JPH02289438A - Chamber for producing optical fiber preform - Google Patents
Chamber for producing optical fiber preformInfo
- Publication number
- JPH02289438A JPH02289438A JP10603289A JP10603289A JPH02289438A JP H02289438 A JPH02289438 A JP H02289438A JP 10603289 A JP10603289 A JP 10603289A JP 10603289 A JP10603289 A JP 10603289A JP H02289438 A JPH02289438 A JP H02289438A
- Authority
- JP
- Japan
- Prior art keywords
- wall
- chamber
- optical fiber
- gap
- exhaust duct
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000013307 optical fiber Substances 0.000 title claims abstract description 10
- 239000011521 glass Substances 0.000 claims abstract description 17
- 239000002245 particle Substances 0.000 claims description 10
- 239000000463 material Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 238000000034 method Methods 0.000 claims description 4
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 239000012535 impurity Substances 0.000 abstract description 3
- 239000005373 porous glass Substances 0.000 abstract description 3
- 230000001174 ascending effect Effects 0.000 abstract 1
- 230000008021 deposition Effects 0.000 description 3
- 239000010419 fine particle Substances 0.000 description 3
- 238000007254 oxidation reaction Methods 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B37/00—Manufacture or treatment of flakes, fibres, or filaments from softened glass, minerals, or slags
- C03B37/01—Manufacture of glass fibres or filaments
- C03B37/012—Manufacture of preforms for drawing fibres or filaments
- C03B37/014—Manufacture of preforms for drawing fibres or filaments made entirely or partially by chemical means, e.g. vapour phase deposition of bulk porous glass either by outside vapour deposition [OVD], or by outside vapour phase oxidation [OVPO] or by vapour axial deposition [VAD]
- C03B37/0144—Means for after-treatment or catching of worked reactant gases
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Geochemistry & Mineralogy (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Manufacture, Treatment Of Glass Fibers (AREA)
Abstract
Description
【発明の詳細な説明】
(産業上の利用分野)
この発明は、外付は法による光ファイバ母材製造用チャ
ンバに関するもので、火炎加水分解反応、もしくは熱酸
化反応により生成され、デポジション時の熱による上昇
気流に乗ってチャンバ内上部に舞い上がったガラス微粒
子を首尾よく外部に排気しつる構造を提供するものであ
る。Detailed Description of the Invention (Field of Industrial Application) The present invention relates to a chamber for producing an optical fiber preform by an external method, in which the preform is produced by a flame hydrolysis reaction or a thermal oxidation reaction, and is produced by a flame hydrolysis reaction or a thermal oxidation reaction. This provides a structure that can successfully exhaust to the outside the glass particles that fly up to the upper part of the chamber due to the rising airflow caused by the heat.
(従来の技術)
従来のこの種のチャンバにおいては、そのバーナ取付は
側と対向する側に排気口を設け、出発部材に付着堆積し
なかったガラス微粒子を排気口から排気ダクトへ導き、
スクラバで引くことにより処理していた。(Prior Art) In a conventional chamber of this type, the burner is installed by providing an exhaust port on the opposite side, and guiding glass particles that have not adhered and deposited on the starting member from the exhaust port to the exhaust duct.
It was disposed of by removing it with a scrubber.
(発明が解決しようとする課題)
上記のような装置により、大部分のガラス微粒子はデポ
ジション時の熱による上昇気流に乗り上方へと舞い上が
りチャンバ土壁に付着堆積する。(Problems to be Solved by the Invention) With the above-described apparatus, most of the glass particles fly upwards on the rising air current due to heat during deposition, and are deposited on the chamber earthen walls.
ダクトの引き圧が何らかの原因で低下したときにはこの
ような現象は著しくなり、チャンバ上壁に付着堆積した
ガラス微粒子のかたまりが堆積中の母材上に落下して母
材を破損させたり、直接落下しなくても一旦チャンバ底
部に落ちて汚染し、再度舞い上がり母材に付着して不純
物を混入させるという問題があった。また、デポジショ
ン終了毎にチャンバ内の掃除をしなければならず不便で
あった。This phenomenon becomes noticeable when the suction pressure of the duct decreases for some reason, and a mass of glass particles deposited on the upper wall of the chamber may fall onto the base material being deposited, damaging the base material, or directly falling. Even if it is not, there is a problem that it will fall to the bottom of the chamber and contaminate it, and then fly up again and adhere to the base material, introducing impurities. Furthermore, the interior of the chamber must be cleaned every time the deposition is completed, which is inconvenient.
(課題を解決するための手段)
この発明は1以上の観点からチャンバ上部に舞い上がっ
たガラス微粒子を首尾よ(処理するようにしたもので、
その特徴とするところは外付は法による光ファイバ母材
製造用チャンバであって、その上壁が相互間に間隙を有
する内外2重壁で構成され、その内壁に多数のガラス微
粒子挿通孔が形成されるとともに、その内外両壁でつく
る間隙を排気ダクトと連通させてなるチャンバにある。(Means for Solving the Problems) The present invention is designed to successfully (process) glass particles flying up to the upper part of a chamber from one or more viewpoints.
Its features are that the external chamber is a chamber for manufacturing optical fiber preforms using a method; It is located in a chamber with a gap formed between its inner and outer walls communicating with an exhaust duct.
(作用)
デポジション時の熱による上昇気流に乗ってチャンバ内
上部に舞い上がったガラス微粒子は、チャンバ上壁の内
壁に形成された多数の孔を通って内外両壁でつくる間隙
を経て排気ダクトに導かれるので、舞い上がったガラス
微粒子が落下して母材に付着することがない。(Function) The glass particles that fly up to the upper part of the chamber due to the rising airflow caused by the heat during deposition pass through a number of holes formed in the inner wall of the upper chamber wall, pass through the gap created by both the inner and outer walls, and reach the exhaust duct. Because it is guided, the flying glass particles do not fall and adhere to the base material.
(実施例)
第1図は、この発明による光ファイバ母材製造用チャン
バの概略説明図を示したもので、lは全体として箱型で
、両端ならびに後述するバーナ対向側が開放されたチャ
ンバで、底壁10、上壁12そ備えており、上壁12は
内壁14と外壁16とからなる2重構造になされていて
、この内外両壁14.16により間隙18を形成してい
る。20は内壁14に形成された多数の孔で、後述する
舞い上がったガラス微粒子をトラップするためのもので
ある。2はチャンバ1と連通ずる排気ダクト、3は上記
間隙18と連通ずる排気ダクトである。4はチャンバl
内に挿通されその軸の回りに回転自在に支承されるとと
もにその軸方向のトラバースされる出発部材、5はその
周りに堆積された光ファイバ用多孔質ガラス母材、6は
バーナで、火炎加水分解もしくは熱酸化反応によりガラ
ス微粒子7を生成させるためのものである。(Example) FIG. 1 shows a schematic explanatory diagram of a chamber for manufacturing an optical fiber preform according to the present invention, and l is a chamber that is box-shaped as a whole and is open at both ends and the side facing the burner described later. It has a bottom wall 10 and a top wall 12, and the top wall 12 has a double structure consisting of an inner wall 14 and an outer wall 16, and a gap 18 is formed by the inner and outer walls 14 and 16. Numerous holes 20 are formed in the inner wall 14 and are used to trap glass fine particles that fly up, which will be described later. 2 is an exhaust duct communicating with the chamber 1, and 3 is an exhaust duct communicating with the gap 18. 4 is chamber l
5 is a porous glass preform for an optical fiber deposited around it; 6 is a burner which applies flame hydration; This is for producing glass fine particles 7 through decomposition or thermal oxidation reaction.
以上の構成において、バーナ6により生成されたガラス
微粒子7は、出発部材令の周りに付着堆積されて光ファ
イバ用多孔質ガラス母材5を形成する。この時付着堆積
しなかったガラス微粒子の一部は排気ダクト2に導かれ
るが、また一部は上昇気流に乗って上壁12に向かう。In the above configuration, the glass fine particles 7 generated by the burner 6 are deposited around the starting member to form the porous glass preform 5 for optical fiber. At this time, some of the glass particles that have not been deposited are guided to the exhaust duct 2, but some of them are carried by the upward air current and head toward the upper wall 12.
そして上壁12の内壁14に設けられた多数の孔20に
トラップされ間隙18を通って排気ダクト3に導かれる
。Then, it is trapped in a number of holes 20 provided in the inner wall 14 of the upper wall 12 and guided to the exhaust duct 3 through the gap 18 .
なお、上記実施例において、出発部材4を「ト・、パー
スしたが、出発部材十をトラバースせずにバーナ6とチ
ャンバlとをトラバースするようにしてもよい。In the above embodiment, the starting member 4 is parsed, but the burner 6 and the chamber 1 may be traversed without traversing the starting member 10.
(発明の効果)
この発明は、以上のようにチャンバ内において上方に舞
い上がったガラス微粒子を2重構造の土壁の内壁に設け
た多数の孔から内壁と外壁との間の間隙に導き排気する
ようにしたので、製造中の母材上に落下することがなく
母材の破損、ならびに再付着による不純物の混入を阻止
することができる。(Effects of the Invention) As described above, the present invention guides the glass particles flying upward in the chamber through a number of holes provided in the inner wall of the double-layer earthen wall into the gap between the inner wall and the outer wall and exhausts them. This prevents the base material from falling onto the base material being manufactured, thereby preventing damage to the base material and contamination of impurities due to redeposition.
第1図は、この発明の光ファイバ製造用チャンバの断面
図0図においてl:チャンバ、12:土壁、14:内壁
、20:孔。
第1図
特許出願人 藤倉電線株式会社
代理人 弁理士 竹 内 守FIG. 1 is a cross-sectional view of a chamber for manufacturing an optical fiber according to the present invention. In figure 0, l: chamber, 12: earthen wall, 14: inner wall, 20: hole. Figure 1 Patent applicant Mamoru Takeuchi, agent for Fujikura Electric Cable Co., Ltd., patent attorney
Claims (1)
、その上壁が相互間に間隙を有する内外2重壁で構成さ
れ、その内壁に多数のガラス微粒子挿通孔が形成される
とともに、その内外両壁でつくる間隙を排気ダクトと連
通させてなることを特徴とする光ファイバ母材の製造用
チャンバ。This is a chamber for manufacturing optical fiber preforms using an external attachment method, and its upper wall is composed of an inner and outer double wall with a gap between them, and a large number of glass particle insertion holes are formed in the inner wall, and A chamber for manufacturing an optical fiber base material, characterized in that a gap formed by both walls is communicated with an exhaust duct.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10603289A JPH02289438A (en) | 1989-04-27 | 1989-04-27 | Chamber for producing optical fiber preform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10603289A JPH02289438A (en) | 1989-04-27 | 1989-04-27 | Chamber for producing optical fiber preform |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02289438A true JPH02289438A (en) | 1990-11-29 |
Family
ID=14423298
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10603289A Pending JPH02289438A (en) | 1989-04-27 | 1989-04-27 | Chamber for producing optical fiber preform |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02289438A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10111733A1 (en) * | 2001-03-09 | 2002-09-19 | Heraeus Quarzglas | Process for the production of a SiO¶2¶ blank |
US20120024012A1 (en) * | 2010-08-02 | 2012-02-02 | Fujikura Ltd. | Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method |
-
1989
- 1989-04-27 JP JP10603289A patent/JPH02289438A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10111733A1 (en) * | 2001-03-09 | 2002-09-19 | Heraeus Quarzglas | Process for the production of a SiO¶2¶ blank |
DE10111733B4 (en) * | 2001-03-09 | 2007-02-08 | Heraeus Tenevo Gmbh | Process for producing a SiO 2 blank |
US20120024012A1 (en) * | 2010-08-02 | 2012-02-02 | Fujikura Ltd. | Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method |
CN102408192A (en) * | 2010-08-02 | 2012-04-11 | 株式会社藤仓 | Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method |
US8881554B2 (en) * | 2010-08-02 | 2014-11-11 | Fujikura Ltd. | Optical fiber preform manufacturing apparatus and optical fiber preform manufacturing method |
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