JPH022652U - - Google Patents
Info
- Publication number
- JPH022652U JPH022652U JP8040188U JP8040188U JPH022652U JP H022652 U JPH022652 U JP H022652U JP 8040188 U JP8040188 U JP 8040188U JP 8040188 U JP8040188 U JP 8040188U JP H022652 U JPH022652 U JP H022652U
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- wafer
- carrier body
- recess
- dust
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims 4
- 238000011156 evaluation Methods 0.000 claims 3
- 238000007689 inspection Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Packaging Frangible Articles (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8040188U JPH022652U (ro) | 1988-06-17 | 1988-06-17 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8040188U JPH022652U (ro) | 1988-06-17 | 1988-06-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH022652U true JPH022652U (ro) | 1990-01-09 |
Family
ID=31305227
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8040188U Pending JPH022652U (ro) | 1988-06-17 | 1988-06-17 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH022652U (ro) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4868656A (ro) * | 1972-12-16 | 1973-09-19 | ||
JPS6375639A (ja) * | 1986-09-19 | 1988-04-06 | Hitachi Ltd | 粒子捕集装置 |
-
1988
- 1988-06-17 JP JP8040188U patent/JPH022652U/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4868656A (ro) * | 1972-12-16 | 1973-09-19 | ||
JPS6375639A (ja) * | 1986-09-19 | 1988-04-06 | Hitachi Ltd | 粒子捕集装置 |