JPH02288281A - Laser oscillator - Google Patents

Laser oscillator

Info

Publication number
JPH02288281A
JPH02288281A JP1107503A JP10750389A JPH02288281A JP H02288281 A JPH02288281 A JP H02288281A JP 1107503 A JP1107503 A JP 1107503A JP 10750389 A JP10750389 A JP 10750389A JP H02288281 A JPH02288281 A JP H02288281A
Authority
JP
Japan
Prior art keywords
aperture
mirror
diameter
rear mirror
laser beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1107503A
Other languages
Japanese (ja)
Inventor
Ichiro Egashira
江頭　一郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Amada Co Ltd
Original Assignee
Amada Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amada Co Ltd filed Critical Amada Co Ltd
Priority to JP1107503A priority Critical patent/JPH02288281A/en
Publication of JPH02288281A publication Critical patent/JPH02288281A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/0804—Transverse or lateral modes
    • H01S3/0805—Transverse or lateral modes by apertures, e.g. pin-holes or knife-edges
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

PURPOSE:To obtain a laser oscillator wherein the diameter of an aperture can be adjusted easily to the diameter of laser beams by arranging the constitution such that the aperture is provided freely in shifting to the light axis direction of the laser beams inside a rear mirror. CONSTITUTION:A laser oscillator 1 is equipped with a resonator 3, an output mirror 5a and a rear mirror being provided on both sides of it, and others, and then an aperture inside the rear mirror 7 is provided. And when a servo motor 29 is driven, a gear 27 is rotated through an output shaft, and a ball screw is rotated through a gear 35, and the aperture 17 is shifted to the light axis direction of laser beams LB through a nut member 19, however a beam waist exists in the laser beam LB oscillated between the output mirror and the rear mirror 7, and the diameter 2W0 is smallest at the beam west part, and is largest near the output mirror 5 and the rear mirror 7, therefore by shifting the aperture 17 in the light axis direction of the laser beam LB, it has the same effect as having changed the diameter of the aperture 17. As a result, the diameter of the laser beams can be adjusted simply and easily.

Description

【発明の詳細な説明】 ［発明の目的］ （産業上の利用分野） この発明は、レーザ発振器に関する。[Detailed description of the invention] [Purpose of the invention] (Industrial application field) The present invention relates to a laser oscillator.

（従来の技術） 従来、例えば３軸直交型などのレーザ発振器においては
、共振器の両側に出力ミラーとリヤミラーとが設けられ
、レーザビームがこの両ミラー間で発振されて、出力ミ
ラーから出力されている。(Prior Art) Conventionally, in a laser oscillator such as a three-axis orthogonal type, an output mirror and a rear mirror are provided on both sides of a resonator, and a laser beam is oscillated between the two mirrors and output from the output mirror. ing.

そして、このリヤミラーの内側にはレーザビームの境界
を制限するアパーチャが設けられている。An aperture is provided inside the rear mirror to limit the boundary of the laser beam.

（発明が解決しようとする課題） ところで、上述した従来のアパーチャはリヤミラーの内
側における適宜な位置に固定して設けられているため、
レーザビームの径やモードの変更ができないという問題
があった。(Problem to be Solved by the Invention) By the way, since the above-mentioned conventional aperture is fixedly provided at an appropriate position inside the rear mirror,
There was a problem in that the diameter and mode of the laser beam could not be changed.

また、他のアパーチャとしてはアームを回転させること
により、大径と小径用のアパーチャを交換するものも提
案されているが、このタイプでは構造が複雑になるとい
う問題があった。Other apertures have been proposed in which the apertures for large and small diameters are exchanged by rotating the arm, but this type has a problem in that the structure is complicated.

この発明の目的は、上記問題点を改善するため、リヤミ
ラーの内側に設けたアパーチャをレーザビームの光軸方
向へ移動自在としてアパーチャの径をレーザビームの径
に容易に調整できるようにしたレーザ発振器を提供する
ことにある。An object of the present invention is to provide a laser oscillator in which an aperture provided inside a rear mirror is movable in the optical axis direction of a laser beam so that the diameter of the aperture can be easily adjusted to the diameter of the laser beam. Our goal is to provide the following.

［発明の構成］ （課題を解決するための手段） 上記目的を達成するために、この発明は、共振器の両側
に設けられた出力ミラーとリヤミラーとの間でレーザビ
ームを発振させ、出力ミラーから出力されるレーザ発振
器にして、リヤミラーの内側にアパーチャをレーザビー
ムの光軸方向へ移動自在に設けてレーザ発振器を構成し
た。[Structure of the Invention] (Means for Solving the Problems) In order to achieve the above object, the present invention oscillates a laser beam between an output mirror and a rear mirror provided on both sides of a resonator. The laser oscillator was constructed by providing an aperture inside the rear mirror so as to be movable in the direction of the optical axis of the laser beam.

（作用） この発明のレーザ発振器を採用することにより、出力ミ
ラーとリヤミラーとの間で発振されるレーザビームには
ビームウェストがある。このレーザビームは出力、リヤ
ミラーの曲率により決まり、レーザビームはレーザビー
ムウェスト部で最も小さく、ミラーの近くで大きくなる
。アパーチャをレーザビームの光軸方向へ移動せしめる
ことにより、アパーチャの径を変化させたものと同じ効
果を持たせて、レーザビームの径が調整される。(Function) By employing the laser oscillator of the present invention, the laser beam oscillated between the output mirror and the rear mirror has a beam waist. This laser beam is determined by the output and the curvature of the rear mirror, and the laser beam is smallest at the laser beam waist and becomes larger near the mirror. By moving the aperture in the direction of the optical axis of the laser beam, the diameter of the laser beam is adjusted with the same effect as changing the diameter of the aperture.

（実施例） 以下、この発明の実施例を図面に基づいて詳細に説明す
る。(Example) Hereinafter, an example of the present invention will be described in detail based on the drawings.

第１図を参照するに、例えば炭酸ガスレーザによる３軸
直交型のレーザ発振器１は共振器３と、この共振器３の
両側に設けられた出力ミラー５゜リヤミラー７などを備
えている。Referring to FIG. 1, a three-axis orthogonal type laser oscillator 1 using, for example, a carbon dioxide laser includes a resonator 3, an output mirror 5 and a rear mirror 7 provided on both sides of the resonator 3.

前記共振器３は平板状の陽ｔｆｉ９と、ある一定の間隔
を持って対向した位置に複数配列された陰極１１などか
ら構成されている。複数の陰極１１は、各陰極１１間を
絶縁する放電壁１３に取付けられている。さらに、放電
壁１３には安定抵抗１５が設けられている。The resonator 3 is composed of a flat plate-shaped positive electrode TFI 9 and a plurality of cathodes 11 arranged at positions facing each other at a certain interval. The plurality of cathodes 11 are attached to a discharge wall 13 that insulates each cathode 11 from the other. Furthermore, the discharge wall 13 is provided with a stabilizing resistor 15 .

前記陽極９および陰極１１はそれぞれ図示省略の高圧電
源装置に接続されて、陽極つと陰極１１との間隔に放電
領域が形成される。The anode 9 and the cathode 11 are each connected to a high-voltage power supply (not shown), and a discharge region is formed in the space between the anode and the cathode 11.

上記構成により、出力ミラー５とリヤミラー７との間で
レーザビームＬＢが反射されると共に、レーザビームＬ
Ｂは第１図において陽極５と陰極７との間の放電領域を
通って矢印のごとく出力ミラー５から図示省略のレーザ
加工装置へ出力されることになる。With the above configuration, the laser beam LB is reflected between the output mirror 5 and the rear mirror 7, and the laser beam L
B passes through the discharge region between the anode 5 and the cathode 7 in FIG. 1, and is output from the output mirror 5 to a laser processing device (not shown) as shown by the arrow.

前記リヤミラー７の内側（第１図において右側）にレー
ザビームＬＢの境界を制限する例えばリング状のアパー
チャ１７が設けられている。このアパーチャ１７の一端
部（第１図において上端部）には例えばナツト部材１９
が一体的に取付けられており、このナツト部材１９には
ボールねじ２１が螺合されている。このボールねじ２１
は両端部で支持部材２３により回転自在に支承されてい
る。For example, a ring-shaped aperture 17 is provided inside the rear mirror 7 (on the right side in FIG. 1) to limit the boundary of the laser beam LB. For example, a nut member 19 is attached to one end of the aperture 17 (upper end in FIG. 1).
are integrally attached, and a ball screw 21 is screwed into this nut member 19. This ball screw 21
is rotatably supported by support members 23 at both ends.

前記ボールねじ２１にギヤ２５が嵌着されており、この
ギヤ２５には他のギヤ２７が噛合されている。ギヤ２７
には出力軸を介してサーボモータ２９が取付けられてい
る。A gear 25 is fitted onto the ball screw 21, and another gear 27 is meshed with this gear 25. gear 27
A servo motor 29 is attached to the servo motor 29 via an output shaft.

上記構成により、サーボモータ２９を駆動させると、出
力軸を介してギヤ２７が回転される。ギヤ２７が回転さ
れると、ギヤ２５を介してボールねじが回転されるから
、ナツト部材１９を介してアパーチャ１７がレーザビー
ムＬＢの光軸方向（第１図において左右方向）に移動さ
れることになる。With the above configuration, when the servo motor 29 is driven, the gear 27 is rotated via the output shaft. When the gear 27 is rotated, the ball screw is rotated via the gear 25, so that the aperture 17 is moved via the nut member 19 in the optical axis direction of the laser beam LB (left-right direction in FIG. 1). become.

前記出力ミラー５とリヤミラー７との間で発振されるレ
ーザビームＬＢにはビームウェストがあり、このビーム
ウェストの径２ＷＯは出力ミラー５、リヤミラー７によ
って決まる。そして、レザビームＬＢの径はビームウェ
スト部で最も小さく、出力ミラー５．リヤミラー７の近
くで大きくなる。The laser beam LB oscillated between the output mirror 5 and the rear mirror 7 has a beam waist, and the diameter 2WO of this beam waist is determined by the output mirror 5 and the rear mirror 7. The diameter of the laser beam LB is smallest at the beam waist portion, and the diameter of the laser beam LB is the smallest at the beam waist portion. It becomes larger near rear mirror 7.

すなわち例えば、ビームウェスト部がら距離Ｚだけ離れ
た場所でのレーザビーム径２ｗは、一般に、 πｗｏ　　２ で表わされる。That is, for example, the laser beam diameter 2w at a location a distance Z away from the beam waist is generally expressed as πwo 2 .

（但し、λ：波長） したがって、上述したごとく、アパーチャ１７をレーザ
ビームＬＢの光軸方向へ移動せしめることにより、アパ
ーチャ１７の径を変化させたと同じ効果を有して、レー
ザビームＬＢの径を簡単がつ容易に調整することができ
る。アパーチャ１７の位置は例えばサーボモータ２９に
取付けた図示省略のエンコーダによって検出される。(However, λ: wavelength) Therefore, as described above, by moving the aperture 17 in the optical axis direction of the laser beam LB, it has the same effect as changing the diameter of the aperture 17, and the diameter of the laser beam LB can be changed. Easy to adjust. The position of the aperture 17 is detected, for example, by an encoder (not shown) attached to a servo motor 29.

なお、この発明は前述した実施例に限定されることな（
、適宜の変更を行なうことにより、その他の態様で実施
し得るものである。例えば本実施例では、アパーチャ１
７をレーザビームＬＢの光軸方向へ移動させる手段とし
て、ナツト部材１９とボールねじ２１を用いた例で説明
したが、アパーチャ１７を直線方向へ移動させるもので
あれば、アクチュエータやそれ以外のものであっても構
わない。Note that this invention is not limited to the above-mentioned embodiments (
However, by making appropriate changes, it can be implemented in other ways. For example, in this embodiment, aperture 1
Although the nut member 19 and the ball screw 21 are used as means for moving the aperture 17 in the optical axis direction of the laser beam LB, an actuator or other means may be used as long as it moves the aperture 17 in a linear direction. It doesn't matter.

［発明の効果］ 以上のごとき実施例の説明より理解されるように、この
発明によれば、出力ミラーとリヤミラー間におけるリヤ
ミラーの内側にアパーチャをレーザビームの光軸方向へ
移動自在に設けたことにより、アパーチャの径を変えた
と同じように、レーザビームの径を簡単かつ容易に調整
することができる。[Effects of the Invention] As can be understood from the above description of the embodiments, according to the present invention, an aperture is provided inside the rear mirror between the output mirror and the rear mirror so as to be movable in the optical axis direction of the laser beam. This allows the diameter of the laser beam to be adjusted simply and easily in the same way as changing the diameter of the aperture.

【図面の簡単な説明】[Brief explanation of the drawing]

第１図はこの発明を実施する一実施例のレーザ発振器の
概略図である。 １・・・レーザ発振器　３・・・共振器５・・・出力ミ
ラー　　７・・・リヤミラ１７・・・アパーチャ　１９
・・・ナツト部材２１・・・ボールねじ　２９・・・サ
ーボモータ１−・レーザ発振器 ５−・出力ミラー １７・・・アパーチャ ２１−・ボールねじ ３・・・共ｔ＆器 ７・・・リヤミラー １９・・・ナツト部材 ２９−・サーボモータ 第１図FIG. 1 is a schematic diagram of a laser oscillator according to an embodiment of the present invention. 1... Laser oscillator 3... Resonator 5... Output mirror 7... Rear mirror 17... Aperture 19
... Nut member 21 ... Ball screw 29 ... Servo motor 1 - Laser oscillator 5 - Output mirror 17 ... Aperture 21 - Ball screw 3 ... Both T & device 7 ... Rear mirror 19 ...Nut member 29--Servo motor Fig. 1

Claims (1)

【特許請求の範囲】[Claims] 共振器の両側に設けられた出力ミラーとリヤミラーとの
間でレーザビームを発振させ、出力ミラーから出力され
るレーザ発振器にして、リヤミラーの内側にアパーチャ
をレーザビームの光軸方向へ移動自在に設けてなること
を特徴とするレーザ発振器。A laser beam is oscillated between an output mirror and a rear mirror provided on both sides of the resonator, and the output mirror becomes a laser oscillator, and an aperture is provided inside the rear mirror so that it can move freely in the direction of the optical axis of the laser beam. A laser oscillator characterized by:
JP1107503A 1989-04-28 1989-04-28 Laser oscillator Pending JPH02288281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1107503A JPH02288281A (en) 1989-04-28 1989-04-28 Laser oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1107503A JPH02288281A (en) 1989-04-28 1989-04-28 Laser oscillator

Publications (1)

Publication Number Publication Date
JPH02288281A true JPH02288281A (en) 1990-11-28

Family

ID=14460859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1107503A Pending JPH02288281A (en) 1989-04-28 1989-04-28 Laser oscillator

Country Status (1)

Country Link
JP (1) JPH02288281A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04298087A (en) * 1991-03-27 1992-10-21 Matsushita Electric Ind Co Ltd Gas laser device
JPH0921933A (en) * 1995-07-07 1997-01-21 Nec Corp Semiconductor laser module
JP2011238792A (en) * 2010-05-11 2011-11-24 Fujifilm Corp Solid state laser device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6464279A (en) * 1987-09-03 1989-03-10 Mitsubishi Electric Corp Laser equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6464279A (en) * 1987-09-03 1989-03-10 Mitsubishi Electric Corp Laser equipment

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04298087A (en) * 1991-03-27 1992-10-21 Matsushita Electric Ind Co Ltd Gas laser device
JPH0921933A (en) * 1995-07-07 1997-01-21 Nec Corp Semiconductor laser module
JP2011238792A (en) * 2010-05-11 2011-11-24 Fujifilm Corp Solid state laser device

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