JPH02287243A - Method for detecting peak of measuring output - Google Patents

Method for detecting peak of measuring output

Info

Publication number
JPH02287243A
JPH02287243A JP1110980A JP11098089A JPH02287243A JP H02287243 A JPH02287243 A JP H02287243A JP 1110980 A JP1110980 A JP 1110980A JP 11098089 A JP11098089 A JP 11098089A JP H02287243 A JPH02287243 A JP H02287243A
Authority
JP
Japan
Prior art keywords
peak
value
measuring output
background
subtracting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1110980A
Other languages
Japanese (ja)
Other versions
JP2751378B2 (en
Inventor
Kazunori Kitajima
北島 一憲
Naomasa Maruha
円羽 直昌
Hideto Komi
秀人 古味
Hitoshi Sugiura
杉浦 衡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1110980A priority Critical patent/JP2751378B2/en
Publication of JPH02287243A publication Critical patent/JPH02287243A/en
Application granted granted Critical
Publication of JP2751378B2 publication Critical patent/JP2751378B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To enhance the exactitude in the detection of a peak by comparing the value calculated by subtracting the value proportional to the square root of measuring output from said measuring output with the value calculated by subtracting the value proportional to the intensity of a background from said intensity of the background. CONSTITUTION:In the measurement of X-rays, when there is no statistical fluctuation in measuring output and the measured value of a background and the difference be tween them is positive number, it can be judged that there is a peak and the value of said difference shows peak intensity. However, in actual measurement, statistical fluctuation is present and the value calculated by subtracting the value proportional to the square root of the measuring output from said measuring output corresponds to the lower limit of irregularity of Poisson distribution. Therefore, when the difference between the value calculated by subtracting the value proportional to the square root of the measuring output from the measuring output and the value calculated by subtracting the value proportional to the square root of the background intensity measuring output from said background intensity measuring output is zero or less, a peak is within a statistical fluctuation range of measured value and the presence of the peak is not affirmed. When this difference is larger than a predetermined posi tive number, the presence of the peak can be affirmed.

Description

【発明の詳細な説明】 (産業上の利用分野) 本発明は波長分散型x!19I分析装置とかX線回折装
置等における測定出力のピーク検出方法に関する。
[Detailed Description of the Invention] (Industrial Application Field) The present invention is a wavelength-dispersive x! The present invention relates to a method for detecting peaks of measurement output in 19I analyzers, X-ray diffraction devices, etc.

(従来の技術) 波長分散型X!l!i!分析装置ではバックグラウンド
が短波長側で大きくなるためピーク検出が不正確になり
、短波長側でX線分光分析の信頼度が低下していた。同
様なことはXII!i1回折装置でも回折X線の方向が
照射X線の方向と平行に近くなる程バックグラウンドが
強くなって回折線ピークの検出を困難にしており、−船
釣に測定出力中におけるバックグラウンド強度が占める
割合が増大して来るとピーク検出が不離なものとなる。
(Conventional technology) Wavelength dispersion type X! l! i! In analyzers, the background becomes larger on the shorter wavelength side, making peak detection inaccurate, and the reliability of X-ray spectroscopy lowers on the shorter wavelength side. The same thing is true in XII! Even with the i1 diffractometer, the background becomes stronger as the direction of the diffracted X-rays approaches parallel to the direction of the irradiated X-rays, making it difficult to detect the diffraction peaks. As the proportion increases, peak detection becomes indispensable.

(発明が解決しようとする課題) 本発明は測定出力中のバックグラウンド強度が大である
場合のピーク検出の信頼性を高めようとするものである
(Problems to be Solved by the Invention) The present invention aims to improve the reliability of peak detection when the background intensity in the measurement output is large.

く課題を解決するための手段) 測定出力から測定出力の平方根に比例する値を引算した
値が、バックグラウンド強度からバックグラウンドの平
方根に比例した値を引算した値より、所定値以上大なる
ときピーク有りと判定するようにした。
The value obtained by subtracting the value proportional to the square root of the measured output from the measured output is greater than the value obtained by subtracting the value proportional to the square root of the background from the background intensity by a predetermined value or more. When this happens, it is determined that there is a peak.

(作用) 本発明は式で書くと、測定出力を31バックグラウンド
強度をBとし、所定値をCとすると、(S−に、/S 
> −(N十に′J”T;r> ≧c >O・(1)で
あればピーク有りとするものである。
(Function) The present invention can be written in the form of a formula: When the measurement output is 31, the background intensity is B, and the predetermined value is C, (S-, /S
>−(N0′J”T;r>≧c>O・(1), it is assumed that a peak exists.

Xl&lIの測定では測定出力とかバックグラウンドの
測定値に統計的ゆらぎがないときはS−B’>0であれ
ばピーク有りであり、S−Bの値はピーク強度を示す。
In the measurement of Xl&lI, when there is no statistical fluctuation in the measured output or the background measured value, if S-B'>0, a peak is present, and the value of S-B indicates the peak intensity.

しかし実際の測定では統計的ゆらぎが存在するので、S
−B>Oをピーク有りの条件とすることはできない。
However, since statistical fluctuations exist in actual measurements, S
-B>O cannot be a condition for the presence of a peak.

(1)式を図示すると、第1図のようになる。測定出力
SはSを中心に±Nsの範囲でばらつ(値であり、この
ばらつきはポアソン分布に従うものでS−に、/Sはそ
のばらつきの下限に相当する。同様にバックグラウンド
強度はBを中心に上下にNbだけばらつく値でB+に’
、/Bはそのばらつく値の上限である。従って(S−k
 ff)−(B−にF「)=DがO以下であればピーク
は測定値の統計的変動の範囲であり、ピークの有無を確
言できない。Dが正なる値Cより大であればピークの存
在を確言できることになる。
Equation (1) is illustrated in FIG. 1. The measured output S varies within a range of ±Ns around S (value; this variation follows a Poisson distribution and corresponds to S-, /S corresponds to the lower limit of the variation. Similarly, the background intensity is B B+ with a value that varies up and down by Nb around .
, /B is the upper limit of the variation. Therefore (S-k
ff) - (B- to F') = If D is less than or equal to O, the peak is within the range of statistical fluctuation of the measured value, and it is not possible to confirm the presence or absence of a peak.If D is greater than the positive value C, there is a peak. This means that we can confirm the existence of

(実施例) 第2図はX線分光分析において本発明方法を自動的に実
行する場合の動作のフローチャートである。この分析動
作は試料中に成る元素が存在するか否かを調査するのも
ので、存在を検出しようとする元素の特性X線波長をλ
とする。まずX線分光装置を波長λ−△にセットして時
間tだけX線検出信号を積分する(イ)。この測定結果
を81とする。次に波長をλにセットして同じ時間だけ
XM検出信号を積分する(口〉。この測定結果をSとす
る。次に波長をλ+△に移して同様の測定を行う(ハ)
。このときの測定結果を82とする。B1.B2は目的
元素のピーク両側におけるバックグラウンド強度である
。ステップ(二〉において、B= (B 1 +82)
/2を算出し、上記SおよびこのBの値を用いて、前記
(1)式による判定を行う(ホ)。判定において差りが
Cより大なるとき、その元素ありの表示(へ)、Cより
小なるときはその元素なしの表示(ト)を行って、元素
の有無判定の動作を終り、次の元素の有無判定に移る。
(Example) FIG. 2 is a flowchart of operations when automatically executing the method of the present invention in X-ray spectroscopic analysis. This analysis operation investigates whether or not the element exists in the sample, and the characteristic X-ray wavelength of the element whose presence is to be detected is
shall be. First, the X-ray spectrometer is set to wavelength λ-Δ and the X-ray detection signal is integrated for time t (a). This measurement result is assumed to be 81. Next, set the wavelength to λ and integrate the XM detection signal for the same amount of time (X). Let this measurement result be S. Next, change the wavelength to λ + △ and perform the same measurement (C)
. The measurement result at this time is assumed to be 82. B1. B2 is the background intensity on both sides of the peak of the target element. In step (2), B= (B 1 +82)
/2 is calculated, and using the values of S and B, a determination is made using the equation (1) (e). If the difference in the judgment is greater than C, it is displayed that the element is present (G), and if it is smaller than C, it is displayed that the element is absent (G), and the element presence/absence judgment operation is completed. The process moves on to determining the presence or absence of .

上述実施例は予め決めた元素の有無判定に本発明方法を
用いたものである。X 線スペクトル測定から成るピー
クが真のピークかノイズかを判定する場合、X線分光装
置で波長走査を行ってX線スペクトルのデータをメモリ
しておき、X線スペクトルを画かせる。このXMスペク
トルから、ピーク判定すべきピークの波長λを求め、そ
の波長におけるX線スペクトル強度をSとし、その波長
の前後△だけ距った波長における二つのX1111スペ
クトル強度値の平均をバックグラウンド強度Bとして、
前述(1)式による判定を行って、目的ピークが真のピ
ークかノイズかを判定する。
The above embodiment uses the method of the present invention to determine the presence or absence of a predetermined element. When determining whether a peak formed by X-ray spectrum measurement is a true peak or noise, an X-ray spectrometer performs wavelength scanning, stores the X-ray spectrum data in memory, and draws the X-ray spectrum. From this XM spectrum, find the wavelength λ of the peak to be judged, let the X-ray spectrum intensity at that wavelength be S, and calculate the average of the two X1111 spectrum intensity values at wavelengths before and after that wavelength, which are separated by △, as the background intensity. As B,
The above-mentioned equation (1) is used to determine whether the target peak is a true peak or noise.

また、この逆にまったく未知のプロファイルのピークを
見つけるときは通常、次の方法による。
Conversely, when finding a peak in a completely unknown profile, the following method is usually used.

まずプロファイルデータの数点(5〜25点程)をとり
、このデータに対しコンボリューション(たたき込み)
を行い、平均傾斜率tを求めると云う計算を、 長波長
側から短波長側(或は短波長から長波長)に向けて移動
しながら繰り返すと、プロファイルにピークが現れると
t〉α(αは正の定数)となる点がある。ここを1方の
バックグラウンド波長とする。さらに上述計算をつづけ
ると1=0となる。ここがビーフである。さら1こtく
−αとなる点が2つ目のバックグラウンド波長となる。
First, take several points (approximately 5 to 25 points) of the profile data and perform convolution on this data.
If we repeat the calculation to find the average slope rate t while moving from the long wavelength side to the short wavelength side (or from the short wavelength side to the long wavelength side), when a peak appears in the profile, t〉α(α is a positive constant). Let this be one background wavelength. If the above calculation is continued further, 1=0. This is the beef. The point at which the wavelength is 1 t - α becomes the second background wavelength.

この方法によるとピークの位置が不明のプロファイルに
対し、複数のピークとバックグラウンドが見つかるが、
短波長側でバックグラウンドのレベルが高くなると実ピ
ークよりもノイズによるピークの方が多くなる。このと
き、前述(1)式を用いてやればより有効である。
With this method, multiple peaks and background can be found for a profile where the peak position is unknown, but
When the background level increases on the short wavelength side, there are more peaks due to noise than actual peaks. At this time, it is more effective to use the above-mentioned equation (1).

(発明の効果) 本発明によれば、強いバックグラウンドの上に小さなピ
ークが乗っているような場合でも、ノイズをピークと誤
判定するようなことなく、ピーク検出の確度が著しく向
上できる。
(Effects of the Invention) According to the present invention, even when a small peak is placed on top of a strong background, the accuracy of peak detection can be significantly improved without erroneously determining that noise is a peak.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の作用説明図、第2図は本発明をX線分
光分析に適用した場合の分析動作のフローチャートであ
る。 代理人  弁理士 縣  浩 介
FIG. 1 is an explanatory diagram of the operation of the present invention, and FIG. 2 is a flowchart of analysis operation when the present invention is applied to X-ray spectroscopic analysis. Agent Patent Attorney Kosuke Agata

Claims (1)

【特許請求の範囲】[Claims] 測定出力から、その測定出力の平方根に比例した値を引
算した値が、バックグラウンド強度測定出力からそのバ
ックグラウンド測定出力の平方根に比例した値を引算し
た値より、所定値以上大であるときピークありと判定す
ることを特徴とする測定出力のピーク検出方法。
The value obtained by subtracting a value proportional to the square root of the measured output from the measured output is greater than the value obtained by subtracting the value proportional to the square root of the background measured output from the background intensity measured output by a predetermined value or more. A method for detecting a peak in a measured output, characterized in that it is determined that a peak exists when the peak occurs.
JP1110980A 1989-04-28 1989-04-28 Peak detection method of measurement output Expired - Lifetime JP2751378B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1110980A JP2751378B2 (en) 1989-04-28 1989-04-28 Peak detection method of measurement output

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1110980A JP2751378B2 (en) 1989-04-28 1989-04-28 Peak detection method of measurement output

Publications (2)

Publication Number Publication Date
JPH02287243A true JPH02287243A (en) 1990-11-27
JP2751378B2 JP2751378B2 (en) 1998-05-18

Family

ID=14549351

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1110980A Expired - Lifetime JP2751378B2 (en) 1989-04-28 1989-04-28 Peak detection method of measurement output

Country Status (1)

Country Link
JP (1) JP2751378B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129735A (en) * 1979-03-30 1980-10-07 Jeol Ltd Discrimination method of presence of element
JPS63191950A (en) * 1987-02-04 1988-08-09 Nippon X-Ray Kk Peak position detecting method for spectrum signal

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55129735A (en) * 1979-03-30 1980-10-07 Jeol Ltd Discrimination method of presence of element
JPS63191950A (en) * 1987-02-04 1988-08-09 Nippon X-Ray Kk Peak position detecting method for spectrum signal

Also Published As

Publication number Publication date
JP2751378B2 (en) 1998-05-18

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