JPH01171820A - Manufacture of mold for cast molding - Google Patents
Manufacture of mold for cast moldingInfo
- Publication number
- JPH01171820A JPH01171820A JP32967987A JP32967987A JPH01171820A JP H01171820 A JPH01171820 A JP H01171820A JP 32967987 A JP32967987 A JP 32967987A JP 32967987 A JP32967987 A JP 32967987A JP H01171820 A JPH01171820 A JP H01171820A
- Authority
- JP
- Japan
- Prior art keywords
- mold
- information pits
- cast molding
- patterns
- information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000465 moulding Methods 0.000 title claims abstract description 26
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 32
- 238000004544 sputter deposition Methods 0.000 claims abstract description 13
- 239000000758 substrate Substances 0.000 claims description 25
- 229910052751 metal Inorganic materials 0.000 claims description 8
- 239000002184 metal Substances 0.000 claims description 8
- 238000007790 scraping Methods 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 abstract description 6
- 238000012546 transfer Methods 0.000 abstract description 5
- 239000002253 acid Substances 0.000 abstract description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract description 2
- 239000007789 gas Substances 0.000 abstract description 2
- 239000001301 oxygen Substances 0.000 abstract description 2
- 229910052760 oxygen Inorganic materials 0.000 abstract description 2
- 238000000576 coating method Methods 0.000 abstract 1
- 229920005989 resin Polymers 0.000 description 13
- 239000011347 resin Substances 0.000 description 13
- 238000005266 casting Methods 0.000 description 10
- 230000003287 optical effect Effects 0.000 description 6
- 229910052804 chromium Inorganic materials 0.000 description 4
- 239000011651 chromium Substances 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000000178 monomer Substances 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229920005992 thermoplastic resin Polymers 0.000 description 3
- 238000005520 cutting process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000003698 laser cutting Methods 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 239000003505 polymerization initiator Substances 0.000 description 2
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- 239000011111 cardboard Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000011342 resin composition Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 229920001187 thermosetting polymer Polymers 0.000 description 1
- 238000013518 transcription Methods 0.000 description 1
- 230000035897 transcription Effects 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Manufacturing Optical Record Carriers (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Casting Or Compression Moulding Of Plastics Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野］
本発明は、情報記録媒体用基板の注型成形用型の製造方
法に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to a method for manufacturing a casting mold for a substrate for an information recording medium.
［従来の技術］
従来、情報記録媒体用基板には、その情報記録面にトラ
ッキング用溝、情報用ピットなどの凹凸が形成されてい
る。このように基板に凹凸を形成する方法としては、■
基板が熱可塑性樹脂からなる場合には、インジェクショ
ン法や熱プレス法によりスタンバ−型のトラック溝を転
写する方法、又は■熱硬化性樹脂、熱可塑性樹脂から成
る透明樹脂板上に光硬化性樹脂組成物を塗布した後、ス
タンバ−型を密着させて、透明樹脂側から紫外線の如き
エネルギーを付与し、前記光硬化性樹脂組成物を硬化さ
せて、スタンバ−型のレプリカを透明樹脂板に転写する
、いわゆる２Ｐ法による方法、あるいは■樹脂のモノマ
ー又は溶剤を含んだプレポリマーを注型成形する際に、
片側あるいは両側にトラック用溝や情報用ピットがあら
かじめ形成されている注型成形用型を用いて注型成形す
る方法等が知られている。[Prior Art] Conventionally, an information recording medium substrate has irregularities such as tracking grooves and information pits formed on its information recording surface. As a method of forming irregularities on the substrate in this way,
If the substrate is made of thermoplastic resin, transfer the stubber-type track grooves by injection method or heat press method, or ■ Transfer photocurable resin onto a transparent resin plate made of thermosetting resin or thermoplastic resin. After applying the composition, a stubber mold is brought into close contact with the transparent resin, and energy such as ultraviolet rays is applied from the transparent resin side to cure the photocurable resin composition, thereby transferring a replica of the stambar mold to the transparent resin plate. When casting a prepolymer containing a resin monomer or solvent,
A method of casting using a casting mold in which track grooves and information pits are previously formed on one or both sides is known.
［発明が解決しようとする問題点］
しかしながら、前記■のインジェクション法や熱プレス
法によって得られる熱可塑性樹脂基板は、成形の際の熱
履歴による残留応力や分子の配向により、成形後の基板
のそりや、光学的異方性が生じたりするため、情報記録
媒体用基板とじて問題か残されている。[Problems to be Solved by the Invention] However, thermoplastic resin substrates obtained by the injection method or heat press method described in (1) above suffer from residual stress and molecular orientation due to the thermal history during molding. Since warping and optical anisotropy occur, problems remain as substrates for information recording media.
また、前記■の２Ｐ法により得られる基板は、光硬化後
の樹脂内に光硬化の際に使用される重合開始剤やモノマ
ーが残留しやすく、それらが記録媒体の光記録層に影響
を及ぼし、記録特性の劣化が生じるという問題がよく発
生する。In addition, in the substrate obtained by the 2P method described in (2) above, polymerization initiators and monomers used during photocuring tend to remain in the resin after photocuring, and these may affect the optical recording layer of the recording medium. , the problem of deterioration of recording characteristics often occurs.
これらの問題の生じない情報記録媒体用基板の゛製造方
法として、前記■の注型成形法が用いられることがある
。この方法により得られる基板は、上記の■、■の方法
に比較して成形時に圧力がほとんど加わらず、また注型
用樹脂として、熱可塑性樹脂、熱硬化性樹脂、光硬化性
樹脂のいずれの樹脂も利用することが可能なため、記録
層に悪影響を及ぼさない樹脂の選択が可能である。As a method for manufacturing a substrate for an information recording medium that does not cause these problems, the above-mentioned cast molding method (2) is sometimes used. The substrate obtained by this method requires almost no pressure to be applied during molding compared to the above methods Since resin can also be used, it is possible to select a resin that does not have a negative effect on the recording layer.
前記■の注型成形法において、注型成形する際のトラッ
クキング用溝、情報用ピットなどの凹凸を有する型とし
ては、ガラス板上にフォトリソ工程により形成したフォ
トレジストをマスクとしてエツチングを行ない、それら
の凹凸をバターニングしたもの、レーザーカットにより
パターニングしたもの、又はガラス板、金属板上に尖端
を有するダイヤモンド針によるダイレクトカットにより
凹凸を形成したもの等が知られている。In the above cast molding method (2), the mold having irregularities such as tracking grooves and information pits during cast molding is etched using a photoresist formed on a glass plate by a photolithography process as a mask, It is known that these irregularities are patterned by patterning, by laser cutting, or by direct cutting with a diamond needle having a sharp tip on a glass plate or metal plate.
しかしながら、注型成形における問題点として、基板を
製造する際の１回の処理時間が非常に長いため大量の基
板を製造するためには大量の注型成形用型が必要となる
。そのためには、フォトリソ工程による方法が最も好ま
しい。However, a problem with cast molding is that one processing time for manufacturing a substrate is very long, so a large number of cast molds are required to manufacture a large number of substrates. For this purpose, a method using a photolithography process is most preferable.
しかし、フォトリソ工程により形成されたトラッキング
用溝や情報用ピットの断面形状は、第３図に示すように
、角部Ａがシャープになっているため、この様な型を使
用して基板を成形する場合、成形後基板を注型成形用型
から離型する際に基板の一部が型に残り、特に情報ピッ
ト部の一部が欠けてしまうという問題があった。However, the cross-sectional shapes of the tracking grooves and information pits formed by the photolithography process have sharp corners A, as shown in Figure 3, so it is difficult to mold the substrate using such a mold. In this case, when the substrate is released from the casting mold after molding, a portion of the substrate remains in the mold, and there is a problem in that a portion of the information pit portion in particular is chipped.
本発明は、このような従来技術の欠点を改善するために
なされたものであり、注型成形法により基板を作製する
方法において、注型成形用型の表面に逆スパッタを施し
、トラッキング用溝や情報用ピットのパターンの角部な
削り取ることにより、トラッキング用溝や情報用ピット
を正確に情報記録媒体用基板に転写することができる注
型成形用型を製造する方法を提供することを目的とする
。The present invention has been made in order to improve the drawbacks of the prior art, and in a method for producing a substrate by cast molding, reverse sputtering is applied to the surface of the cast mold to form tracking grooves. The purpose of the present invention is to provide a method for manufacturing a cast molding mold that can accurately transfer tracking grooves and information pits onto a substrate for an information recording medium by cutting off corners of the pattern of information pits and information pits. shall be.
［問題点を解決するための手段］
即ち、本発明は、表面にトラッキング用溝、情報用ピッ
トなどの凹凸プリフォーマットパターンを有する注型成
形用型の製造方法において、型基板上に金属によってト
ラッキング用溝および情報用ピット用のパターンを形成
し、次いでその表面に逆スパッタを施し前記パターンの
角部を削り取ることを特徴とする注型成形用型の製造方
法に係わるものである。[Means for Solving the Problems] That is, the present invention provides a method for manufacturing a cast molding mold having an uneven preformat pattern such as tracking grooves and information pits on the surface, in which tracking is performed by metal on a mold substrate. The present invention relates to a method of manufacturing a cast molding mold, which is characterized in that a pattern for a communication groove and an information pit is formed, and then the surface thereof is subjected to reverse sputtering and the corners of the pattern are scraped off.
以下、本発明の詳細な説明する。The present invention will be explained in detail below.
本発明は、例えば光記録媒体のトラッキング用溝、情報
用ピットなどの凹凸の形状と逆の断面形状を有する注型
成形用型を用いて、注型成形法により情報記録媒体用基
板を製造する方法において使用する注型成形用型の製造
方法である。The present invention manufactures an information recording medium substrate by a cast molding method using a cast mold having a cross-sectional shape that is opposite to the shape of irregularities such as tracking grooves and information pits of an optical recording medium. This is a method for manufacturing a cast molding mold used in the method.
次に、その製造工程を順に説明する。まず、型基板のガ
ラス板上にクロム等の金属によりトラッキング用溝、情
報用ピット用のバターニングを施す。ガラス板としては
鏡面を有する１〜８Ｈの厚みのものが用いられる。その
上にスパッ・夕、イオンブレーティング、真空蒸着法な
どによりクロム等の金属膜をトラッキング用溝、情報用
ピットの高さに形成する。Next, the manufacturing process will be explained in order. First, patterning for tracking grooves and information pits is applied to the glass plate of the mold substrate using metal such as chromium. As the glass plate, one having a mirror surface and a thickness of 1 to 8 H is used. Thereon, a metal film such as chromium is formed at the height of the tracking grooves and information pits by sputtering, ion blating, vacuum evaporation, or the like.
次に、この金属膜の上にフォトレジストを形成し、所定
の仕様のトラック用溝、情報用ピットをレーザーカット
する。レーザーカット後、前述の真空蒸着法などにより
形成された金属膜をエツチングする。その後、レジスト
を除去することによりトラッキング用溝、情報ピットの
パターンが得られる。得られたパターンの断面形状を観
察すると、第３図に示すようにパターン２ａの角部Ａが
非常に切れている。Next, a photoresist is formed on this metal film, and track grooves and information pits of predetermined specifications are laser cut. After laser cutting, the metal film formed by the vacuum evaporation method described above is etched. Thereafter, by removing the resist, a pattern of tracking grooves and information pits is obtained. When observing the cross-sectional shape of the obtained pattern, as shown in FIG. 3, the corner A of the pattern 2a is very sharp.
次に、この型にＡｒ等の逆スパッタを施してエツチング
する。逆スパッタによるエツチングにより、前記パター
ンの角部が選択的にエツチングされ、第２図に示すよう
にパターン２ｂの角部がなめらかになる。そのため、注
型樹脂と注型成形用型の離型かスムーズに行なわれるよ
うになり、トラッキング用溝、情報用ピットの転写を正
確に行なうことができる。Next, this mold is etched by reverse sputtering with Ar or the like. By etching by reverse sputtering, the corners of the pattern are selectively etched, and the corners of pattern 2b are smoothed as shown in FIG. Therefore, the casting resin and the casting mold can be released smoothly, and the tracking grooves and information pits can be accurately transferred.
［作用］
本発明の注型成形用型の製造方法においては、型基板上
に金属によってトラッキング用溝および情報用ビット用
のパターンを形成し、次いでその表面に逆スパッタを施
すことにより、前記パターンの凸部の角部は削り取られ
、得られた注型成形用型を用いて情報記録媒体用基板を
注型成形すると、離型性が良好で、トラッキング用溝、
情報用ピットが欠けることがなく、転写を正確に行なう
ことができる。[Function] In the method for manufacturing a cast molding mold of the present invention, patterns for tracking grooves and information bits are formed using metal on a mold substrate, and then reverse sputtering is applied to the surface of the pattern. The corners of the convex portions are shaved off, and when an information recording medium substrate is cast-molded using the obtained cast-molding mold, the mold release property is good, and the tracking grooves and
The information pits are not missing and the transfer can be performed accurately.
［実施例］ 以下、実施例を示し本発明をさらに具体的に説明する。[Example] Hereinafter, the present invention will be explained in more detail with reference to Examples.
実施例１
第１図（ａ）〜（ｇ）は、本発明の注型成形用型の製造
方法の特徴を最もよく表わす工程図である。Example 1 FIGS. 1(a) to 1(g) are process diagrams that best represent the characteristics of the method for manufacturing a cast molding mold of the present invention.
図はいずれも断面図である。光カード基板の製造工程を
、追って詳細に説明する。All figures are cross-sectional views. The manufacturing process of the optical card board will be explained in detail later.
第１図（ａ）は鏡面を有する厚さ３■のガラス板で、そ
の上にスパッタ法により厚さ１０００〜３０００人のク
ロム膜を形成する（第１図（ｂ））。FIG. 1(a) shows a glass plate having a mirror surface and a thickness of 3 cm, on which a chromium film having a thickness of 1,000 to 3,000 thick is formed by sputtering (FIG. 1(b)).
この厚みは、トラッキング用溝の深さ、情報用ピットの
深さに、硬化する注型樹脂の収縮率を考慮した設計値と
する。This thickness is a design value that takes into consideration the depth of the tracking groove, the depth of the information pit, and the shrinkage rate of the hardening casting resin.
次に、第１図（Ｃ）に示すように、ポジ型フォトレジス
ト３をスピンコード法により、厚み１０００人に塗布す
る。次いで、トラッキング用溝、情報用ピットを露光後
現像を行ない、露出したクロム膜を酸でエツチングを行
ない、十分に洗浄したのち乾燥する。Next, as shown in FIG. 1C, a positive type photoresist 3 is applied to a thickness of 1000 mm using a spin code method. Next, the tracking grooves and information pits are exposed and developed, and the exposed chromium film is etched with acid, thoroughly washed, and then dried.
次に、残存フォトレジストを酸素プラズマ沃化法により
除去し、トラッキング用溝、情報用ピッ −トのパター
ン２ａを形成したガラス板を得た。（第１図（ｄ））
次に、これを真空槽に入れ、槽中な１０−’Ｔｏｒｒま
で真空に引き、 Ａｒガスを５０ｍＴｏｒｒ導入し、こ
れにプラズマ放電を発生させ前記ガラス板に逆スパッタ
を行ない、パターン２ａの角部な削り取り、パターン２
ｂを有する注型成形用型を得た。（第１図（ｅ））
得られた注型成形用型と、その型と同じ大きさの鏡面を
有する厚み３ｍｍのガラス板５をスペーサー６を介し設
置し、注型成形装置を作成した。Next, the remaining photoresist was removed by oxygen plasma iodization to obtain a glass plate on which a pattern 2a of tracking grooves and information pits was formed. (Fig. 1(d)) Next, this is placed in a vacuum chamber, the chamber is evacuated to 10-' Torr, Ar gas is introduced at 50 mTorr, and a plasma discharge is generated to cause reverse sputtering on the glass plate. , remove the corners of pattern 2a, and pattern 2
A casting mold having b was obtained. (FIG. 1(e)) The obtained cast molding mold and a glass plate 5 having a thickness of 3 mm and having a mirror surface of the same size as the mold were installed via a spacer 6 to create a cast molding device.
（第１図（ｆ））
該装置に、注型樹脂４としてアクリル樹脂のモノマーに
重合開始剤を加えたものを注入し、１３００Ｃ９２時間
硬化させた。その後離型し、光カード用基板７を得た。(FIG. 1(f)) A casting resin 4 in which a polymerization initiator was added to an acrylic resin monomer was injected into the apparatus and cured at 1300C for 92 hours. Thereafter, the mold was released to obtain an optical card substrate 7.
（第１図（ｇ））
得られた光カード用基板にはトラッキング用溝、情報用
ピットの欠けは生じなかった。(FIG. 1(g)) No chipping of tracking grooves or information pits occurred in the obtained optical card substrate.
［発明の効果］
以上説明したように、本発明の方法により製造された注
型成形用型を用いれば、注型成形法による情報記録媒体
用基板の製造方法において、トラッキング用溝、情報ピ
ットの正確な転写かできる。[Effects of the Invention] As explained above, if the cast molding mold manufactured by the method of the present invention is used, tracking grooves and information pits can be formed in the method of manufacturing an information recording medium substrate by the cast molding method. Accurate transcription is possible.
第１図（ａ）〜（ｇ）は本発明の注型成形用型の製造方
法の一実施例を示す工程図、第２図は逆スパッタを施し
たパターンの説明図および第３図はエツチングにより形
成したパターンの説明図である。Figures 1 (a) to (g) are process diagrams showing an example of the method for manufacturing a cast molding mold of the present invention, Figure 2 is an explanatory diagram of a pattern subjected to reverse sputtering, and Figure 3 is an illustration of an etching pattern. It is an explanatory view of a pattern formed by.
Claims (1)
フォーマットパターンを有する注型成形用型の製造方法
において、型基板上に金属によってトラッキング用溝お
よび情報用ピット用のパターンを形成し、次いでその表
面に逆スパッタを施し前記パターンの角部を削り取るこ
とを特徴とする注型成形用型の製造方法。In a method for producing a cast molding mold having an uneven preformat pattern such as tracking grooves and information pits on the surface, patterns for tracking grooves and information pits are formed with metal on a mold substrate, and then the surface A method for manufacturing a cast molding mold, comprising applying reverse sputtering to the pattern and scraping off the corners of the pattern.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32967987A JPH01171820A (en) | 1987-12-28 | 1987-12-28 | Manufacture of mold for cast molding |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP32967987A JPH01171820A (en) | 1987-12-28 | 1987-12-28 | Manufacture of mold for cast molding |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01171820A true JPH01171820A (en) | 1989-07-06 |
Family
ID=18224053
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32967987A Pending JPH01171820A (en) | 1987-12-28 | 1987-12-28 | Manufacture of mold for cast molding |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01171820A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003009284A1 (en) * | 2001-07-18 | 2003-01-30 | Sony Corporation | Optical recording/reproducing meium-use substrate, production method for optical recording/reproducing medium producing stamper and optical recording/reprodcing medium producing stamper |
-
1987
- 1987-12-28 JP JP32967987A patent/JPH01171820A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2003009284A1 (en) * | 2001-07-18 | 2003-01-30 | Sony Corporation | Optical recording/reproducing meium-use substrate, production method for optical recording/reproducing medium producing stamper and optical recording/reprodcing medium producing stamper |
| US7548505B2 (en) | 2001-07-18 | 2009-06-16 | Sony Corporation | Optical recording medium having a relationship between groove width and track pitch |
| US8110343B2 (en) | 2001-07-18 | 2012-02-07 | Sony Corporation | Manufacturing method for optical recording and reproducing medium stamper |
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