JPH0227509A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPH0227509A
JPH0227509A JP17691088A JP17691088A JPH0227509A JP H0227509 A JPH0227509 A JP H0227509A JP 17691088 A JP17691088 A JP 17691088A JP 17691088 A JP17691088 A JP 17691088A JP H0227509 A JPH0227509 A JP H0227509A
Authority
JP
Japan
Prior art keywords
magnetic
spiral coil
yoke
thin film
wire structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP17691088A
Other languages
Japanese (ja)
Inventor
Akira Yoshida
亮 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17691088A priority Critical patent/JPH0227509A/en
Publication of JPH0227509A publication Critical patent/JPH0227509A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve the reliability of an action by constituting a 1st leader line structure of a magnetic substance and eliminating magnetic noises which work to a magnetic yoke from the outside through the leader line structure. CONSTITUTION:The title head is constituted of a one-layer or multilayer spiral coil 5, the magnetic yoke 2 interlinking said coil and having a magnetic gap G on its part, the 1st leader line structure 3 and a 2nd leader line structure 6 connected to the outside edge part 5b on the outside of said coil 5. The 1st leader liner structure 3 which approaches the magnetic yoke 2 in the center part of said coil 5 is constituted of a nonmagnetic substance. Therefore, the magnetic noises of the outside, etc., can be prevented from being transmitted to the magnetic yoke 2 through the 1st leader line structure 3 and the unstable fluctuation of faint magnetic flux which is transferred between a storing medium and the title head through the magnetic gap G of the magnetic yoke 2 can be surely prevented. Thus, the reliability of the action can be improved.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、薄膜磁気ヘッドに関し、特に、外部の磁気的
なノイズなどの影響を受けにくい薄膜磁気ヘッドに関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a thin film magnetic head, and particularly to a thin film magnetic head that is less susceptible to external magnetic noise.

〔従来の技術〕[Conventional technology]

たとえば、磁気テープあるいは磁気ディスクのような磁
性面記録媒体に対する情報の記録密度の増大に呼応する
べく、これらの記憶媒体に磁束を媒介として情報の記録
・再生動作を行う磁気ヘッドとして微細化が容易な薄膜
磁気ヘッドが用いられるに至っている。
For example, in response to the increase in the recording density of information on magnetic surface recording media such as magnetic tapes and magnetic disks, miniaturization of magnetic heads that record and reproduce information using magnetic flux as a medium for these storage media is easy. Thin film magnetic heads have come into use.

従来、このような薄膜磁気ヘッドとしては、たとえば、
特開昭55−84019号公報に開示される構造のもの
が知られている。
Conventionally, such thin film magnetic heads include, for example,
A structure disclosed in Japanese Unexamined Patent Publication No. 55-84019 is known.

すなわち、導体薄膜にフォトリソグラフィを施して形成
される渦巻き状コイルと、この渦巻き状コイルの一部を
絶縁膜を介して挟持するとともに中央側で接続されるこ
とによって渦巻き状コイルに鎖交し外側において磁気ギ
ャップをなす上側磁性薄膜および下側磁性膜からなるヨ
ーク構造と、前記下側磁性膜または上側磁性膜の一部で
構成され、渦巻き状コイルの中央側の内端部に接続され
る第1の引出線と、渦巻き状コイルの外端部に当該渦巻
き状コイルと同時に形成された第2の引出線とで薄膜磁
気ヘッドを構成したものである。
In other words, a spiral coil is formed by applying photolithography to a conductive thin film, and a part of this spiral coil is sandwiched through an insulating film and connected at the center so that the spiral coil is linked to the outside. a yoke structure consisting of an upper magnetic thin film and a lower magnetic film forming a magnetic gap; A thin film magnetic head is constituted by one lead wire and a second lead wire formed at the outer end of the spiral coil at the same time as the spiral coil.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

ところが、上記のような構造の従来の薄膜磁気ヘッドに
おいては、渦巻き状コイルの中央部内で互いに接続した
磁性薄膜によって構成されるヨーク構造と、当該渦巻き
状コイルの内端部に接続され、磁性薄膜によって構成さ
れる第1の引出線とが近接した状態になるため、磁性体
からなる第1の引出線を通じて外部から導かれる磁気的
なノイズが、ヨーク構造における磁気ギャップを介して
記憶媒体との間で授受される微弱な磁束に影響を与える
ことは避けられず、この微弱な磁束に不安定なゆらぎを
生じる、いわゆるウィグルが発生するなどして薄膜磁気
ヘッドの動作の信頼性が低下するという問題がある。
However, in the conventional thin film magnetic head having the above structure, there is a yoke structure consisting of magnetic thin films connected to each other within the center of the spiral coil, and a magnetic thin film connected to the inner end of the spiral coil. Because the magnetic noise introduced from the outside through the first lead wire made of a magnetic material is in close proximity to the first lead wire formed by This inevitably affects the weak magnetic flux exchanged between the thin-film magnetic heads, and this weak magnetic flux causes unstable fluctuations, so-called wiggles, which reduce the reliability of the thin-film magnetic head's operation. There's a problem.

そこで、本発明の目的は、引出線構造を介して外部から
磁性ヨークに作用する磁気的なノイズを排除して、動作
の信頼性を向上させた薄膜磁気ヘッドを提供することに
ある。
SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to provide a thin-film magnetic head that improves operational reliability by eliminating magnetic noise that acts on the magnetic yoke from the outside through a leader line structure.

本発明の前記ならびにその他の目的と新規な特徴は、本
明細書の記述および添付図面から明らかになるであろう
The above and other objects and novel features of the present invention will become apparent from the description of this specification and the accompanying drawings.

〔課題を解決するための手段〕[Means to solve the problem]

本願において開示される発明のうち代表的なものの概要
を簡単に説明すれば、以下の通りである。
A brief overview of typical inventions disclosed in this application is as follows.

すなわち、本発明の薄膜磁気ヘッドは、一層または多層
をなす渦巻き状コイルと、この渦巻き状コイルに鎖交し
、一部に磁気ギャップを有する磁気ヨークと、渦巻き状
コイルの中央側の内端部に接続される第1の引出線構造
と、渦巻き状コイルの外側の外端部に接続される第2の
引出線構造とからなる薄膜磁気ヘッドであって、第1の
引出線構造を非磁性体で構成したものである。
That is, the thin film magnetic head of the present invention includes a spiral coil having one layer or multiple layers, a magnetic yoke that interlinks with the spiral coil and has a magnetic gap in a part, and an inner end on the center side of the spiral coil. A thin film magnetic head comprising a first leader wire structure connected to a spiral coil, and a second leader wire structure connected to an outer end of a spiral coil, the first leader wire structure being a non-magnetic wire. It is made up of the body.

また、本発明の薄膜磁気ヘッドは、一層または多層をな
す渦巻き状コイルと、この渦巻き状コイルに鎖交し、一
部に磁気ギャップを有する磁気ヨークと、烏巻き状コイ
ルの中央側の内端部に接続される第1の引出線構造と、
渦巻き状コイルの外側の外端部に接続される第2の引出
線構造とからなる薄膜磁気ヘッドであって、第1の引出
線構造を磁性体で構成するとともに、この第1の引出線
構造の渦巻き状コイルの内端部に対する接続端が磁気ヨ
ークを取り囲む分岐部をなすようにしたものである。
Further, the thin film magnetic head of the present invention includes a spiral coil having one layer or multiple layers, a magnetic yoke interlinked with the spiral coil and having a magnetic gap in a part, and an inner end on the center side of the spiral coil. a first leader line structure connected to the section;
A thin film magnetic head comprising a second leader wire structure connected to the outer end of the spiral coil, the first leader wire structure being made of a magnetic material, and the first leader wire structure The connection end to the inner end of the spiral coil forms a branch part surrounding the magnetic yoke.

〔作用〕[Effect]

上記した前者の薄膜磁気ヘッドによれば、渦巻き状コイ
ルの中央部において磁性ヨークに近接する第1の引出線
構造が非磁性体で構成されているので、外部の磁気的な
ノイズなどが第1の引出線構造を通じて磁性ヨークに伝
わることを阻止でき、磁性ヨークの磁気ギャップを介し
て記憶媒体と授受される微弱な磁束の不安定なゆらぎな
どが確実に防止され、薄膜磁気ヘッドの動作の信頼性を
向上させることができる。
According to the former thin-film magnetic head described above, the first lead wire structure near the magnetic yoke in the center of the spiral coil is made of a non-magnetic material, so external magnetic noise etc. The magnetic flux is prevented from being transmitted to the magnetic yoke through the lead wire structure, and unstable fluctuations in the weak magnetic flux exchanged with the storage medium through the magnetic gap of the magnetic yoke are reliably prevented, increasing the reliability of the operation of the thin-film magnetic head. can improve sex.

また、上記した後者の薄膜磁気ヘッドによれば、渦巻き
状コイルの中央部において磁性ヨークに近接する第1の
引出線構造が磁性体で構成されているとともに、渦巻き
状コイルに対する接続端が磁性ヨークを取り囲む分岐を
なしているので、たとえば、第1の引出線構造の分岐部
における磁気抵抗を磁性ヨークよりも小さくすることで
、外部から第1の引出線構造を通じて到来する磁気的な
ノイズを分岐部によって磁性ヨークを迂回するように導
くことができる。
Further, according to the latter thin film magnetic head described above, the first lead wire structure close to the magnetic yoke in the center of the spiral coil is made of a magnetic material, and the connection end to the spiral coil is connected to the magnetic yoke. For example, by making the magnetic resistance at the branch part of the first leader line structure smaller than that of the magnetic yoke, it is possible to branch out magnetic noise that comes from outside through the first leader line structure. The magnetic yoke can be guided around the magnetic yoke by the section.

これにより、磁性ヨークの磁気ギャップを介して記憶媒
体と授受される微弱な磁束が外部の磁気的なノイズによ
って不安定にゆらぐことが防止され、薄膜磁気ヘッドの
動作の信頼性を向上させることができる。
This prevents the weak magnetic flux exchanged with the storage medium through the magnetic gap of the magnetic yoke from fluctuating unstablely due to external magnetic noise, improving the reliability of the operation of the thin-film magnetic head. can.

〔実施例1〕 第1図は、本発明の一実施例である薄膜磁気ヘッドの要
部を示す平面図である。
[Embodiment 1] FIG. 1 is a plan view showing the main parts of a thin film magnetic head which is an embodiment of the present invention.

たとえば、アルミナなどからなる非磁性の基板1の上に
は、磁性ヨーク2を構成する下部磁性膜2aと、第1の
引出線構造3とが所定の図形に形成されている。
For example, on a non-magnetic substrate 1 made of alumina or the like, a lower magnetic film 2a constituting a magnetic yoke 2 and a first leader line structure 3 are formed in a predetermined shape.

この場合、第1の引出線構造3は、たとえば、下部磁性
膜2aとは異なる非磁性の導体で構成されている。
In this case, the first leader line structure 3 is made of, for example, a non-magnetic conductor different from the lower magnetic film 2a.

下部磁性膜2aおよび第1の引出線構造3は、所定の形
状に被着された絶縁膜4によって隠蔽されており、さら
にこの絶縁膜4の上には、導体からなる渦巻き状コイル
5が形成されている。
The lower magnetic film 2a and the first leader wire structure 3 are hidden by an insulating film 4 deposited in a predetermined shape, and a spiral coil 5 made of a conductor is formed on the insulating film 4. has been done.

この渦巻き状コイル5の中央部側の内端15aは下部に
位置する絶縁膜4の穿設された透孔4aを通じて下側の
第1の引出線構造3の端部に電気的に接続されている。
The inner end 15a of the spiral coil 5 on the central side is electrically connected to the end of the lower first leader wire structure 3 through the through hole 4a formed in the insulating film 4 located below. There is.

また、渦巻き状コイル5の外端15bは、当該渦巻き状
コイル5と同時に同一の導体で形成された東2の引出線
構造6に対し、一体に接続されている。
Further, the outer end 15b of the spiral coil 5 is integrally connected to the east 2 leader wire structure 6, which is formed of the same conductor as the spiral coil 5.

さらに、渦巻き状コイル5の上には、図示しない絶縁膜
を介して、前記下部磁性膜2aと対になる図示しない上
部磁性膜が被着されており、この上部磁性膜と下部磁性
膜2aとは、渦巻き状コイル5の中央部において、図示
しない前記絶縁膜に穿設された透孔7aを介して相互に
接続されているとともに、渦巻き状コイル5の外部にふ
いて基板1の外縁部に臨む位置で磁気ギャップGをなす
ことで、渦巻き状コイル5に鎖交する磁性ヨーク2を構
成している。
Further, an upper magnetic film (not shown) that pairs with the lower magnetic film 2a is deposited on the spiral coil 5 via an insulating film (not shown), and the upper magnetic film and the lower magnetic film 2a are bonded together. are connected to each other at the center of the spiral coil 5 through a through hole 7a (not shown) formed in the insulating film, and are connected to the outside of the spiral coil 5 at the outer edge of the substrate 1. By forming a magnetic gap G at the facing position, a magnetic yoke 2 interlinked with the spiral coil 5 is constructed.

そして、図示しない記憶媒体の磁性面に磁性ヨーク2の
磁気ギャップGを近接させ、その状態で渦巻き状コイル
5に第2の引出線構造6および前記第1の引出線構造3
を介して外部の図示しない制御装置などから所定の情報
に対応する波形に変調された電気信号を通じる際に磁気
ギャップGに形成される漏れ磁束によって記憶媒体の磁
性面を磁化することで情報の記録動作が行われるととも
に、所定の状態に磁化された記憶媒体側から磁性ヨーク
2に作用する磁束によって渦巻き状コイル5に誘起され
る電流を検知することで情報の再生動作が行われるもの
である。
Then, the magnetic gap G of the magnetic yoke 2 is brought close to the magnetic surface of the storage medium (not shown), and in this state, the spiral coil 5 is connected to the second leader wire structure 6 and the first leader wire structure 3.
When an electrical signal modulated into a waveform corresponding to predetermined information is transmitted from an external control device (not shown) through the magnetic gap G, leakage magnetic flux is formed in the magnetic gap G, which magnetizes the magnetic surface of the storage medium. At the same time as the recording operation is performed, the information reproduction operation is performed by detecting the current induced in the spiral coil 5 by the magnetic flux acting on the magnetic yoke 2 from the storage medium side that has been magnetized in a predetermined state. .

ここで、磁性ヨーク2の磁気ギャップGを介して記憶媒
体との間で授受される磁束は一般に掻めて微弱であるた
め、たとえば、従来のように渦巻き状コイル5の中央部
において磁性ヨーク2に近接した状態で当該渦巻き状コ
イル5の内端部5aに接続される第1の引出線構造3を
磁性体で構成する場合には、外部の磁気的なノイズなど
が第1の引出線構造3を通じて磁性ヨーク2に磁気的な
悪影響を及ぼすことは避けられず、前述のようなウィグ
ルなどの薄膜磁気ヘッドの動作を不安定にする有害な現
象が発生するという問題がある。
Here, since the magnetic flux exchanged between the magnetic yoke 2 and the storage medium via the magnetic gap G is generally very weak, for example, as in the conventional case, the magnetic yoke 2 When the first leader wire structure 3 connected to the inner end 5a of the spiral coil 5 in a state close to the spiral coil 5 is made of a magnetic material, external magnetic noise etc. may damage the first leader wire structure. 3, it is unavoidable that the magnetic yoke 2 is adversely affected by the magnetic force, and there is a problem in that a harmful phenomenon such as the above-mentioned wiggle that destabilizes the operation of the thin film magnetic head occurs.

ところが、本実施例の場合には、第1の引出線構造3が
非磁性体で構成されているため外部の磁気的なノイズが
第1の引出線構造3を伝って磁性ヨーク2に作用するこ
とを阻止できる。
However, in the case of this embodiment, since the first leader line structure 3 is made of a non-magnetic material, external magnetic noise is transmitted through the first leader line structure 3 and acts on the magnetic yoke 2. can be prevented.

これにより、ウィグルなどの有害な現象が発生すること
が防止され、薄膜磁気ヘッドの動作の信頼性を向上させ
ることができる。
This prevents harmful phenomena such as wiggle from occurring and improves the reliability of the operation of the thin film magnetic head.

〔実施例2〕 第2図は、本発明の他の実施例である薄膜磁気ヘッドの
要部を示す平面図である。
[Embodiment 2] FIG. 2 is a plan view showing the main parts of a thin film magnetic head according to another embodiment of the present invention.

本実施例2の場合には、基板1の上に形成される第1の
引出線構造8を、たとえば下部磁性膜2aと同一の磁性
体で同時に形成するとともに、渦巻き状コイル5の内端
15aに対する接続端8aが下部磁性膜2aと図示しな
い上部磁性膜とで構成される磁性ヨーク2を取り囲む分
岐部8bをなすようにするとともに、磁気抵抗が磁性ヨ
ーク2よりも充分小さくなるように当該分岐部8bにお
ける断面積を充分大きく設定したところが前記実施例1
の場合と異なるものである。
In the case of the second embodiment, the first leader line structure 8 formed on the substrate 1 is simultaneously formed of the same magnetic material as the lower magnetic film 2a, and the inner end 15a of the spiral coil 5 is The connection end 8a to the magnetic yoke 2a forms a branch 8b that surrounds the magnetic yoke 2 composed of a lower magnetic film 2a and an upper magnetic film (not shown), and the branch is formed so that the magnetic resistance is sufficiently smaller than that of the magnetic yoke 2. Embodiment 1 shows that the cross-sectional area of the portion 8b is set sufficiently large.
This is different from the case of .

これにより、外部から磁性体の第1の引出線構造8を介
して磁性ヨーク2の側に到来する磁気的ノイズによる有
害な磁束が磁性ヨーク2を迂回するように導かれるので
、磁気的ノイズによる有害な磁束が磁性ヨーク2を通過
することを阻止できる。
As a result, harmful magnetic flux due to magnetic noise that comes from the outside to the magnetic yoke 2 side via the first leader wire structure 8 made of magnetic material is guided to bypass the magnetic yoke 2. Harmful magnetic flux can be prevented from passing through the magnetic yoke 2.

この結果、図示しない記憶媒体に対する目的の情報の授
受に際して磁性ヨーク2の磁気ギャップGに形成される
微弱な磁束に対する外部の磁気的なノイズの悪影響が緩
和され、薄膜磁気ヘッドの動作の信頼性を向上させるこ
とができる。
As a result, the adverse effects of external magnetic noise on the weak magnetic flux formed in the magnetic gap G of the magnetic yoke 2 when transmitting and receiving target information to and from a storage medium (not shown) are alleviated, and the reliability of the operation of the thin-film magnetic head is improved. can be improved.

また、本実施例2の場合には、第1の引出線構造8を、
磁性ヨーク2を構成する下部磁性膜2aと同時に同一の
磁性物質を用いて形成することにより、従来と同一の工
程数で製作することができ、工程数が増加するという不
利もない。
In addition, in the case of the second embodiment, the first leader line structure 8 is
By forming the lower magnetic film 2a constituting the magnetic yoke 2 using the same magnetic material, it can be manufactured using the same number of steps as the conventional method, and there is no disadvantage of an increase in the number of steps.

以上本発明者によってなされた発明を実施例に基づき具
体的に説明したが、本発明は前記実施例に限定されるも
のではなく、その要旨を逸脱しない範囲で種々変更可能
であることはいうまでもない。
Although the invention made by the present inventor has been specifically explained above based on Examples, it goes without saying that the present invention is not limited to the Examples and can be modified in various ways without departing from the gist thereof. Nor.

〔発明の効果〕〔Effect of the invention〕

本願において開示される発明のうち代表的なものの概要
を簡単に説明すれば、以下の通りである。
A brief overview of typical inventions disclosed in this application is as follows.

本発明の薄膜磁気ヘッドは、一層または多層をなす渦巻
き状コイルと、この渦巻き状コイルに鎖交し、一部に磁
気ギャップを有する磁気ヨークと、前記渦巻き状コイル
の中央側の内端部に接続される第1の引出線構造と、前
記渦巻き状コイルの外側の外端部に接続される第2の引
出線構造とからなる薄膜磁気ヘッドであって、前記第1
の引出線構造が非磁性体からなる構造であるため、渦巻
き状コイルの中央部において磁性ヨークに近接する第1
の引出線構造が非磁性体で構成されているので、外部の
磁気的なノイズなどが第1の引出線構造を通じて磁性ヨ
ークに伝わることを阻止でき、磁性ヨークの磁気ギャッ
プを介して記憶媒体と授受される微弱な磁束の不安定な
ゆらぎなどが確実に防止され、薄膜磁気ヘッドの動作の
信頼性を向上させることができる。
The thin film magnetic head of the present invention includes a spiral coil having a single layer or multiple layers, a magnetic yoke interlinked with the spiral coil and having a magnetic gap in a part, and an inner end on the center side of the spiral coil. A thin film magnetic head comprising a first lead wire structure connected to the coil, and a second lead wire structure connected to an outer end of the spiral coil, the thin film magnetic head comprising: a first lead wire structure connected to the spiral coil;
Since the lead wire structure is made of non-magnetic material, the first wire near the magnetic yoke in the center of the spiral coil
Since the leader wire structure is made of a non-magnetic material, it is possible to prevent external magnetic noise from being transmitted to the magnetic yoke through the first leader wire structure, and it is possible to prevent external magnetic noise from being transmitted to the magnetic yoke through the magnetic gap between the magnetic yoke and the storage medium. Unstable fluctuations in the weak magnetic flux sent and received are reliably prevented, and the reliability of the operation of the thin-film magnetic head can be improved.

また、本発明の薄膜磁気ヘッドは、一層または多層をな
す烏巻き状コイルと、この渦巻き状コイルに鎖交し、一
部に磁気ギャップを有する磁気ヨークと、前記渦巻き状
コイルの中央側の内端部に接続される第1の引出線構造
と、前記渦巻き状コイルの外側の外端部に接続される第
2の引出線構造とからなる薄膜磁気ヘッドであって、前
記第1の引出線構造が磁性体から、なり、かつ該第1の
引出線構造の前記渦巻き状コイルの内端部に対する接続
端は、前記磁気ヨークを取り囲む分岐部をなしているの
で、たとえば、第1の引出線構造の分岐部における磁気
抵抗を磁性ヨークよりも小さくすることで、外部から第
1の引出線構造を通じて導かれる磁気的なノイズを分岐
部によって磁性ヨークを迂回するように導くことができ
、磁性ヨークの磁気ギャップを介して記憶媒体と授受さ
れる微弱な磁束が外部の磁気的なノイズによって不安定
にゆらぐことが防止され、薄膜磁気ヘッドの動作の信頼
性を向上させることができる。
Further, the thin film magnetic head of the present invention includes a one-layer or multi-layered spiral coil, a magnetic yoke interlinked with the spiral coil and having a magnetic gap in a part, and an inner inner part of the central side of the spiral coil. A thin film magnetic head comprising a first leader wire structure connected to an end portion and a second leader wire structure connected to an outer end portion outside the spiral coil, the first leader wire structure being connected to an outer end portion of the spiral coil. The structure is made of a magnetic material, and the connection end of the first leader wire structure to the inner end of the spiral coil forms a branch part surrounding the magnetic yoke, so that, for example, the first leader wire By making the magnetic resistance at the branch part of the structure smaller than that of the magnetic yoke, magnetic noise introduced from the outside through the first leader line structure can be guided by the branch part to bypass the magnetic yoke, and the magnetic yoke The weak magnetic flux exchanged with the storage medium through the magnetic gap is prevented from fluctuating unstably due to external magnetic noise, and the reliability of the operation of the thin-film magnetic head can be improved.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例である薄膜磁気ヘッドの要部
を示す平面図、 第2図は本発明の他の実施例である薄膜磁気ヘッドの要
部を示す平面図である。 1・・・基板、2・・・磁性ヨーク、2a・・・下部磁
性膜、3・・・第1の引出線構造、4・・・絶縁膜、4
a・・・透孔、5・・・渦巻き状コイル、5a・・・内
端部、5b・・・外端部、6・・・第2の引出線構造、
7a・・・透孔、8・・・第1の引出線構造、8a・・
・接続端、8b・・・分岐部、G・・・磁気ギャップ。
FIG. 1 is a plan view showing the main parts of a thin film magnetic head according to an embodiment of the present invention, and FIG. 2 is a plan view showing the main parts of a thin film magnetic head according to another embodiment of the invention. DESCRIPTION OF SYMBOLS 1... Substrate, 2... Magnetic yoke, 2a... Lower magnetic film, 3... First leader line structure, 4... Insulating film, 4
a... Through hole, 5... Spiral coil, 5a... Inner end, 5b... Outer end, 6... Second leader wire structure,
7a... Through hole, 8... First leader line structure, 8a...
・Connection end, 8b...branch part, G...magnetic gap.

Claims (1)

【特許請求の範囲】 1、一層または多層をなす渦巻き状コイルと、この渦巻
き状コイルに鎖交し、一部に磁気ギャップを有する磁気
ヨークと、前記渦巻き状コイルの中央側の内端部に接続
される第1の引出線構造と、前記渦巻き状コイルの外側
の外端部に接続される第2の引出線構造とからなる薄膜
磁気ヘッドであって、前記第1の引出線構造が非磁性体
からなることを特徴とする薄膜磁気ヘッド。 2、一層または多層をなす渦巻き状コイルと、この渦巻
き状コイルに鎖交し、一部に磁気ギャップを有する磁気
ヨークと、前記渦巻き状コイルの中央側の内端部に接続
される第1の引出線構造と、前記渦巻き状コイルの外側
の外端部に接続される第2の引出線構造とからなる薄膜
磁気ヘッドであって、前記第1の引出線構造が磁性体か
らなり、かつ該第1の引出線構造の前記渦巻き状コイル
の内端部に対する接続端は、前記磁気ヨークを取り囲む
分岐部をなしていることを特徴とする薄膜磁気ヘッド。
[Claims] 1. A spiral coil having a single layer or multiple layers, a magnetic yoke interlinked with the spiral coil and having a magnetic gap in part, and an inner end on the center side of the spiral coil. A thin film magnetic head comprising a first leader wire structure connected to the spiral coil and a second leader wire structure connected to an outer end portion of the spiral coil, the first leader wire structure being non-conductive. A thin film magnetic head characterized by being made of a magnetic material. 2. A spiral coil having one layer or multiple layers, a magnetic yoke interlinked with the spiral coil and having a magnetic gap in a part, and a first magnetic yoke connected to the inner end on the center side of the spiral coil. A thin film magnetic head comprising a leader wire structure and a second leader wire structure connected to an outer end of the spiral coil, wherein the first leader wire structure is made of a magnetic material, and the first leader wire structure is made of a magnetic material; A thin film magnetic head characterized in that a connecting end of the first lead wire structure to the inner end of the spiral coil forms a branch portion surrounding the magnetic yoke.
JP17691088A 1988-07-18 1988-07-18 Thin film magnetic head Pending JPH0227509A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17691088A JPH0227509A (en) 1988-07-18 1988-07-18 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17691088A JPH0227509A (en) 1988-07-18 1988-07-18 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPH0227509A true JPH0227509A (en) 1990-01-30

Family

ID=16021894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17691088A Pending JPH0227509A (en) 1988-07-18 1988-07-18 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPH0227509A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076326A (en) * 1993-06-14 1995-01-10 Nec Corp Thin-film magnetic head device
EP3225494A1 (en) 2016-04-01 2017-10-04 Nabtesco Corporation Plug door device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH076326A (en) * 1993-06-14 1995-01-10 Nec Corp Thin-film magnetic head device
EP3225494A1 (en) 2016-04-01 2017-10-04 Nabtesco Corporation Plug door device

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