JPH02271968A - Aln-based sintered body - Google Patents

Abstract

PURPOSE:To reduce light transmittance and to increase heat conductivity by sintering a mixture of prescribed percentages of Y2O3, the oxide, carbide, boride, chloride or fluoride of Ce and AlN so that the resulting sintered body is uniformly colored dark green. CONSTITUTION:A mixture consisting of 1-10wt.% Y2O3, 0.1-5wt.% one or more among the oxide, carbide, boride, chloride and fluoride of Ce and the balance AlN is sintered to form an AlN-based sintered body. The Y2O3 functions as an AlN sintering agent. The Ce compds. color the AlN-based sintered body uniformly dark green.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to A
This invention relates to a j2N quality sintered body.

[Prior Art] Alumina substrates are often used for mounting substrates for semiconductor devices, but recently, in order to improve the heat dissipation characteristics of mounting substrates, alumina substrates that have thermal conductivity 5 to 10 times higher than alumina and high insulation Aj2N substrates with high dielectric properties and low dielectric constants have been developed.

[Problems to be Solved by the Invention] However, in order to increase thermal conductivity, the conventional AJ2N substrate has fewer impurities and increased density, and as a result, it is white and has translucency. There is. Therefore, there are the following problems when using this as a mounting board.

(1) Appearance defects such as uneven color and uneven translucency occur frequently.
Manufacturing yield will decrease.

(2) When performing screen printing etc. during metallization,
Its translucency becomes an obstacle, making accurate positioning using an infrared sensor or the like difficult.

On the other hand, AILN boards that exhibit a gray or black-gray color that can be easily detected by infrared sensors, etc. are also known, but such A42N boards do not have very high thermal conductivity and have poor heat dissipation properties. be.

Therefore, an object of the present invention is to provide an AlN sintered body that can improve yield, positioning accuracy, and heat dissipation characteristics in terms of appearance.

[Means for Solving the Problems] In order to solve the above problems, the present invention provides Y2O31-10
% by weight, 0.1 to 5% by weight of at least one of Ce oxides, carbides, borides, chlorides, or fluorides, and the balance AlN.

[Function] In the above means, Y2O functions as a sintering aid for AIN and contributes to improving thermal conductivity. Y, O
If , is less than 1% by weight, a dense sintered body cannot be obtained, and if it exceeds 10% by weight, thermal conductivity decreases, color unevenness occurs, and costs increase. The amount of Y2O added is preferably 3 to 5% by weight. This is 3% by weight
If it is less than 5% by weight, the degree of improvement in thermal conductivity will be small, and if it exceeds 5% by weight, the effect will not be sufficient to compensate for the increase in cost.

Ce oxides, carbides, borides, chlorides, or fluorides color the AlN sintered body uniformly dark green, reduce translucency, and further improve thermal conductivity. weight%
If it is less than 5% by weight, the sintered body will not be colored, and if it exceeds 5% by weight, the thermal conductivity will decrease.

The amount of Ce oxide, carbide, boride, chloride or fluoride added is preferably 0.1 to 2 double weight.

The sintered body is fired at 1700 to 1900°C in an atmosphere of N2 gas or other inert gas.

[Example] The present invention will be explained in detail below.

Y203 and Ce oxide, carbide, boride, chloride, or fluoride were added to the raw material powder of A42N in the proportions shown in Tables 1 to 3, and the mixture was ground and mixed. These were formed into a disk shape with a diameter of 16In111 and a thickness of 8mm, and N2
Af was baked at 1750℃ for 1 hour in a gas atmosphere.
A 1N sintered body was obtained.

Each of the obtained sintered bodies had a uniform dark green color, with the exception of the sample (white) to which no Ce oxide, carbide, boride, chloride, or fluoride was added, and the translucency was sufficiently reduced. was recognized. These were also sliced to a thickness of 0.5111Q+, but they were also sufficiently opaque and no transmission of visible light was observed.

The thermal conductivity is Y2O without the addition of Ce oxides, carbides, borides, chlorides or fluorides.

When the thermal conductivity of the added 5% by weight is taken as 100%, the results are as shown in Tables 1 to 3.

In each table, ×, △, ○, ◎ represent the coloring effect, × is no effect, Δ is colored but the effect is poor, ○ is effective,
◎ indicates a large effect.

Therefore, Aj2N contains Y, 0.1 to 10% by weight, and at least If! of an oxide, carbide, boride, chloride, or fluoride of Ce! By adding ~5% by weight of IO,t, appearance defects due to color unevenness, non-uniform translucency, etc. are reduced, and yield is improved. At the same time, positioning accuracy using an infrared sensor during metallization is improved, and heat resistance is improved. It can be seen that the conductivity is improved.

[Effects of the Invention] As described above, according to the present invention, the sintered body is colored uniformly in dark green, and the translucency is sufficiently reduced, so that the yield in terms of appearance can be improved, and it is also possible to improve the yield of infrared sensors, etc. positioning can be performed easily and with high precision.

Furthermore, since the thermal conductivity is improved compared to the conventional one, the heat dissipation characteristics can be further improved.

Applicant: Toshiba Ceramics Corporation

Claims (1)

[Claims] (1) Y_2O_31 to 10% by weight, 0.1 to 5% by weight of at least one of Ce oxides, carbides, borides, chlorides, or fluorides, and the balance AlN. Characteristic AlN sintered body.