JPH02267880A - Ionized air blower - Google Patents
Ionized air blowerInfo
- Publication number
- JPH02267880A JPH02267880A JP8679989A JP8679989A JPH02267880A JP H02267880 A JPH02267880 A JP H02267880A JP 8679989 A JP8679989 A JP 8679989A JP 8679989 A JP8679989 A JP 8679989A JP H02267880 A JPH02267880 A JP H02267880A
- Authority
- JP
- Japan
- Prior art keywords
- balance
- ion
- positive
- discharge electrode
- high voltage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 150000002500 ions Chemical class 0.000 claims abstract description 61
- 238000011045 prefiltration Methods 0.000 claims abstract description 4
- 230000005611 electricity Effects 0.000 abstract description 7
- 230000003068 static effect Effects 0.000 abstract description 7
- 238000001514 detection method Methods 0.000 abstract description 5
- 239000003570 air Substances 0.000 abstract 1
- 239000012080 ambient air Substances 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 241000201776 Steno Species 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
Landscapes
- Elimination Of Static Electricity (AREA)
Abstract
Description
【発明の詳細な説明】
〈産業上の利用分野〉
本発明は、空気をイオン化し、イオン風として帯電物に
送風して帯電物の静電気を除去するイオン化エアー送風
機に係るもので、詳しくは、発生する正イオンと負イオ
ンのイすンバランスを自動制御する機能を具備したイオ
ン化エアー送風機に関するものである。[Detailed Description of the Invention] <Industrial Application Field> The present invention relates to an ionized air blower that ionizes air and blows the ionized air onto a charged object to remove static electricity from the charged object. The present invention relates to an ionized air blower equipped with a function to automatically control the balance between generated positive ions and negative ions.
〈従来の技術〉
従来のイオン化エアー送風機は、例えば米国特許3.7
11.743号で、第3図に示すように、ケース(+1
の中に、ファン(2)を設置し、空気の導入口に設置さ
れたプレフィルタ−(3)を通過した空気を、高圧電源
(4)に接続された放電針(5)によりコロナ放電を発
生させて空気をイオン化し、前面のグリッド(6)から
イオン風を送風するものである。<Prior art> A conventional ionized air blower is disclosed in, for example, U.S. Patent No. 3.7.
11.743, the case (+1
A fan (2) is installed in the chamber, and the air that has passed through the pre-filter (3) installed at the air inlet is subjected to corona discharge using a discharge needle (5) connected to a high-voltage power source (4). The ionized air is generated to ionize the air, and the ionized wind is blown from the front grid (6).
〈発明が解決しようとする課題〉
従来の技術は、ただ単に空気を正イオンと負イオノにす
るための高電圧を放電針に印加しているだけで、発生し
たイオンを検出し、表示ずろ機能がなく、空気イオンの
i認ができなかった。又、イオンバランスの検出機能も
具備されていない。<Problem to be solved by the invention> Conventional technology simply applies a high voltage to the discharge needle to convert the air into positive ions and negative ions. There was no air ion recognition. Furthermore, it does not have an ion balance detection function.
このようなイオン化エアー送風機は、印加する放電電圧
がある一定の値に固定されでいろため、放Flit(5
1の近くで発生する正イオンと負イオノの数は、放電針
(5)の経時変化に左右され、持に表面が酸化したり、
塵埃か表面に付着すると、イオン数(イオンしベル)が
減少し、正イオ、と負イオ、の数が不均衡になってしま
う。この不均衡なイオン風を帯電物に送風しても、静電
気を完全に除去することはできず、逆に帯電させてしま
う問題があった。In such an ionized air blower, the applied discharge voltage cannot be fixed at a certain value, so the discharge Flit (5
The number of positive ions and negative ions generated near the discharge needle (5) depends on the change over time of the discharge needle (5), and the surface may become oxidized or
When dust adheres to the surface, the number of ions decreases and the number of positive and negative ions becomes unbalanced. Even if this unbalanced ion wind is blown onto a charged object, static electricity cannot be completely removed, but instead there is a problem in that the object is charged.
本発明は、放ti電極や周囲の環境条件に変化があって
も、正イオンと負イオンのバランスを常時制御する機能
と、イオンレベルを検出し、表示する機能を具備したイ
オン化エアー送風機を提供することを目的としている。The present invention provides an ionized air blower that is equipped with a function to constantly control the balance of positive and negative ions and a function to detect and display the ion level even if there are changes in the radiation electrode or surrounding environmental conditions. It is intended to.
く課題を解決するだめの手段〉
上記の目的を達成させるために、本発明のイオン化エア
ー送風機においては、イオンバランスを検出するセンサ
ーをイオン発生部に設置し、その検出信号を制御し、高
電圧を調整して、放電電極に高電圧を印加したものであ
る。空気のイオン化は、コロナ放電現型を用いており、
印加する高電圧は直流で、放電電極は正極と負極から構
成されている。いずれか一方の極性の印加電圧を固定さ
せ、他方の電圧をイオンバランスのセンサー信号により
制御し、発生イオンのバランスを調整した。In order to achieve the above object, in the ionized air blower of the present invention, a sensor for detecting the ion balance is installed in the ion generating section, and the detection signal is controlled, and the high voltage A high voltage is applied to the discharge electrode by adjusting the voltage. Air ionization uses a corona discharge model,
The high voltage applied is direct current, and the discharge electrode consists of a positive electrode and a negative electrode. The applied voltage of either polarity was fixed, and the other voltage was controlled by an ion balance sensor signal to adjust the balance of generated ions.
イオンレベルの検出は、電圧を固定させた極性の放電電
極の近傍に導電線を設け、そのイオ、電流として検出し
、表示させた。又、イオンバランスは、正極と負極の放
電Ti極の近傍に、同様な導電線を設置し、正負イオン
の不均衡に比例して発生されろイオン電流として検出し
、この検出信号を制御して、一方の極性の高電圧を制御
し、発生するイオンバランスを自動制御させた。To detect the ion level, a conductive wire was provided near a polar discharge electrode with a fixed voltage, and the ion and current were detected and displayed. In addition, ion balance is achieved by installing similar conductive wires near the discharge Ti electrodes of the positive and negative electrodes, detecting the ion current generated in proportion to the imbalance between positive and negative ions, and controlling this detection signal. By controlling the high voltage of one polarity, the generated ion balance was automatically controlled.
く作用〉
放電電極の表面が酸化したす、塵埃の付着により、イオ
ンのバランスが不均衡になると、その差に応じたイオン
電流が、イオンバランスセンサーに誘起されるので、こ
の検出信号を増幅し、電圧を可変させろ極性の高電圧を
増減させ、イオンバランスセンサーからの信号がゼロ(
均衡状態)になるまで、その調整が自動的に行われる。When the balance of ions becomes imbalanced due to oxidized soot or dust on the surface of the discharge electrode, an ion current corresponding to the difference is induced in the ion balance sensor, so this detection signal is amplified. , vary the voltage. Increase or decrease the polar high voltage until the signal from the ion balance sensor is zero (
The adjustments are made automatically until a state of equilibrium is reached.
〈実施例〉
実施例について図面を参照して説明すると、第1図及び
第2図において、ファン(10)の上流にゴし774ル
ター(11)を、最下流にグリッド(12)を設置し、
フ・rン(10)とグリッド(12)の間に放電電極(
131、イオンバランスセンサー(14)とイオンレベ
ルセンサー(15)を配置させた。<Example> To explain the example with reference to the drawings, in Figs. 1 and 2, a Gore 774 router (11) is installed upstream of the fan (10), and a grid (12) is installed at the most downstream position. ,
A discharge electrode (
131, an ion balance sensor (14) and an ion level sensor (15) were placed.
放電電極(13)に印加されろ高電圧(よ正極(16)
と負極(17)の直流で、この高電圧は、商用周波数の
入力電圧(18)を電源回路(19)で直流に整流し、
負極はDC固定回路(21)で−16VDCの直流電圧
にし、高圧発振回路(O20)(23)に入れ、高圧整
流回路(25)を経て一6KVの高電圧を放T@電極(
13)の負極に印加し、負イオンを発生させた。A high voltage is applied to the discharge electrode (13) (the positive electrode (16)
This high voltage is a direct current at the negative pole (17), and the commercial frequency input voltage (18) is rectified into direct current by the power supply circuit (19).
The negative electrode is made into a DC voltage of -16VDC by the DC fixing circuit (21), put into the high voltage oscillation circuit (O20) (23), and then passed through the high voltage rectifier circuit (25) to discharge a high voltage of -6KV to the T@electrode (
13) was applied to the negative electrode to generate negative ions.
一方、正極は、DC可変回路(20)を経て、高圧OS
C(22)で高圧高周波電圧とし、高圧整流回路(2
4)で直流高電圧にして、放電電極(Is)の正極に印
加し、正イオンを発生させた。On the other hand, the positive electrode passes through a DC variable circuit (20) and is connected to a high voltage OS.
C (22) is used as a high voltage and high frequency voltage, and the high voltage rectifier circuit (2
In step 4), a high DC voltage was applied to the positive electrode of the discharge electrode (Is) to generate positive ions.
イオンのバラ、スを検出するイオンバランスセンサー(
14)は、放電Tli極(13)の正極と負極を横切る
ように、しかも電極とある間隔を保ち、導電線を配置さ
せた。イオンの不均衡に応じてこのイオンバランスセン
サー(141に誘起されたバランス(3号は、イオン電
流アンプ(26)で増幅し、バランス制御回路(27)
を経て、バランス制御信号が正極のDC可変回路(20
)に送られ、正極の高電圧を制御する。なお、本実施例
で(よ、放電電極の正極側を可変とし負極側を固定した
場合を示したが、この逆及び正極負極とも可変としても
よいことはもちろんである。Ion balance sensor that detects ion balance (
14), a conductive wire was arranged so as to cross the positive and negative electrodes of the discharge Tli electrode (13), and at a certain distance from the electrodes. Depending on the imbalance of ions, the balance induced in this ion balance sensor (141) is amplified by the ion current amplifier (26), and the balance control circuit (27)
The balance control signal is connected to a positive DC variable circuit (20
) to control the high voltage of the positive electrode. In this embodiment, a case is shown in which the positive electrode side of the discharge electrode is variable and the negative electrode side is fixed, but it goes without saying that this may be reversed and both the positive and negative electrodes may be variable.
一方、イオンレベルセンサー(Is)tよ、負極の放電
電極の近傍に、導電線を設置し、負イオンの光生量に比
例したイオン電流を誘起させイオン電流アンプ(28)
で増幅し、レベルメーター(29)に表示させた。On the other hand, for the ion level sensor (Is), a conductive wire is installed near the negative discharge electrode to induce an ion current proportional to the amount of negative ion photoproduction, and an ion current amplifier (28)
was amplified and displayed on the level meter (29).
空気の流れを説明すると、まず、77ノ(10)により
、プレフィルタ−(11)から導入された周囲の空気は
、放電電極(13)により正イオンと負イオンとにイオ
ン化され、しかる後グリッド(12)から放出されろ。To explain the flow of air, first, according to No. 77 (10), the surrounding air introduced from the pre-filter (11) is ionized into positive ions and negative ions by the discharge electrode (13), and then the grid Release from (12).
このファン(101は必要に応じてスピードコントロー
ラー(30)により風量が制御されろ。The air volume of this fan (101) is controlled by a speed controller (30) as necessary.
電源回路(19)や高圧O8C回路(22) 、 (2
31は電源ユニット(31)に収納され、ケース(32
)の内部に設置させた。放電電極は針状のタッグステノ
を用いたが、+1として、他にステンレススチールを用
いてもよい。本実施例では、上下2本の支持パー (3
3)に、放電電極(13)を複数個取付け、正極、負極
を交互に配列させたが、放電電極は、正負−対でもよい
。Power supply circuit (19), high voltage O8C circuit (22), (2
31 is housed in the power supply unit (31), and the case (32
) was installed inside. Although needle-shaped tag steno was used as the discharge electrode, stainless steel may also be used as +1. In this example, two upper and lower support pars (3
In 3), a plurality of discharge electrodes (13) were attached and the positive electrodes and negative electrodes were arranged alternately, but the discharge electrodes may be in pairs of positive and negative electrodes.
〈発明の効果〉
本発明は、以上説明したように構成されているので、以
下に記載されるような効果を奏する。<Effects of the Invention> Since the present invention is configured as described above, it produces effects as described below.
■ 空気イオンの発生レベルが表示されろことにより、
装置が正常に動作していることが目視で確認ができる。■ By displaying the generation level of air ions,
You can visually confirm that the device is working properly.
■ 放電電極の表向酸化などの経時変化が生じても、正
イオンと負イオンの均衡が常時体たれるので、帯電物か
ら静電気を完全に除去することが可能となった。■Even if changes occur over time such as surface oxidation of the discharge electrode, the balance between positive and negative ions is maintained at all times, making it possible to completely remove static electricity from charged objects.
■ 帯電物の静電気管理が±IOVという低い電位まで
可能になった。■ Static electricity management of charged objects is now possible down to a low potential of ±IOV.
特に、静電気の除去が必要となる半導体素子や高分子材
料の製造工程に用いることにより、静電気障害がなくな
り、製造コストの向上や、性能改善に大きく役立つ。In particular, when used in manufacturing processes for semiconductor devices and polymeric materials that require the removal of static electricity, static electricity problems are eliminated, which greatly contributes to lower manufacturing costs and improved performance.
第1図は本発明のイオン化エアー送風機のブロック図で
、第2図は要部の構造図。第3図は従来技術の構造図で
ある。
1.32 ケース 2.IOファン3.11 プ
レフィルタ−4高圧電源放電針 6.12 グリッ
ド
イオンバランスセンサー
イオンレベルセンサー 20.− D CE’J変回
路DC固定回路 22.23 高圧OSC回路2s
lf′!圧整流回路 31 電源ユニ7ト13
放電電極FIG. 1 is a block diagram of the ionized air blower of the present invention, and FIG. 2 is a structural diagram of the main parts. FIG. 3 is a structural diagram of the prior art. 1.32 Case 2. IO fan 3.11 Pre-filter-4 high voltage power supply discharge needle 6.12 Grid ion balance sensor ion level sensor 20. - D CE'J transformation circuit DC fixed circuit 22.23 High voltage OSC circuit 2s
lf′! Voltage rectifier circuit 31 Power supply unit 7 13
discharge electrode
Claims (3)
から導入された空気を、正負の高電圧(16)、(17
)が印加された放電電極(13)で正イオンと負イオン
にして、グリッド(12)から送風するイオン化エアー
送風機であって、該放電電極(13)の近傍に設置され
たイオンバランスセンサー(14)からの信号により、
該高電圧を制御することを特徴としたイオン化エアー送
風機。(1) Pre-filter (11) by fan (10)
The air introduced from the
) is applied to the discharge electrode (13), which converts positive ions and negative ions into positive ions and negative ions, and blows the air from the grid (12), the ion balance sensor (14) installed near the discharge electrode (13). ), the signal from
An ionized air blower characterized by controlling the high voltage.
他方の極性の電圧を制御する請求項(1)に記載したイ
オン化エアー送風機。(2) Fixing the voltage of one polarity of the high voltage,
The ionized air blower according to claim 1, wherein the voltage of the other polarity is controlled.
レベルセンサー(15)を設置した請求項(1)又は(
2)に記載のイオン化エアー送風機。(3) Claim (1) or (1) wherein an ion level sensor (15) is installed near the discharge electrode of either positive or negative polarity.
The ionized air blower described in 2).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8679989A JPH02267880A (en) | 1989-04-07 | 1989-04-07 | Ionized air blower |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8679989A JPH02267880A (en) | 1989-04-07 | 1989-04-07 | Ionized air blower |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH02267880A true JPH02267880A (en) | 1990-11-01 |
Family
ID=13896842
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8679989A Pending JPH02267880A (en) | 1989-04-07 | 1989-04-07 | Ionized air blower |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH02267880A (en) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2002216996A (en) * | 2001-01-18 | 2002-08-02 | Keyence Corp | Ionization equipment and its electric discharge electrode bar |
KR20020078672A (en) * | 2001-04-07 | 2002-10-19 | 김영호 | Electrostatic Remove Apparatus |
KR20040019206A (en) * | 2002-08-27 | 2004-03-05 | 박광옥 | Operating circuit of ion blower for removing static electricity and the method thereof |
JP2004253193A (en) * | 2003-02-18 | 2004-09-09 | Keyence Corp | Static eliminator |
WO2006126280A1 (en) * | 2005-05-24 | 2006-11-30 | Hugle Electronics, Inc. | Dc type ionizer |
JP2006337024A (en) * | 2005-05-31 | 2006-12-14 | Kazuyuki Fukui | Device for cleaning concentration measuring instrument of ions in air |
JP2007123166A (en) * | 2005-10-31 | 2007-05-17 | Omron Corp | Direct current type ionizer |
JP2008140637A (en) * | 2006-11-30 | 2008-06-19 | Sunx Ltd | Static eliminator |
JP2009170230A (en) * | 2008-01-15 | 2009-07-30 | Omron Corp | Static eliminator |
JP2010020908A (en) * | 2008-07-08 | 2010-01-28 | Smc Corp | Ionizer |
JP2010198777A (en) * | 2009-02-23 | 2010-09-09 | Smc Corp | Ion balance adjustment type ionizer |
JP2010257992A (en) * | 2010-07-30 | 2010-11-11 | Keyence Corp | Discharge electrode bar of ionizer |
JP2010272534A (en) * | 2010-07-30 | 2010-12-02 | Keyence Corp | Discharge electrode bar of ionization device |
JP2010272533A (en) * | 2010-07-30 | 2010-12-02 | Keyence Corp | Discharge electrode bar of ionization device |
JP2010272532A (en) * | 2010-07-30 | 2010-12-02 | Keyence Corp | Discharge electrode bar of ionization device |
KR101045037B1 (en) * | 2005-05-24 | 2011-06-30 | 휴글엘렉트로닉스가부시키가이샤 | Dc type ionizer |
CN112531466A (en) * | 2019-09-17 | 2021-03-19 | 禅才高科技股份有限公司 | Rod type ion generator with ion balance monitoring and automatic adjusting function |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63143954A (en) * | 1986-12-03 | 1988-06-16 | ボイエイジヤ−.テクノロジ−ズ | Air ionizing method and device |
-
1989
- 1989-04-07 JP JP8679989A patent/JPH02267880A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS63143954A (en) * | 1986-12-03 | 1988-06-16 | ボイエイジヤ−.テクノロジ−ズ | Air ionizing method and device |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4575603B2 (en) * | 2001-01-18 | 2010-11-04 | 株式会社キーエンス | Ionizer and its discharge electrode bar |
JP2002216996A (en) * | 2001-01-18 | 2002-08-02 | Keyence Corp | Ionization equipment and its electric discharge electrode bar |
KR20020078672A (en) * | 2001-04-07 | 2002-10-19 | 김영호 | Electrostatic Remove Apparatus |
KR20040019206A (en) * | 2002-08-27 | 2004-03-05 | 박광옥 | Operating circuit of ion blower for removing static electricity and the method thereof |
JP2004253193A (en) * | 2003-02-18 | 2004-09-09 | Keyence Corp | Static eliminator |
WO2006126280A1 (en) * | 2005-05-24 | 2006-11-30 | Hugle Electronics, Inc. | Dc type ionizer |
KR101045037B1 (en) * | 2005-05-24 | 2011-06-30 | 휴글엘렉트로닉스가부시키가이샤 | Dc type ionizer |
JP2006337024A (en) * | 2005-05-31 | 2006-12-14 | Kazuyuki Fukui | Device for cleaning concentration measuring instrument of ions in air |
JP2007123166A (en) * | 2005-10-31 | 2007-05-17 | Omron Corp | Direct current type ionizer |
JP2008140637A (en) * | 2006-11-30 | 2008-06-19 | Sunx Ltd | Static eliminator |
JP2009170230A (en) * | 2008-01-15 | 2009-07-30 | Omron Corp | Static eliminator |
JP2010020908A (en) * | 2008-07-08 | 2010-01-28 | Smc Corp | Ionizer |
JP2010198777A (en) * | 2009-02-23 | 2010-09-09 | Smc Corp | Ion balance adjustment type ionizer |
JP2010257992A (en) * | 2010-07-30 | 2010-11-11 | Keyence Corp | Discharge electrode bar of ionizer |
JP2010272534A (en) * | 2010-07-30 | 2010-12-02 | Keyence Corp | Discharge electrode bar of ionization device |
JP2010272533A (en) * | 2010-07-30 | 2010-12-02 | Keyence Corp | Discharge electrode bar of ionization device |
JP2010272532A (en) * | 2010-07-30 | 2010-12-02 | Keyence Corp | Discharge electrode bar of ionization device |
CN112531466A (en) * | 2019-09-17 | 2021-03-19 | 禅才高科技股份有限公司 | Rod type ion generator with ion balance monitoring and automatic adjusting function |
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