JPH0226248U - - Google Patents

Info

Publication number
JPH0226248U
JPH0226248U JP10425388U JP10425388U JPH0226248U JP H0226248 U JPH0226248 U JP H0226248U JP 10425388 U JP10425388 U JP 10425388U JP 10425388 U JP10425388 U JP 10425388U JP H0226248 U JPH0226248 U JP H0226248U
Authority
JP
Japan
Prior art keywords
shaft
positioning
positioning pin
supports
center line
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10425388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0735394Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988104253U priority Critical patent/JPH0735394Y2/ja
Publication of JPH0226248U publication Critical patent/JPH0226248U/ja
Application granted granted Critical
Publication of JPH0735394Y2 publication Critical patent/JPH0735394Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
  • Control Of Position Or Direction (AREA)
JP1988104253U 1988-08-05 1988-08-05 ウエハ位置決め装置 Expired - Lifetime JPH0735394Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988104253U JPH0735394Y2 (ja) 1988-08-05 1988-08-05 ウエハ位置決め装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988104253U JPH0735394Y2 (ja) 1988-08-05 1988-08-05 ウエハ位置決め装置

Publications (2)

Publication Number Publication Date
JPH0226248U true JPH0226248U (sh) 1990-02-21
JPH0735394Y2 JPH0735394Y2 (ja) 1995-08-09

Family

ID=31335808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988104253U Expired - Lifetime JPH0735394Y2 (ja) 1988-08-05 1988-08-05 ウエハ位置決め装置

Country Status (1)

Country Link
JP (1) JPH0735394Y2 (sh)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015504598A (ja) * 2011-11-08 2015-02-12 インテヴァック インコーポレイテッド 基板処理システムおよび基板処理方法
US9741894B2 (en) 2009-06-23 2017-08-22 Intevac, Inc. Ion implant system having grid assembly

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279148A (ja) * 1985-06-04 1986-12-09 Mitsubishi Electric Corp 半導体ウエ−ハの位置決め装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61279148A (ja) * 1985-06-04 1986-12-09 Mitsubishi Electric Corp 半導体ウエ−ハの位置決め装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9741894B2 (en) 2009-06-23 2017-08-22 Intevac, Inc. Ion implant system having grid assembly
JP2015504598A (ja) * 2011-11-08 2015-02-12 インテヴァック インコーポレイテッド 基板処理システムおよび基板処理方法
US9875922B2 (en) 2011-11-08 2018-01-23 Intevac, Inc. Substrate processing system and method

Also Published As

Publication number Publication date
JPH0735394Y2 (ja) 1995-08-09

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