JPH02283422A - Manufacture of mold for casting molding - Google Patents

Manufacture of mold for casting molding

Info

Publication number
JPH02283422A
JPH02283422A JP10468589A JP10468589A JPH02283422A JP H02283422 A JPH02283422 A JP H02283422A JP 10468589 A JP10468589 A JP 10468589A JP 10468589 A JP10468589 A JP 10468589A JP H02283422 A JPH02283422 A JP H02283422A
Authority
JP
Japan
Prior art keywords
matrix
mold
glass
flat plate
cast molding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10468589A
Other languages
Japanese (ja)
Inventor
Tomoyuki Tamura
知之 田村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP10468589A priority Critical patent/JPH02283422A/en
Publication of JPH02283422A publication Critical patent/JPH02283422A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To enhance the productivity of the title mold and reduce its manufacturing cost by bringing a flat plate that is softened by heating into contact with a matrix having a preformed pattern, and by transferring under pressure the preformed pattern of the matrix to the flat plate after heating the matrix up to a temperature at which the surface of the flat plate is softened. CONSTITUTION:After a matrix 1 having a preformed pattern and a mirror surface matrix 3 having a mirror surface have been mounted on a heat press 5, plate glass 2 is inserted between the matrix 1 and the mirror surface matrix 3. The plate glass 2 is then brought into contact with the matrix 1, and after the matrix 1 has been heated up to the degree of not lower than a temperature at which the surface of the plate glass 2 is softened, the preformed pattern of the matrix 1 is transferred under pressure to the plate glass 2. By this method, a mold for casting molding which has high transferability, can be manufactured in high productivity and at the reduced cost of production.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は情報記録媒体用基板を注型成形法により製造す
る際に使用する注型成形用型の製造方法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a method for manufacturing a cast molding mold used when manufacturing a substrate for an information recording medium by a cast molding method.

[従来の技術] 従来、光記録媒体用基板はその情報記録面に案内溝、情
報用ビットなどの凹凸か形成されている。このような基
板の形成方法としては、基板か熱可塑性樹脂からなる場
合にはインジェクション法や熱プレス法により原盤の案
内溝を転写する方法、又は熱硬化性樹脂や熱可塑性樹脂
からなる透明樹脂板上に光硬化性樹脂組成物を塗布した
後、原盤を密着させて透明樹脂板側からふく射線(紫外
線、X線等)を−様に照射して該光硬化性樹脂組成物を
硬化させて原盤のパターンを透明樹脂板に転写する所謂
2P法が知られている。
[Prior Art] Conventionally, substrates for optical recording media have irregularities such as guide grooves and information bits formed on their information recording surfaces. Methods for forming such a substrate include, if the substrate is made of thermoplastic resin, a method of transferring the guide grooves of the master using an injection method or a heat press method, or a method of forming a transparent resin plate made of thermosetting resin or thermoplastic resin. After applying a photocurable resin composition thereon, the master is placed in close contact with the transparent resin plate and radiation (ultraviolet rays, X-rays, etc.) is irradiated in a negative direction to cure the photocurable resin composition. A so-called 2P method is known in which a pattern on a master is transferred to a transparent resin plate.

しかし、インジェクション法や熱プレス法によって得ら
れる熱可塑性樹脂基板は成形の際の熱履歴による残留応
力や分子の配向により、成形後の基板のそりや光学的異
方性か生じたりするため、光記録媒体用基板としては問
題がある。また、2P法によって得られる基板は光硬化
後の樹脂内に未反応の重合開始剤や単量体か残留しやす
く、それらが記録媒体の光記録層に悪影響を及ぼすこと
かよくある。
However, thermoplastic resin substrates obtained by injection method or heat press method may cause warping or optical anisotropy of the substrate after molding due to residual stress and molecular orientation due to thermal history during molding. There are problems as a substrate for recording media. In addition, in the substrate obtained by the 2P method, unreacted polymerization initiators and monomers tend to remain in the resin after photocuring, and these often have an adverse effect on the optical recording layer of the recording medium.

これらの問題か生じない光記録媒体用基板の製造方法と
して注型成形法が知られている。
Cast molding is known as a method for manufacturing substrates for optical recording media that does not cause these problems.

従来の注型成形法における光記録媒体用基板の製造方法
は、ガラス板や金属板などの基板の上に案内溝やピット
などのプリフォーマットパターンを凹凸状に形成した型
を注型成形用型として、スペーサーを介して平滑なガラ
ス板を鏡面型として相対して位置し、注型成形の装置と
する。
The conventional method for producing substrates for optical recording media using the cast molding method is to use a cast mold with a preformat pattern such as guide grooves and pits formed in an uneven shape on a substrate such as a glass plate or a metal plate. As a mirror mold, a smooth glass plate is placed facing each other via a spacer to form a cast molding device.

この装置に樹脂の千ツマ−又は溶剤を含んだプレポリマ
ー等を流し込み硬化させて光記録媒体用基板を得ていた
。このようにして得られる光記録媒体用基板はインジェ
クション法や熱プレス法、2P法に比較して成形時に圧
力かほとんど加わらない為、光学的異方性やそりか発生
せず、また2P材のように記録層に悪影響を及ぼさない
という特徴を有する。
A substrate for an optical recording medium was obtained by pouring a resin or a prepolymer containing a solvent into this apparatus and curing it. The substrate for optical recording media obtained in this way does not have optical anisotropy or warpage because it applies almost no pressure during molding compared to the injection method, hot press method, or 2P method. It has the characteristic that it does not adversely affect the recording layer.

従来の上記の注型成形法において使用される注型成形用
型の製造方法は、ガラス又は金属の基材にフォトレジス
トの薄膜を形成したのち、所定の仕様の信号記録用案内
溝のレーザーカッティングを行ない、露出したガラスま
たは金属下地を酸等てエツチングした後、残ったレジス
トを除去して作製する方法(特開昭61−225010
号公報)、又は基材上に基材と異なる材料からなる薄膜
を成膜した後、この薄膜上にフォトレジストの薄膜を形
成し、案内溝のレーザーカッティングを行ない露出した
薄膜を基材の部分までエツチングし、残ったレジストを
除去して作製する方法等か知られている。
The conventional manufacturing method of the cast molding mold used in the above-mentioned cast molding method is to form a thin film of photoresist on a glass or metal base material, and then laser cut a guide groove for signal recording according to predetermined specifications. After etching the exposed glass or metal base with acid etc., the remaining resist is removed.
Or, after forming a thin film made of a material different from the base material on a base material, a thin film of photoresist is formed on this thin film, and the guide groove is laser cut, and the exposed thin film is used as a part of the base material. A method is known in which the resist is etched until the resist is etched, and the remaining resist is removed.

一般に、注型成形に要する時間は、短時間による成形て
は十分な特性か得られないために、通常1回に1〜8時
間の長時間を要する。そのために情報記録媒体用基板を
量産性よく、安価に得るためには、安価な型を多数枚用
意する必要がある。
In general, cast molding requires a long time of 1 to 8 hours at a time because sufficient properties cannot be obtained by short molding. Therefore, in order to mass-produce substrates for information recording media at low cost, it is necessary to prepare a large number of inexpensive molds.

[発明か解決しようとする課題] しかしなから、従来の注型成形用型の製造方法において
は、基材の上にフォトレジストの膜を成膜する工程、そ
のレジストをレーザーカットする工程、エツチングする
工程、レジストを除去する工程等の多くの精度を要求さ
れ、かつ複雑な工程か必要とされるため、型の量産性が
悪く、又安価に製造することか困難てあった。
[Problem to be solved by the invention] However, in the conventional manufacturing method for cast molding molds, there are a process of forming a photoresist film on a base material, a process of laser cutting the resist, and an etching process. Since many precision steps are required, such as the step of removing the resist and the step of removing the resist, as well as complicated steps, the mass production of the mold is poor, and it is difficult to manufacture the mold at a low cost.

本発明は、この様な従来技術の欠点を改善するためにな
されたものであり、注型成形用型の製造方法に熱プレス
成形法を採用することにより、量産性よく、製造コスト
が大幅に改善された方法を提供することを目的とするも
のである。
The present invention was made in order to improve the drawbacks of the conventional technology, and by adopting the hot press molding method as the method for manufacturing cast molding molds, mass production is facilitated and manufacturing costs are significantly reduced. The purpose is to provide an improved method.

[課題を解決するための手段] 即ち、本発明は、情報記録媒体用基板を注型成形法によ
り製造する際に使用する注型成形用型の製造方法におい
て、プリフォーマットパターンを有する母型に熱軟化す
る平板を接触せしめ、母型を平板の表面が軟化する温度
まで加熱した後、加圧して母型のプリフォーマットパタ
ーンを平板に転写することを特徴とする注型成形用型の
製造方法である。
[Means for Solving the Problems] That is, the present invention provides a method for manufacturing a cast molding mold used when manufacturing a substrate for an information recording medium by a cast molding method. A method for producing a cast molding mold, which comprises bringing a heat-softening flat plate into contact with the mother mold, heating the mother mold to a temperature at which the surface of the flat plate softens, and applying pressure to transfer the preformat pattern of the mother mold onto the flat plate. It is.

次に、図面に基づいて本発明の詳細な説明する。Next, the present invention will be explained in detail based on the drawings.

第1図(a)〜(d)は本発明の注型成形用型の製造方
法の特徴を最もよく表わす工程図である。まず、第1図
(a)において、プリフォーマットパターンを有する母
型l及び鏡面を有する鏡面母型3を熱ブレス機5に装着
した後、母型lと鏡面母型3の間に板ガラス2を挿入す
る。母型l及び鏡面母型3はガラスの軟化温度に耐え、
ガラスの熱プレス成形に要求される耐久性を有し、成形
時の降温をすみやかに行うことかできる熱伝導度の大き
い材質で、母型を離型する際の離型性の良い材質が好ま
しい。その具体例としては、超硬合金、金型用鋼、鋳鉄
、クロム鋼等が挙げられる。また母型上へのプリフォー
マットパターンの形成方法は、前述の母型の基材を直接
エツチングして作成する方法と、母型の基材上に基材と
異なる材料からなる薄膜を成膜し、この薄膜にプリフォ
ーマットパターンをエツチングして作成する方法、又は
ガラス基板上にフォトレジストでパターンを形成したも
のに電鋳を行なって得る方法等がある。該薄膜の材質と
しては、母型の基材と密着性が良く、ガラスの熱プレス
成形に対し耐久性の良い、かつガラスとの離型性の良い
材質か好ましい。例えば、TiN、 Ti、 Cr、 
Ta、 B、 Si等の金属の窒化物又は炭化物の硬質
薄膜等が挙げられる。
FIGS. 1(a) to 1(d) are process diagrams that best represent the characteristics of the method for manufacturing a cast molding mold of the present invention. First, in FIG. 1(a), after a matrix l having a preformat pattern and a mirror matrix 3 having a mirror surface are mounted on a heat press machine 5, a plate glass 2 is placed between the matrix l and the mirror matrix 3. insert. The matrix 1 and the mirror matrix 3 can withstand the softening temperature of glass,
A material with high thermal conductivity that has the durability required for hot press molding of glass, can quickly lower the temperature during molding, and has good mold releasability when releasing the mold is preferable. . Specific examples thereof include cemented carbide, mold steel, cast iron, and chrome steel. The preformat pattern can be formed on the matrix by directly etching the base material of the matrix described above, or by forming a thin film made of a material different from the base material on the base material of the matrix. There are two methods: a method of etching a preformat pattern on this thin film, and a method of electroforming a pattern formed on a glass substrate using photoresist. The material for the thin film is preferably a material that has good adhesion to the base material of the matrix, has good durability against hot press molding of glass, and has good mold releasability from glass. For example, TiN, Ti, Cr,
Examples include hard thin films of nitrides or carbides of metals such as Ta, B, and Si.

板ガラス2の材質としては、市販の光学カラスか用いら
れ、例えばSF、 BK、 SK、 LaKガラス等か
挙げられるが、好ましくは低融点て成形時にあわか入り
にくく、型との融着性のない材質かよい。
As the material of the plate glass 2, commercially available optical glass can be used, such as SF, BK, SK, LaK glass, etc., but preferably it is a material with a low melting point, which does not allow bubbles to enter during molding, and does not have the ability to fuse with the mold. The material is good.

ガラス材料は母型の材質との関係があり、具体的に特定
するのは難しいが、低融点ガラスではPbOか入ったS
Fカラスなどの鉛ガラス、又気孔か少なく離型性の良い
材質としてはSKガラス等か挙げられる。板ガラスにプ
リフォーマットパターンを転写する面は研磨面が好まし
く、その面荒さRmaxは0.5終m以下が好ましい。
The glass material is related to the material of the matrix, and it is difficult to specify it specifically, but low melting point glasses include PbO or S containing PbO.
Examples include lead glass such as F glass, and SK glass as a material with few pores and good mold releasability. The surface on which the preformat pattern is transferred to the plate glass is preferably a polished surface, and the surface roughness Rmax is preferably 0.5 m or less.

次に、第1図(b)において、板ガラス3を母型lに接
触せしめ、母型lを板ガラス3の表面が軟化する温度以
上まで加熱した後、加圧して母型lのプリフォーマット
パターンを板ガラス3に転写する。成形時の温度プロフ
ァイルは最高温度をガラスの軟化点Spの近傍からsp
+ 150°Cの間に設定し、30秒〜IO分間保持す
る。また、昇温速度をlO〜100°C/min、降温
速度を2〜50°C/winに設定する。但し、成形さ
れた板ガラスに歪か残る場合には個々のガラス材質に合
わせ、除歪のため、降温プロファイルをガラス材質に合
わせて変更する。また、成形時の圧力は1〜150kg
/cm2か好ましい。
Next, in FIG. 1(b), the plate glass 3 is brought into contact with the matrix l, and after the matrix l is heated to a temperature above which the surface of the plate glass 3 softens, the preformat pattern of the matrix l is formed by applying pressure. Transfer to plate glass 3. The temperature profile during molding varies the maximum temperature from near the softening point of the glass to sp.
Set between +150°C and hold for 30 seconds to IO minutes. Further, the temperature increase rate is set to 10 to 100°C/min, and the temperature decrease rate is set to 2 to 50°C/win. However, if distortion remains in the formed sheet glass, the temperature drop profile is changed to match the glass material in order to remove the distortion. Also, the pressure during molding is 1 to 150 kg.
/cm2 is preferable.

その後、第1図(C)において、プリフォーマットパタ
ーンか転写された板ガラスlは室温まで徐胎され、注型
成形用型4を得ることがてきる。
Thereafter, as shown in FIG. 1(C), the plate glass 1 onto which the preformat pattern has been transferred is allowed to cool down to room temperature, and a casting mold 4 can be obtained.

以上の説明においては、母型によりプリフォーマットパ
ターンか転写される熱軟化する平板として板ガラスを用
いた場合を示したが、熱軟化する平板にはガラスの他に
例えばテフロン(登録商標)樹脂、ポリアミド樹脂等の
軟化温度の高い熱可塑性樹脂等を用いることができる。
In the above explanation, a case is shown in which plate glass is used as a heat-softening flat plate onto which a preformat pattern is transferred by a matrix. A thermoplastic resin having a high softening temperature such as resin can be used.

[作用] 本発明による注型成形用型の製造方法は、プリフォーマ
ットパターンを有する母型中にガラス等の平板を入れ、
母型をガラス等の平板の表面が軟化する温度まで加熱し
、圧力を加え、母型のプリフォーマットパターンをガラ
ス等の平板に転写することにより、転写性の良い注型成
形用型を、量産性良く、製造コストを大幅に低下して製
造することができる。
[Function] The method for manufacturing a cast molding mold according to the present invention includes placing a flat plate of glass or the like into a matrix having a preformat pattern;
By heating the mother mold to a temperature that softens the surface of a flat plate such as glass, applying pressure, and transferring the preformat pattern of the mother mold onto a flat plate such as glass, we can mass produce cast molds with good transferability. It has good properties and can be manufactured at significantly reduced manufacturing costs.

[実施例] 以下、実施例を示し本発明をさらに具体的に説明する。[Example] Hereinafter, the present invention will be explained in more detail with reference to Examples.

実施例1 第1図に示す方法により、光カード基板の注型成形用型
を製作した。熱プレス成形機は圧力が最高100kg/
cm2、最高温度8008Cが制御できるものを使用し
た。鏡面母型側に鏡面研磨された超硬合金を用い、母型
のプリフォーマットパターンの形成された側には鏡面研
磨された超硬合金の上にTiNをIgm厚て成膜し、反
応性イオンエッチンク装置により所定のパターンを30
00人までトライエツチングし、プリフォーマットパタ
ーンを形成したものを用いた。成形機に母型を取りつけ
た装置のキャビティーに5F−8の研磨された厚さ5■
の板ガラスを挿入し、昇温速度20°C/sinにて5
30°Cまで昇温を行ない、80kg/cm2の圧力て
3分間保持した。
Example 1 A mold for casting an optical card board was manufactured by the method shown in FIG. The maximum pressure of the hot press molding machine is 100 kg/
cm2 and a maximum temperature of 8008C was used. A mirror-polished cemented carbide is used for the mirror-surfaced mother mold side, and a TiN film with a thickness of Igm is formed on the mirror-polished cemented carbide on the side of the mother mold on which the preformat pattern is formed. A predetermined pattern is created using an etching device for 30 minutes.
A pre-format pattern was formed by trial etching up to 00 people. 5F-8 polished thickness 5■ in the cavity of the device where the mother mold is attached to the molding machine
Insert a plate glass and heat at a heating rate of 20°C/sin.
The temperature was raised to 30°C and maintained at a pressure of 80 kg/cm2 for 3 minutes.

その後、降温速度5°C/winて 350℃まで、2
0°C/ m i nで室温まで降温を行ない、キャビ
ティーから成形されプリフォーマットパターンが転写さ
れた板ガラスを取り出した。
After that, reduce the temperature at a rate of 5°C/win to 350°C, 2
The temperature was lowered to room temperature at 0°C/min, and the molded plate glass with the preformat pattern transferred thereto was taken out from the cavity.

実施例2,3 板ガラスに下記の表1に示す材質のものを用いて、表1
に示す成形条件にてプリフォーマットパターンの転写を
行なった以外は実施例1と同様にして注型成形用型を製
作した。
Examples 2 and 3 Using plate glass made of the material shown in Table 1 below,
A cast molding mold was produced in the same manner as in Example 1 except that the preformat pattern was transferred under the molding conditions shown below.

表1 以上の実施例1〜3により得られた板カラスの成形によ
る注型成形用型のプリフォーマットパターンの欠陥率、
パターンの線巾精度、面荒さについて評価した。その結
果と光カート用基板を注型成形により製造する場合の型
に要求される特性値を表2に示す。
Table 1 Defect rates of preformat patterns of cast molds obtained by molding plate crows obtained in Examples 1 to 3 above,
The line width accuracy and surface roughness of the pattern were evaluated. Table 2 shows the results and the characteristic values required of a mold when manufacturing an optical cart substrate by cast molding.

表  2 (注)評価方法は下記のとりである。Table 2 (Note) The evaluation method is as follows.

(1)パターンの欠陥率 光学顕微鏡を用い、型表面の面積欠陥率を算出。(1) Pattern defect rate Calculate the area defect rate on the mold surface using an optical microscope.

(2)パターンの線l]精度 走査型レーザ顕微鏡を用いた微細寸法測定による。(2) Pattern line l] Accuracy Based on microdimensional measurements using a scanning laser microscope.

(3)面荒さ 表面粗さ測定器(小板研究所製5E−30G)による断
面曲線からRmaxを算出。
(3) Surface roughness Rmax was calculated from the cross-sectional curve measured by a surface roughness measuring device (5E-30G manufactured by Koita Institute).

表2の結果より、本発明の方法により製造された注型成
形用型は十分要求される特性値を満たしていることかわ
かる。本発明の主たる効果として量産性と製造コストが
大幅に改善されている。
From the results in Table 2, it can be seen that the cast molding mold produced by the method of the present invention sufficiently satisfies the required characteristic values. The main effects of the present invention are significant improvements in mass productivity and manufacturing costs.

従来、注型成形用型の製作は材料の投入から型か出来上
がるまで、5〜10工程を要し、期間は1日〜3日必要
てあった。しかし、本発明によれば型は1工程て製作て
き、その期間も1〜2時間と短縮できた。又、製造コス
トは工程数、材料費、補助材、設備費等の大幅な減少に
より、従来の約1150にすることか可能となった。
Conventionally, the production of cast molding molds required 5 to 10 steps, from inputting materials to completion of the mold, and took 1 to 3 days. However, according to the present invention, the mold can be manufactured in one step, and the period can be shortened to 1 to 2 hours. In addition, the manufacturing cost can now be reduced to about 1150 compared to the conventional method due to a significant reduction in the number of steps, material costs, auxiliary materials, equipment costs, etc.

「発明の効果」 以上説明した様に、本発明の方法によれば、注型成形用
型の製造方法に熱プレス成形法を採用することにより、
量産性よく、製造コストを大幅に改善して注型成形用型
を得ることかてきる。
"Effects of the Invention" As explained above, according to the method of the present invention, by adopting the hot press molding method for the manufacturing method of the casting mold,
It is possible to obtain molds for cast molding with good mass production and greatly reduced manufacturing costs.

【図面の簡単な説明】[Brief explanation of drawings]

第1図(a)〜(d)は本発明の注型成形用型の製造方
法の一例を表わす工程図である。 l・・・母型 2・・・板ガラス 3・・・鏡面母型 4・・・注型成形用型 5・・・熱プレス機
FIGS. 1(a) to 1(d) are process diagrams showing an example of the method for manufacturing a cast molding mold of the present invention. l...Material mold 2...Plate glass 3...Mirror surface matrix 4...Mold for cast molding 5...Heat press machine

Claims (1)

【特許請求の範囲】[Claims] 情報記録媒体用基板を注型成形法により製造する際に使
用する注型成形用型の製造方法において、プリフオーマ
ットパターンを有する母型に熱軟化する平板を接触せし
め、母型を平板の表面が軟化する温度まで加熱した後、
加圧して母型のプリフオーマットパターンを平板に転写
することを特徴とする注型成形用型の製造方法。
In a method for manufacturing a cast molding mold used when manufacturing a substrate for an information recording medium by a cast molding method, a heat-softening flat plate is brought into contact with a mother mold having a preformat pattern, and the surface of the flat plate is After heating to a softening temperature,
A method for producing a cast molding mold, which comprises applying pressure to transfer a preformat pattern of a matrix onto a flat plate.
JP10468589A 1989-04-26 1989-04-26 Manufacture of mold for casting molding Pending JPH02283422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10468589A JPH02283422A (en) 1989-04-26 1989-04-26 Manufacture of mold for casting molding

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10468589A JPH02283422A (en) 1989-04-26 1989-04-26 Manufacture of mold for casting molding

Publications (1)

Publication Number Publication Date
JPH02283422A true JPH02283422A (en) 1990-11-20

Family

ID=14387325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10468589A Pending JPH02283422A (en) 1989-04-26 1989-04-26 Manufacture of mold for casting molding

Country Status (1)

Country Link
JP (1) JPH02283422A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009226631A (en) * 2008-03-19 2009-10-08 Konica Minolta Opto Inc Manufacturing method of wafer lens

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009226631A (en) * 2008-03-19 2009-10-08 Konica Minolta Opto Inc Manufacturing method of wafer lens

Similar Documents

Publication Publication Date Title
JP2578459B2 (en) Information recording medium, method for manufacturing substrate for information recording medium, and mold for molding substrate for information recording medium
JP4192414B2 (en) Lens sheet manufacturing method
JPH02283422A (en) Manufacture of mold for casting molding
KR100436699B1 (en) Replication mold
JP2981256B2 (en) Manufacturing method of optical parts
JPH01206007A (en) Manufacture of board for information recording medium
US20070145613A1 (en) Concave/convex pattern forming method and information recording medium manufacturing method
JP2005041164A (en) Resin mold for molding, manufacturing method for resin mold for molding and manufacturing method for lens sheet using resin mold for molding
JPH01275019A (en) Manufacture of board for information recording medium
JPH03225646A (en) Production of stamper
JPH01171819A (en) Mold for cast molding and manufacture of base for information recording mediums using said mold
JPH02134744A (en) Production of substrate for information recording medium
EP0308104B1 (en) Mold for molding of substrate for information recording medium and method for preparing substrate for information recording medium
JPH08124223A (en) Production of optical disc
JPH02198808A (en) Method for preparing substrate for data recording medium and apparatus for cast-molding of said substrate
JPH01171814A (en) Manufacture of base for information recording mediums
JPH01171813A (en) Manufacture of base for information recording mediums
JPS61254310A (en) Manufacture of resin-casting matrix
JPH01171816A (en) Manufacture of base for information recording mediums
JPH04238130A (en) Production of and casting mold for base body for information recording medium
JPH04305431A (en) Preparation of roll-shaped work stamper
JPH01171815A (en) Manufacture of base for information recording mediums
JPH01171820A (en) Manufacture of mold for cast molding
JP2526091B2 (en) Casting mold and method for manufacturing substrate for information recording medium using the same
JPH02137914A (en) Manufacture of original sheet and board for information storing disk