JPH0229150U - - Google Patents

Info

Publication number
JPH0229150U
JPH0229150U JP10658488U JP10658488U JPH0229150U JP H0229150 U JPH0229150 U JP H0229150U JP 10658488 U JP10658488 U JP 10658488U JP 10658488 U JP10658488 U JP 10658488U JP H0229150 U JPH0229150 U JP H0229150U
Authority
JP
Japan
Prior art keywords
electrode
exhaust pipe
evacuated
evacuation device
vacuum evacuation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10658488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH076608Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10658488U priority Critical patent/JPH076608Y2/ja
Publication of JPH0229150U publication Critical patent/JPH0229150U/ja
Application granted granted Critical
Publication of JPH076608Y2 publication Critical patent/JPH076608Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10658488U 1988-08-12 1988-08-12 真空排気装置 Expired - Lifetime JPH076608Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10658488U JPH076608Y2 (ja) 1988-08-12 1988-08-12 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10658488U JPH076608Y2 (ja) 1988-08-12 1988-08-12 真空排気装置

Publications (2)

Publication Number Publication Date
JPH0229150U true JPH0229150U (xx) 1990-02-26
JPH076608Y2 JPH076608Y2 (ja) 1995-02-15

Family

ID=31340227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10658488U Expired - Lifetime JPH076608Y2 (ja) 1988-08-12 1988-08-12 真空排気装置

Country Status (1)

Country Link
JP (1) JPH076608Y2 (xx)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650229U (ja) * 1992-01-09 1994-07-08 日本電子株式会社 高周波誘導結合プラズマ質量分析計における排気装置
JP2020038776A (ja) * 2018-09-03 2020-03-12 株式会社ニューフレアテクノロジー 荷電粒子装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0650229U (ja) * 1992-01-09 1994-07-08 日本電子株式会社 高周波誘導結合プラズマ質量分析計における排気装置
JP2020038776A (ja) * 2018-09-03 2020-03-12 株式会社ニューフレアテクノロジー 荷電粒子装置

Also Published As

Publication number Publication date
JPH076608Y2 (ja) 1995-02-15

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