH076608Y2 (xx) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650229U (ja) * | 1992-01-09 | 1994-07-08 | 日本電子株式会社 | 高周波誘導結合プラズマ質量分析計における排気装置 |
JP2020038776A (ja) * | 2018-09-03 | 2020-03-12 | 株式会社ニューフレアテクノロジー | 荷電粒子装置 |
-
1988
- 1988-08-12 JP JP10658488U patent/JPH076608Y2/ja not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650229U (ja) * | 1992-01-09 | 1994-07-08 | 日本電子株式会社 | 高周波誘導結合プラズマ質量分析計における排気装置 |
JP2020038776A (ja) * | 2018-09-03 | 2020-03-12 | 株式会社ニューフレアテクノロジー | 荷電粒子装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH076608Y2 (ja) | 1995-02-15 |