JPH02287428A - Production of liquid crystal display device - Google Patents

Abstract

PURPOSE:To eliminate the unequalness in display and to obtain the liquid crystal display device having uniform and high in quality by etching one of substrates or the film formed on the substrate in picture element units. CONSTITUTION:After a Cr film is formed by a sputtering method on the transparent substrate 1 over the entire surface thereof, the film is patterned to form a light shielding layer 2 and color filter layers 3 of R, G, B are then formed by a dyeing method, electrode deposition method, printing method or the like. An over coat layer 4 is then formed and thereafter the over coat layer on the picture elements corresponding to R, G, B is etched. Further, a common electrode 5 is formed over the entire surface of the substrate by a sputtering method and thereafter, thin-film transistors consisting of polysilicon and picture element electrodes 7 are formed in the form of a matrix as means for controlling the electrooptical effect of the liquid crystal on a transparent substrate 6. A pair of the substrates are adhered via a sealant 8 and the liquid crystal 9 is sealed therebetween to obtain the liquid crystal display device. The film thickness of the respective picture elements are varied in this way, by which the fluctuation in the film thickness is lessened and the unequalness in the display is eliminated. The liquid crystal display device having the uniform and high quality is thus obtd.

Description

[Detailed description of the invention] [Industrial application field] The present invention relates to a method for manufacturing a liquid crystal display device.

-When forming the filter, the film thickness was varied for each red, green, and blue pixel, and the cell gap of the liquid crystal was varied.

[Problems to be Solved by the Invention] However, with the above-mentioned conventional technology, it is very difficult to control the thickness of the formed film, and variations in the film thickness may cause display irregularities such as uneven contrast, uneven response, and uneven color. It has the problem of arising.

The present invention is intended to solve these problems.The purpose of the present invention is to make the film thickness of each pixel different by etching, reduce the variation in film thickness, and eliminate contrast unevenness, response unevenness, color unevenness, etc. Eliminate unevenness in the display of
The goal is to obtain a liquid crystal display device with uniform and high image quality.

[Conventional technology]
[Means for Solving the Problems] The conventional method for manufacturing a liquid crystal display device is as described in Japanese Patent Laid-Open No. 1983-1983, and the method for manufacturing a liquid crystal display device of the present invention is as described in Japanese Patent Application Laid-Open No. 1989-296733. In a manufacturing method of a liquid crystal display device, which forms a means for controlling the electro-optic effect of a liquid crystal and a means for controlling a cell gap of a liquid crystal cell, at least one of the substrates or a film formed on the substrate is etched pixel by pixel. It is characterized by

There are organic films such as imide.

[Example 1] This example will be described below based on the drawings. FIG. 1 is a cross-sectional view of the liquid crystal display device of this example, and FIGS. 2(a) to (d)
2 is a cross-sectional view of the main steps of this example. First, a Cr film is formed on the entire surface of the transparent substrate 1 by sputtering, and then patterned to form the light shielding layer 2. (FIG. 2(a)) Next, an R-G-H color filter layer 3 is formed by a dyeing method, an electrodeposition method, a printing method, or the like. (Fig. 2(b)) Then, the overcoat layer 4 was formed by a printing method, a spin code method, a dip method, etc., and the overcoat layer on the pixel corresponding to R-G-B was listed in Table 1. Etching according to conditions.

(FIG. 2(C)) Here, the material used for the overcoat is an inorganic film such as Sio2 or SiN, or photosensitive poly, and the common electrode 5 is formed on the entire surface of the substrate by sputtering. (Figure 2 (
d)) Next, polysilicon thin film transistors and pixel electrodes 7 are formed in a matrix on the transparent substrate 6 as a means for controlling the electro-optic effect of the liquid crystal.

Then, the above-mentioned pair of substrates were bonded together with a sealant 8 interposed therebetween, and a liquid crystal 9 was sealed therein to obtain a liquid crystal display device.

[Example 2] This example will be described below based on the drawings. FIG. 4 is a cross-sectional view of the liquid crystal display device of this example, and FIGS. 5(a) to (d)
2 is a cross-sectional view of the main steps of this example. First, polysilicon thin film transistors 2 and pixel electrodes 3 are formed in a matrix on a transparent substrate 1 as a means for controlling the electro-optic effect of liquid crystal. (Figure 2(a)) Next, R-G-B
The color filter layer 4 is formed by a dyeing method, an electrodeposition method, or the like. (FIG. 2(b)) Then, the light shielding layer 5 is formed by a printing method, a spin code method, a dip method, or the like. (Figure 2 (C
)) Then, after forming an overcoat layer of 3 μm consisting of Sin by a spin code method, an overcoat layer of 0.9 μm consisting of photosensitive polyimide was formed, and the photosensitive polyimide on the R-G pixels was exposed and developed. , remove by etching.

Then, a gap control pattern 6 is formed by etching 0.9μ of 5in2 on the R pixel.

Next, a light shielding layer and a common electrode 9 are formed on the transparent substrate 10.

Then, the above-mentioned pair of substrates were bonded together with a sealant 7 interposed therebetween, and a liquid crystal 8 was sealed therein to obtain a liquid crystal display device.

[Effects of the Invention] As explained above, the present invention re-chips at least one substrate or a film formed on the substrate in pixel units, thereby reducing variations in film thickness and reducing contrast unevenness, response unevenness, and Display unevenness such as color unevenness is eliminated, and a liquid crystal display device with uniform and high image quality can be obtained.

[Brief explanation of drawings]

FIG. 1 is a sectional view of the liquid crystal display device of the present invention, and FIG.
) to (d) are cross-sectional views of main steps of the liquid crystal display device of the present invention. 1.6. Transparent substrate 2, light shielding layer 3, color filter layer overcoat layer common electrode pixel electrode sealant liquid crystal Figure 3 is a sectional view of a conventional liquid crystal display device. 2. Transparent substrate color filter layer common electrode pixel electrode sealant liquid crystal Fig. 4 is a sectional view of the liquid crystal display device of the present invention, Fig.
) to (d) are cross-sectional views of main steps of the liquid crystal display device of the present invention. 1゜10゜Transparent substrate Polysilicon thin film transistor Pixel electrode Color filter layer Light shielding layer Gap control pattern Sealing agent Liquid crystal common electrode and above Applicant Seiko Epson Corporation Agent Patent attorney Kizobe Meiki (fl!! 1 person) (b) Cd)

Claims (1)

[Claims] In a method for manufacturing a liquid crystal display device in which a means for controlling the electro-optic effect of liquid crystal and a means for controlling a cell gap of a liquid crystal cell are formed on a pair of substrates, at least one of the substrates or a film formed on the substrate is used as a pixel. A method for manufacturing a liquid crystal display device characterized by etching in units.